Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Linear Metrology System
The ZeroTouch® Linear Metrology System is a high-speed, non-contact linear inspection system ideal for measuring linear-shaped parts such as hip stems and aerospace blades faster than traditional methods.
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Metrology System
Aspect
Memory density increases with both layer-pair scaling and tier stacking for memory stacks well over 200 pairs. The Aspect metrology system was designed with these future architectures and scaling strategies in mind. Aspect metrology is demonstrating performance superior to X-ray systems across multiple customer devices through a revolutionary infrared optical system providing full profiling capability to enable critical etch and deposition control, with the speed and process coverage that customers require.
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Scatterometers / Thin film Metrology Systems
Olympian Series
DUV-Vis-IR (Wavelength Range: 190nm – 15,000nm) Scatterometers / Thin Film Metrology Systems: The n&k Olympian, n&k Olympian-450 and n&k Olympian-M are DUV-Vis-IR scatterometers/thin film metrology systems with micro-spot technology, covering the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s DUV-Vis-NIR scatterometer series – the OptiPrime-CD Series.
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Compact General-Purpose Metrology System
Benchmark 250
The Benchmark 250 is a compact general-purpose metrology system with all the features and capabilities of the larger VIEW Micro-Metrology models. With travel of 300 x 150 x 150 mm, the Benchmark can accommodate a wide range of part sizes, and is rugged enough to be located in either a Q/A lab or an inspection station on the production floor.
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Advanced Metrology System
NGS 3500L
This top performance system is designed for applications where high-speed defect detection and precision measurements on wafers and other parts are required. It is well suited for use as a dedicated production tool or as a versatile processdevelopment system. It features a powerful set of automated as well as semi-automatic optical/ video tools optimized for high accuracy, production throughput, and ease of use.
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Advanced Metrology System
AMS Series
Precision systems for accurate measurement and quality control in semiconductor manufacturing.
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Metrology Training Services
As a leading provider of precision measurement equipment we are experts at training new equipment customer on how to get the best out of the equipment and training in the accompanying software functionality. Training can take place at an API facility or your location. Customers will required to pass a competency test and will subsequently receive a certificate of training completion.
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Metrology Systems
VIEW offers a full line of optical metrology systems for wafer, photomask, slider, MEMS, semiconductor package, HDD suspension, probe card, and micro-component process measurements.
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Materials Metrology
Nova is a market leader for innovative thin film metrology and process control technologies. We develop highly sensitive in-line metrology solutions on high productivity platforms, thereby enabling critical metrology solutions to be closer to a semiconductor fab’s process and integration needs.Our technologies enable customers to accurately detect and quantify small variations in film composition and thickness, thereby influencing better device functionality, and improved manufacturing yield.
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Express Analyzer
MAYA Express
Lyncis Express Analyzer was developed to answer the need for fast and reliable material chemical composition analysis. The application is valued by the clients where modern agile manufacturing metrology being applied and quick assessment of material is necessary to adjust critical process parameters without waiting on the lab results.
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Automatic Online Flatness and Surface Appearance System
UltraSort200
The UltraSort continues our 25 year tradition of providing metrology solutions to semiconductor wafer manufacturers. Designed for volume wafer production, this automated system offers superior performance in rapid, repeatable, accurate, noncontact qualification of silicon and alternative substrate wafers.
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Rotary Positioning
Direct Drive Theta
Our Direct Drive Theta (DDT) rotary stage units feature a compact mechanical design that makes them easy to integrate into metrology systems and other machines that need precision positioning.
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Particle Deposition Systems
MSP’s 2300G3 Particle Deposition System sets the standards for wafer inspection and metrology equipment. This advanced tool is vital for increasing the yield of future leading-edge devices, while meeting the measurement needs of today.
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Laser Scanning Systems
QFP markets manually handled and optically tracked 3D laser scanners that set new standards in the metrology measurement industry. The products are characterized by exceptional performance, ease of use and cost-effectiveness and are the perfect solution for the metrology room as well as for the production line, stand-alone or automated.
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Automated Surface Inspection for Glossy Components
Flawlessly glossy surfaces are among the most important quality features of many premium products. The smallest surface defects immediately have a degrading effect on the product. The result: disappointed end customers or buyers. At the same time, reflective surfaces are often very sensitive and a challenge for optical metrology. A manual inspection is tedious, expensive, and ultimately always governed by subjective decision criteria. During production, faulty painting or coating processes can cause high scrap rates. Defects that are not detected even during the final inspection can lead to expensive complaints and, in the worst case, to the loss of the customer. Only an efficient, automated surface inspection achieves the highest quality at acceptable costs.
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SPC Software Gauging Software
Solartron Metrology offer three Software packages which offer the user different features at different prices.
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SlipFinder
YIS and SF Series
The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystaldislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilizeMakyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.The SF300M and SF300N systems offer a low cost functionally equivalent alternative to the YIS series.
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EFEM Platform
Our EFEM Platform can act as a standard EFEM, or can be customized to suit your application’s cleanliness, handling technique, throughput, and form-factor requirements. From design to manufacturing, we offer units in varying complexity and precision and can integrate the needed hardware, software, vision, optics design, sub-micron metrology, environmental control and materials handling to fit your needs from single units to 4-wide.
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Adapters and Connectors
A broad range of adapters and connectors designed for long life, exceptional repeatability, and legendary reliability. Metrology grade, instrument grade, and general purpose grade adapters are available in frequencies up to 110GHz.
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Metrology System
CCC System
Our versatile and robust Cryogenic-Current-Comparator (CCC) system allows high-quality measurements with a fully computer controlled system.
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Laser Interferometers
ZYGO laser interferometers support and enable the most demanding metrology applications in industries from semiconductor and lithography to space-borne imaging systems, cutting-edge consumer electronics, defense-related IR and thermal imaging systems and ophthalmics.
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Engineered Measurement Solutions
Our mission is to deliver integrity based calibration services, cost effective metrology engineering solutions for individual customer requirements, reputable instrument repair services, sales of industry-known brands of test equipment, and full service test engineering, from integration of hardware and software, to documentation and training.
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Make Your 3D Control Smarter
VALUE ADDED SOLUTIONS
At Metrologic Group, we always seek to be a problem-solver for industrial manufacturers and quality assurance professionals. That is why, we continuously develop improvements of our software and complementary solutions to respond or even outreach customer expectations.
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Non-contact 3D Optical Profilers
LuphoScan platforms are interferometric, scanning metrology systems. They are designed to perform ultra precision non-contact 3D form measurements mainly of rotationally symmetric surfaces such as aspheric lenses.
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Platform
AXM XM8000 Wafer
The complete solution for operator free, automated X-ray wafer metrology. XM8000 is specifically designed for inline use in clean room environments.
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High Precision Angular Position, Calibration and Geometry Inspection
GeoOrdinate
Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.The GeoOrdinate has been designed specifically for the inspection of large and heavy components and is fully compatible with any shop floor environment whilst maintaining world class accuracies more commonly seen in the standards laboratory.
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Micro-spot DUV Reflection and Transmission Spectrophotometry
FilmTek 3000 PAR
Scientific Computing International
Metrology system with a 50µm spot that delivers high-performance transmission and reflection measurement of patterned films deposited on transparent substrates. Ideally suited for measuring the thickness and optical constants of very thin absorbing films.
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kSA ICE
The k-Space Integrated Control for Epitaxy system (ICE) is a modular in situ metrology tool designed for today’s MOCVD and MBE reactors. It combines kSA MOS, kSA BandiT and kSA RateRat Pro patented technologies along with an Emissivity Corrected Pyrometry (ECPR) module. The kSA ICE modular design allows the user to specify which modules will be used in their kSA ICE configuration.
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Industrial Lenses
ZEISS lenses for technical applications are key components in complex production processes (Machine Vision) as well as in optical metrology, medical applications, traffic enforcement, quality assurance, sports and many other applications. Here they prove their outstanding image performance and reliability. Due to the precise manual adjustment of the helical focusing mount our partners will gain much better results than with comparable lenses.
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Ambient Air Quality Monitoring System
AQMS
AQMS, the doctor for "Human Health"An Air Quality Monitoring Station (AQMS) is a system that measures metrological parameters such as wind speed, wind direction, rainfall, radiation, temperature, barometric pressure and ambient parameters. The AQMS also integrates a series of ambient analyzers to monitor the concentration of air pollutants (such as SO2, NOx, CO, O3, THC, PM, etc.), continuously. HORIBA also provides mobile monitoring stations that can be used to monitor ambient conditions at multiple sites.
