Wafer Resistivity
See Also: Wafer, Wafer Thickness, Wafer Failure Analysis, Wafer Edge, Wafer Mapping, Wafer Probes, Wafer Probers, Wafer Inspection, Four Point Probes
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Product
Semiconductor Metrology Systems
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MTI Instruments'' semiconductor wafer metrology tools consist of a complete line of wafer measurement systems for virtually any material including Silicon wafer (Si), Gallium Arsenide wafer (GaAs), Germanium wafer (Ge) and Indium Phosphide wafer (InP). From manual to semi-automated wafer inspection systems, the Proforma line of wafer metrology inspection tools is ideal for wafer thickness, wafer bow, wafer warp, resistivity, site and global flatness measurement. Our proprietary push/pull capacitance probes provide outstanding accuracy throughout their large measurement range, allowing measurement of highly warped wafers and stacked wafers. MTII''s solar metrology tools include off line manual systems for wafer thickness and Total Thickness Variation (TTV), as well as, in-process measurement systems capable of measuring wafer thickness, TTV and wafer bow at the speed of 5 wafers/second.
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Product
4-Probe Resistivity and Resistance Tester
HS-MPRT-5
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t used for measuring resistivity of silicon rods and wafers, and sheet resistance of diffused layers, epitaxial layers, LTO conductive films and conductive rubbers, etc.
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Hand Held Probe Type Eddy Current Sheet Resistance/resistivity Measurement Instrument
EC-80P (Portable)
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*Auto-measurement start by probe head contacting to sample*3 measurement modes for wafer resistivity, bulk resistivity and sheet resistance*Easy set up to measurement condition by JOG dial*5 types of model for each measuring range*Resistivity probe can be changed by sample’s resistivity range
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Product
Contactless Wafer Gauge for Resistivity, Thickness
MX 60x
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The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.
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Product
Wafer and Cells PL System
HS-PL
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Photoluminescence (PL) Imaging is a unique non-invasive inspection tool as it can be used in-line at many different steps of the cell manufacturing process. This facilitates the direct comparison of data obtained at one process step to data obtained at another. Additionally, PL imaging can be compared to electroluminescence (EL) imaging on finished cells using comparable equipment.
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Product
Wafer Probers
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Devices to align probes to test the electrical properties of IC chips or TEGs (Test Element Groups) formed on wafers. The vast options available will meet various needs, from research to mass production.
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Product
Wafer Analysis Systems
Tropel®
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Corning Specialty Materials has a long heritage of providing solutions to semiconductor equipment manufacturers. The Tropel line of wafer analysis equipment enables measurement of wafer substrates from 2” to 450mm regardless of material type and surface finish.
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Product
Wafer Probe Loadboards/PIB
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DTS has a full line of standard PIBs for all major tester platforms. Custom PIB designs can accommodate any test head, prober and manipulator configuration, including probe card changers, overhead direct dock setups and cable interfaces. DTS wafer test loadboards are compatible with a variety of pogo pin interface towers. All PIBs are constructed with impedance control, precision matched line lengths, full power and ground planes and both analog and digital resources to provide high quality signal integrity directly to the device.
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Product
Wafer Inspection System
INSPECTRA® Series
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INSPECTRA® series meet the requests of 100% automatic inspection with high speed and high specifications from front-end to back-end of semiconductor processing. INSPECTRA® series are wafer inspection systems with high speed and high sensitivity. Our original "Die-to-Statistical-Image" comparison method achieves the target defects detection controlling process variation and overkill.
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Product
Wafer Mapping Sensor
M-DW1
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Panasonic Industrial Devices Sales Company of America
To provide better safety and improved sensing accuracy, Panasonic studied the requirements for future Wafer Mapping Sensors to ultimately develop the LED Beam Reflective Type Wafer Mapping Sensor, M-DW1. This Sensor uses LEDs as a light source for safe operation and a 2-segment receiving element for higher accuracy in wafer detection.
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Product
Resistance Meters
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ACL provides surface resistance/resistivity meters and digital megohmmeters to quickly and accurately measure resistivity.
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Product
Resistance Tester
METRISO® 3000
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Wolfgang Warmbier GmbH & Co. KG
Suitable for resistance point-to-point and resistance to ground measurementsIntegrated data logger with USB communication port for data transmission (50.000 test values). The supplied Report Generating Software ETC allows to generate a complete test reportA barcode scanner can be used in order to record measurement points before testing
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Product
Wafer Prober Networking System
PN-300
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The Wafer Prober Networking System PN-300 utilizes a database to facilitate data access from other systems and provides an environment that enables the user to edit data and handle processing. The system achieves wide-ranging compatibility by adopting standard hardware and operating system. In addition, it is equipped with an N-PAF (Network-based Prober Advanced Function) to provide robust support for wafer prober operation and maintenance.
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Product
Portable Wafer Probe Station
PS-5026B
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High Power Pulse Instruments GmbH
The PS-5026B is a rugged portable wafer probing solution which has been designed for high reliability, compact size and minimum cost.
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Product
Ground Resistance
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Provide accurate and reliable measurements of both ground resistance and soil resistivity for installation and troubleshooting.
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Product
Earth resistivity meter
16GL-N
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Last release of a very popular family of earth resistivity meters, this 16 bits geoelectrical instrument represents a really performing and affordable solution for Vertical Electrical Soundings at medium and great depth. Reliable and lightweight, 16GL-N is characterized by really first-rate performances, even if it remains extremely easy to use. The possibility to download data through USB enables a quick interpretation with the data inversion software. It is recommended, as to exploit its capabilities, to use it in conjunction with one or more P-100-N rechargeable accumulators.
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Product
Insulation Resistance Measurement
MI20KVe
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The MI-20KVe High-Voltage insulation tester is a truly portable device that allows the measurement of insulation resistances using test voltages up to 20 kV.
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Product
WAFER MVM-SEM® E3300 Series
E3310
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The E3310 is a WAFER MVM-SEM®* for next generation wafers, supporting 1Xnm node process development and volume production at the 22nm node and beyond. With its high-speed carrier system employing a dual arm vacuum robot, and low-vibration platform to improve measurement accuracy, the E3310 delivers high throughput and performance for wafer measurements. Its multi detector configuration and unique 3D measurement algorithm also enable stable, high-accuracy measurement of 3D transistor technologies such as FinFET. The E3310 makes a significant contribution to reducing process development turnaround time and improves productivity for next-generation devices.
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Product
Wafer Inspection System
AutoWafer Pro™
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AutoWafer pro is our most advanced ultrasonic equipment for detecting defects in bonded wafers in a production environment, providing fast, high-resolution scanning of 200mm and 300mm bonded wafers.
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Wafer Thickness, TTV, Bow and Warpage
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ALTO-TTV FAMILY OFFERS THE SPEEDY MEASUREMENT OF WAFER GEOMETRY PARAMETER, MORE IMPORTANTLY, WE CAN AUTOMATE THE TOOL TO HANDLE FROM THIN WAFERS TO PERFORATED, WARPED, BUMPED, AND TAPE-FRAMED WAFERS. OPTIONAL SORTER AND SHIPPING JAR UNPACKING FUNCTION AVAILABLE.
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Product
Wafer Auto Line Integration
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The line is used for semiconductor wafer grinding. It carries out material matching and distribution, automatic loading and unloading, auto focusing and positioning and many other functions. The grinding precision is 2μm(3-sigma). It is also capable of collecting and analyzing real-time production data and interfacing with MES system.
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Product
DC Resistance Tester
ZLD-10
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Shanghai Dean Electrical Co., Ltd
Executive standard: GB/T4074.5-2008/IEC60851-4; Inspection standard: JB/T4279.2-2008Used to measure conductor with nominal diameter ≥0.01～9.0mm or various round or flat copper and aluminum wires and other metal wires with DC current resistance of 100μΩ～99.99Ω;Combination of intelligent DC conductor resistance measuring meter and DC resistance test fixture with sample straightening function;Test range can be selected according to the resistance value of sample, and after clamping samples current resistance value would be displayed;Both potential fixture and current fixture are made of copper;The application of microcomputer control allows for full-automatic completion of test;LED will intuitively display measurement results;
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Product
Wafer Lifetime Measurement with Photoluminescence Detector
WCT-120PL
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Measure the calibrated carrier-recombination lifetime of a silicon wafer using both the standard method and the photoluminescence meth
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Product
Earth and Resistivity Testers
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Earth tester offering selective earth, soil resistivity, earth coupling and continuity measurements
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Product
Surface Resistance Meter
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Wolfgang Warmbier GmbH & Co. KG
Starterkit for testing conductive an dissipative surfaces and electrostatic fields/surface potentials
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Product
Resistance Measurement
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PROMET 100 / 200 / 600 high-accuracy, precision ohm meters deliver an adjustable test current up to 600 A which is independent of the supply voltage. They utilize the four-wire resistance measurement method, enabling them to meet extremely stringent accuracy requirements when determining resistance values in the micro-ohm range.State-of-the-art power electronics coupled with a robust design guarantee maximum reliability, even when used as portable devices in switching stations or industrial environments.The modern operating concept, an interface to the test systems of the ACTAS product line and an optional remote control unit make these micro-ohm meters flexible and versatile.
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Product
WDXRF Wafer Analyzer
2830 ZT
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The 2830 ZT wavelength dispersive X-ray fluorescence (WDXRF) wafer analyzer offers the ultimate capability for measuring film thickness and composition. Designed specifically for the semiconductor and data storage industry, the 2830 ZT Wafer Analyzer enables the determination of layer composition, thickness, dopant levels and surface uniformity for a wide range of wafers up to 300 mm.
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Product
Contact Resistance Meter
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4.5 Digits LED display Range : 0 TO 1999.9 W to 199.99mW High Measurement Current : 100A DC max. True Four wire resistance measuring technique eliminates lead resistance errors inherent in 2 wire systems. Fully protected against overloads. Proven design
