Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Optical 3D Measuring Systems & Devices For Your Quality Assurance
As a manufacturer of optical industrial metrology, we offer a broad portfolio of optical 3D measuring systems & devices to support companies in various industries with precise quality assurance in production. Based on Focus Variation technology, our measuring systems not only enable surface roughness measurement, but also the detection of micro-geometries, shapes and structures.
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PANELMAP
PANELMAP is a software package used to collect, edit, analyze and visualize measured physical parameters on rectangular semiconductor panels. PANELMAP can import data files from various metrology tools such as ellipsometers, thickness gauges and four point probes. The imported data can then be visualized or printed as line scans, contour plots, 2D or 3D plots or as a histogram.
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Reference Meter
SB1300
Shenzhen Star Instrument Co., Ltd.
The SB1300 three-phase multi-function reference meter incorporates 32-bit floating point DSP, wide-range measuring and embedding industrial PC technologies. This model was the first approved by China National Institute of Metrology. Star Instrument has been granted the first manufacturing license for class 0.02 reference meters. Basic measuring range (phase voltage): 1V~480V, current measuring range: 1mA~120A; wide measuring range (phase voltage): 0.1V~1000V, current measuring range: 0.1mA~200A
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Materials Metrology
Nova is a market leader for innovative thin film metrology and process control technologies. We develop highly sensitive in-line metrology solutions on high productivity platforms, thereby enabling critical metrology solutions to be closer to a semiconductor fab’s process and integration needs.Our technologies enable customers to accurately detect and quantify small variations in film composition and thickness, thereby influencing better device functionality, and improved manufacturing yield.
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Process XRR, XRF, and XRD metrology FAB tool
MFM310
Thickness, density, roughness & composition of films on blanket and patterned wafers. The Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.
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Surface Imaging & Metrology Software
Mountains®
Analyze multiple types of surface data. Turn your surface data into accurate, visual surface analysis reports. See every feature with high quality real-time 3D imaging of surface topography. Characterize surfaces in accordance with the latest metrology standards.
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Optical Coordinate Measuring System
MaxSHOT 3D
Creaform’s MaxSHOT 3D lineup is a game changer for product development, manufacturing, quality control and inspection teams that need the highest measurement accuracy and repeatability as much for large‑scale projects than parts from 2 to 10 m. Imagine achieving accuracy better than 0.015mm/m! Thanks to its sophisticated user guidance technology and easy‑to‑use software, the MaxSHOT 3D is ideal for users of all levels—even non‑metrology experts—so that you gain peace of mind knowing your measurements are always right on the dot and you increase process efficiency. If you consistently work on large‑scale projects, the MaxSHOT 3D is your go-to solution to slash budget-busting measurement mistakes, improve product quality, increase process efficiency—and minimize overall operating costs.
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Make Your 3D Control Smarter
VALUE ADDED SOLUTIONS
At Metrologic Group, we always seek to be a problem-solver for industrial manufacturers and quality assurance professionals. That is why, we continuously develop improvements of our software and complementary solutions to respond or even outreach customer expectations.
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Full 3D Inline Metrological & Imaging AOI
Metrological Full 3D AOI is achieved by measuring all 3 dimensions (X, Y and Height) to detect every measurable solder and component defect pre-reflow and/or post reflow soldering.
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Current Transformers
Excellent measurement technology requires high-quality current transformers. The product portfolio comprises a wide range of current transformers for load currents (operating currents) and residual currents (RCM). Different designs cover a variety of installation situations and metrological requirements, and enable retrofitting. AC/DC sensitive measuring current transformers use a special measurement method to detect both AC and DC currents of different frequencies.
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Optical Thin-Film Metrology for Advanced Thin Films
FilmTek 6000 PAR-SE
Scientific Computing International
Production-proven metrology system for film thickness, refractive index and stress measurement for a broad range of film layers at the 1x nm design node and beyond. Accommodates 200 or 300 mm wafer metrology. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to meet the challenging demands associated with multi-patterning and other leading-edge device fabrication techniques.
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Platform
AXM XM8000 Wafer
The complete solution for operator free, automated X-ray wafer metrology. XM8000 is specifically designed for inline use in clean room environments.
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3D Scanning System
CyberGage360
Unprecedented combination of speed, accuracy and one-button simplicity for non-contact automated 3D scanning inspection.CyberGage360 dramatically Speeds Up Quality Assurance of Incoming Parts Inspection & In-Process Inspection of components on the manufacturing floor; Lowers Cost of Quality & Speeds Up Product Time-to-Market. Designed for use in general purpose metrology, the CyberGage360 has a range of potential industrial applications from automotive to aerospace to consumer electronics, where high accuracy and high speed throughput are important.
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microRSP
M200
The window of acceptable sheet resistance is shrinking with each technology node resulting in increasingly more rigorous standards for scale and accuracy of metrology tools. The shortcomings of traditional types of 4 point probes are becoming more and more evident. By developing the microRSP-M200, a unique tool for measuring the sheet resistance of conducting films, hereunder ultra shallow junctions (USJ’s), CAPRES A/S has responded to the growing need for reliable sheet resistance measurements on micro scale.
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Chip Manufacturing
KLA’s advanced process control and process enabling solutions support integrated circuit manufacturing. Using KLA’s comprehensive portfolio of defect inspection, review, metrology, patterning simulation, in situ process monitoring and data analytics systems, IC manufacturers can manage yield and reliability throughout the chip fabrication process - from research and development to final volume production. SPTS provides deposition process solutions for insulating materials and conducting metals that cover a range of chip manufacturing process steps. IC manufacturers use KLA's array of products and solutions to help accelerate their development and production ramp cycles, to achieve higher semiconductor die yield and improved IC quality, and to improve overall profitability in the IC manufacturing process.
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Compact General-Purpose Metrology System
Benchmark 250
The Benchmark 250 is a compact general-purpose metrology system with all the features and capabilities of the larger VIEW Micro-Metrology models. With travel of 300 x 150 x 150 mm, the Benchmark can accommodate a wide range of part sizes, and is rugged enough to be located in either a Q/A lab or an inspection station on the production floor.
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Electrodeless Z-Pinch™10 Watt EUV Source
EQ-10
The EQ-10 is a compact, easy-to-use, reliable, and cost-effective EUV light source, based on Energetiq's proven Electrodeless Z-pinch™ technology using Xenon gas. The EQ-10 EUV source is uniquely suited for metrology and research applications.
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High Precision Angular Positioning, Calibration and Geometry Inspection
LabStandard COMPACT
Rotary Precision Instruments UK Ltd
Designed for horizontal or vertical applications with a high accuracy angular encoder ensures sensitivity and fine positioning for metrology and precision testing.
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DUV-NIR Spectroscopic Reflectometry
FilmTek 2000
Scientific Computing International
Automated metrology system designed for rapid, reliable, and accurate characterization of nearly any unpatterned thin film. Fully user-customizable wafer mapping capabilities rapidly generate 2D and 3D data maps of any measured parameter. Capable of simultaneous determination of multiple film characteristics within a fraction of a second per site.
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Industrial Calibrators
A temperature calibrator, often called a thermometer calibrator, is used to correct inaccuracies in installed thermometers and temperature sensors, because temperature measurement is a critical parameter in many industrial processes. Although simulators are sometimes called temperature calibrators or thermometer calibrators and may be used to provide thermometer calibration for the electronics in an installed system, a temperature source with a calibrated reference sensor is still required to provide a complete and meaningful calibration. Fluke Calibration industrial and field temperature calibrators include: Metrology Wells; Field Metrology Wells; field dry-well calibrators; handheld dry block calibrators; Micro-Baths; large target infrared calibrators; field IR calibrators; ice-point dry-well; and thermocouple furnaces.
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kSA ACE
The kSA Atomic Control for Epitaxy (ACE) metrology tool is a highly sensitive instrument that measures the in situ flux rate of atomic species using the principle of atomic absorption spectroscopy.
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Three Phase Meter Test Board
MTB-3050
TESCO’s MTB-3050 is a Three Phase Meter Test Board with every laboratory feature you could want along with metrology and software suitable for your production meter testing needs.
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Multi-Surface Profiler
Tropel® FlatMaster® MSP
The Tropel® FlatMaster® MSP (Multi-Surface Profiler) is a frequency stepping interferometer that provides fast and accurate metrology for semiconductor wafers up to 300mm in diameter. In seconds up to 3 million data points are collected with sub-micron accuracy enabling total thickness and flatness characterization over the entire surface.
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Software
Measuring, evaluation and management software enables you to increase the performance of all your metrology operations.
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Customized Solutions
Artifex Engineering GmbH & Co. KG
Our products form the basis of a wide range of R&D and industrial metrological applications. At Artifex Engineering we strive to maintain a close relationship with our customers to ensure that the products we deliver meet your needs cost effectively. We understand that your application is not standard and so we offer customization of all of our products, even for single units. Our manufacturing infrastructure includes rapid prototyping machinery and a flexible manufacturing environment allowing us to customize quickly and efficiently – a definite pricing advantage.
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Smart Factory Inspection System
API, recognizing manufacturing industry’s increasing demand for part measurement automation, with a higher degree of accuracy, has developed its Smart Factory Inspection System with true 6 Degrees of Freedom (6DoF) real-time 3D robotic measurement incorporating its proven metrology technology and calibration components.SFIS can be delivered as a customized integrated solution or as a standard production inspection cell.
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Coupler Metrology
Rosenberger Hochfrequenztechnik GmbH & Co. KG
Rosenberger provides directional coupler-based measurement techniques as well as probes for comprehensive cross-domain coupling analysis.Nowadays, the introduction of new accessories within vehicles, like rear seat infotainment, smart dashboards, and various advanced driver assistance systems, has increased the demand for high-speed automotive bus systems working in parallel with the high-voltage power networks in electric cars.
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Software
LK Metrology offers the ultimate choice of CMM multi-sensor metrology softwares. The CAMIO software fits all solutions, especially those high-end industries, such as the aerospace industry, point cloud measurements and for offline solutions while the ARCOCAD software suits standard application, manual CMMs and portable measuring arms.
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Adapter, 2.4 mm (m) to 3.5 mm (f), DC to 26.5 GHz
11901C
The Keysight 11901C is a metrology grade, 2.4 mm male to 3.5 mm female adapter with dc to 26.5 GHz operation.
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Horizontal Calibration Instruments (Lab)
Labconcept Nano
The Labconcept Nano is a new reference in the field of dimensional metrology. It integrates 40 years of knowledge and continuous improvement. It is a remarkable instrument for all measuring tasks that require extremely high accuracy.
