Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Multi-Surface Profiler
Tropel® FlatMaster® MSP
The Tropel® FlatMaster® MSP (Multi-Surface Profiler) is a frequency stepping interferometer that provides fast and accurate metrology for semiconductor wafers up to 300mm in diameter. In seconds up to 3 million data points are collected with sub-micron accuracy enabling total thickness and flatness characterization over the entire surface.
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Adapter, 2.4 mm (m) to 3.5 mm (f), DC to 26.5 GHz
11901C
The Keysight 11901C is a metrology grade, 2.4 mm male to 3.5 mm female adapter with dc to 26.5 GHz operation.
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High Precision Angular Positioning Calibration and Geometry Inspection
LabStandard
Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.Designed for horizontal and vertical applications with self-locking worm gearing and a high accuracy angular encoder ensures sensitivity and fine positioning for metrology and precision testing.
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Scatterometers / Thin Film Metrology Systems
OptiPrime Series
The n&k OptiPrime series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes.
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Dimensional Metrology System
SUMMIT
The VIEW Summit systems are designed for components requiring a large work envelope and high accuracy. Based on the same core technologies of optics, high speed linear motors, and high resolution scales used in the VIEW Pinnacle, the Summit features a fixed bridge design. Separate X and Y axis motion systems ensure that neither influences the mechanical integrity of the other, while also enabling easy loading and unloading of large parts.
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Adapter, 2.4 mm (m) to APC-7, DC to 18 GHz
11902A
The Keysight 11902A is a 2.4 mm male to APC-7, metrology grade adapter with dc to 18 GHz operation.
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Infrared Microscope
DDR200/300 NIR
The McBain DDR200 NIR (for 200mm) and DDR300 NIR (for 300mm) provide high-speed defect detection and precision measurement on wafers and other parts. These cost-efficient systems offer unique advantages for both production and process development use, providing an optimum near-infrared (900-1700nm) solution when both subsurface defect detection and dimensional metrology are required.
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Reticle Manufacturing
An error-free reticle (also known as a photomask or mask) represents a critical element in achieving high semiconductor device yields, since reticle defects or pattern placement errors can be replicated in many die on production wafers. Reticles are built upon blanks: substrates of quartz deposited with absorber films. KLA’s portfolio of reticle inspection, metrology and data analytics systems help blank, reticle and IC manufacturers identify reticle defects and pattern placement errors, thereby reducing yield risk.
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Analytical Software for Microscopy
SPIP
SPIP™ or Scanning Probe Image Processor - is an advanced software package for processing and analyzing microscopic images at nano- and microscale. It has been developed as a proprietary software by Image Metrology and is unique in the microscopy and microscale research market. With the high level of usable features, SPIP provides industrial and academic researchers with an advanced toolkit for working with microscope images, incl. extracting data from most microscopy file types, cleaning and enhancing data, analyzing measurements, visualizing and reporting analysis results. The software is used for research and innovation in a variety of industries such as pharmaceutical, cosmetics, semiconductors, hard disk manufacturing, polymer and aluminum manufacturing. Furthermore, SPIP is widely recognized as the standard microscope image analysis software for research and education at leading universities, and has been cited in more than 1200 scientific publications.
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Biconical Antennas
TDK Biconical Antennas - precision biconical antenna, metrology biconical antenna, high power biconical antenna.
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Dimensional Metrology
Stand-Alone Metrology Family
Nova’s stand-alone metrology platforms are utilized to characterize critical dimensions such as width, shape and profile with high precision and accuracy and are used in multiple areas of the fab such as photolithography, etch, CMP and deposition in the most advanced technology nodes, across all semiconductor leading customers.
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Meter Test Equipment
Signals & Systems India Private Limited
Our meter test equipment is a user-friendly and innovative device for energy meter calibration, built on the current technologies – Bluetooth & Android. The metrology sub-unit measures and communicates the parameters to an Android Tab via Bluetooth. All user interfaces – textual, graphical, and data entry are made available on the Android application, with innovative features. Being a portable device measuring the voltages and currents from the metering panel, the product ensures the safety of the test personnel by making use of wireless communication between the equipment – which is connected to the High Voltage- and the user interface – Tab.
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CEP Stable Lasers And CEP Phase Stabilization
Carrier envelope phase stabilization (CEP) is an enabling technology for metrology and for the generation of few cycle pulses. As one of the pioneers in the field we have developed products that allow to stabilize the carrier envelope phase of light pulses of few cycle pulse oscillators and amplifiers.
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CAD Software
Verisurf CAD
Verisurf CAD is the foundation of all Verisurf suites and makes our software unique in the metrology industry. Verisurf software is different because it not only imports every major CAD file format; it is a complete 3D modeling application.Verisurf is the only metrology software that includes wireframe modeling, NURBS surfacing, Parasolid solid modeling, 2D drafting, and Model-Based Definition (MBD) that automates manufacturing.
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Atomic Force Microscope
XE-PTR
Park Systems' PTR Series is a fully automatic industrial in-line AFM solution for, but not limited to, automatic Pole Tip Recession measurements on Rowbar-level, individual Slider-level, and HGA-level sliders. With sub-nano scale accuracy, repeatability, and throughput, the PTR Series is the metrology tool of choice for Slider manufacturers to improve their overall production yield.
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Wafer Inspection Products
Sonix provides manual and automated wafer inspection and metrology systems for wafers ranging from 100mm to 300mm, with extensive analysis capabilities at both the wafer and device level. These industry-leading automated wafer inspection systems are used by the world’s top manufacturers to ensure quality from development through production.
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Smart Factory Inspection System
API, recognizing manufacturing industry’s increasing demand for part measurement automation, with a higher degree of accuracy, has developed its Smart Factory Inspection System with true 6 Degrees of Freedom (6DoF) real-time 3D robotic measurement incorporating its proven metrology technology and calibration components.SFIS can be delivered as a customized integrated solution or as a standard production inspection cell.
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Static and dynamic analysis
MEMS
Static and dynamic analysis and visualization are critical parts of the test and development process for MEMS microstructures in order to characterize surface metrology and measure in and out of plane motions. The PS4L Adaptive Architecture is ideal for configuring a system to perform tests to very specialized requirements of the MEMS customer. MEMS customers often require vacuum probing, which is available in semiautomatic and fully automatic configurations.
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Compound Semi | MEMS | HDD Manufacturing
KLA has a comprehensive portfolio of inspection, metrology, and data analytics systems to support power devices, RF communications, LED, photonics, MEMS, CPV solar and display manufacturing. High brightness LEDs are becoming commonly used in solid-state lighting and automotive applications, and LED device makers are targeting aggressive cost and performance improvements, requiring more emphasis on improved process control and yield. Similarly, leading power device manufacturers are targeting faster development and ramp times, high product yields and lower device costs, and are implementing solutions for characterizing yield-limiting defects and processes. KLA's inspection, metrology and data analytics systems help these manufacturers control their processes and increase yield.
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Bottle Cap Torque Meter
HN-B
Shenzhen Chuangxin Instruments Co., Ltd.
HN-B Series Cap Torque Meter is an intelligent metrologic instrument and is designed for detecting and calibrating the torsion of various caps. Installation of clamps is easy, rapid and its max diameter can reach 200mm.You can connect it to PC by USD output and transmit data for analysis and printing.
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Fizeau Interferometers
Fizeau interferometers offer an unmatched combination of performance, quality and value in optical metrology. They produce accurate, repeatable interferometric measurements of surface shape, radius of curvature and transmitted wavefront quality.
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Surface Imaging & Metrology Software
Mountains®
Analyze multiple types of surface data. Turn your surface data into accurate, visual surface analysis reports. See every feature with high quality real-time 3D imaging of surface topography. Characterize surfaces in accordance with the latest metrology standards.
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Edge Radius Measurement
EDGEINSPECT
NOVACAMTM EDGEINSPECTTM system is a modular, non-contact 3D metrology system that:Measures, down to the micron, any type of edge: cutting edges, inside or outside edges, edges on round holes, straight edges, etc.
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STRUCTURED LIGHT PROJECTORS
LUMAXIS
Lumaxis strives to become an industry leading supplier of state-of-the-art-projection engines for 3D Metrology. Our mission is to accelerate the industry’s transition to the most advanced and economically compelling structured light projectors available. Please take a moment to tell us your requirements in the form below. We understand this is a very price-sensitive industry. Our ability to deliver projection engines at an aggressive price depends largely on quantity and the capability of the projector you’re requesting. Thank you for taking time to provide this information.
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Inspection Systems
EVG's metrology solutions for wafer inspection and measurement are optimized for lithography and all types of bonding applications. Customers can choose between integration of the metrology technology within fully-automated equipment, or stand-alone metrology systems serving multiple process steps. EVG's metrology solutions are optimized to maximize our customers' production yields, featuring:
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Advanced Stand-Alone AFM
SmartSPM
The SmartSPM Scanning Probe Microscope is the first 100% automated system that offers its cutting-edge technology of ultra-fast, metrological and high-resolution measurements for the most advanced materials research at the nanoscale in all AFM and STM modes. With the SmartSPM zooming in from large up to 100 µm overview scans down to atomic resolution has become a reality. Its design has been specially developed to be capable of being seamlessly integrated with optical spectroscopies (SNOM, Raman, Photoluminescence and TERS/SERS techniques).
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Three Phase Meter Test Board
MTB-3050
TESCO’s MTB-3050 is a Three Phase Meter Test Board with every laboratory feature you could want along with metrology and software suitable for your production meter testing needs.
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Optical Metrology
YieldStar
Our YieldStar optical metrology solutions for the semiconductor industry can quickly and accurately measure the quality of patterns on a wafer.
