Process XRR, XRF, and XRD metrology FAB tool

Thickness, density, roughness & composition of films on blanket and patterned wafers. The Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.

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X-ray Diffraction (XRD) Instruments

Rigaku Corp.

X-ray diffraction (XRD) is one of the most important non-destructive tools to analyze all kinds of matter—ranging from fluids, to powders and crystals. From research to production and engineering, XRD is an indispensable method for materials characterization and quality control. Rigaku has developed a range of diffractometers, in co-operation with academic and industrial users, which provide the most technically advanced, versatile and cost-effective diffraction solutions available today.

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XRD System

SmartLab® - Rigaku Corp.

SmartLab includes as standard Rigaku's patented Cross Beam Optical™ (CBO) technology. CBO technology uses simultaneously mounted, simultaneously aligned optical components for both focusing (Bragg-Brentano) and parallel beam diffractometer geometries. Users can switch between the two geometries without the need to remove, replace, or realign optical components.

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Benchtop X-ray diffraction (XRD) instrument

MiniFlex - Rigaku Corp.

New sixth generation MiniFlex X-ray diffractometer (XRD) is a multipurpose analytical instrument that can determine: phase identification and quantification, percent (%) crystallinity, crystallite size and strain, lattice parameter refinement, Rietveld refinement, and molecular structure. It is widely used in research, especially in material science and chemistry, as well as in industry for research and quality control. It is the newest addition to MiniFlex series of benchtop X-ray diffraction analyzers from Rigaku, which began with the introduction of the original MiniFlex system decades ago.

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Multipurpose X-Ray Diffractometer with Built-In Intelligent Guidance

SmartLab SE - Rigaku Corp.

The SmartLab® SE is a highly versatile multipurpose X-ray diffractometer with built-in intelligent guidance. It offers continued refinement of the original ease of use features that enabled the original SmartLab to receive the R&D 100 Award in 2006: automatic alignment, component recognition, cross beam optics and advanced photon counting hybrid pixel array detectors (HPAD).

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General Purpose Benchtop XRD System for Phase I.D. and Phase Quantification

Rigaku Corp.

In a move to bring lab-quality performance to the manufacturing floor, Rigaku introduces the MiniFlex XpC, a manufacturing-optimized powder diffractometer for fast and accurate quality control measurements. It is extremely easy to operate using Rigaku’s new EasyX quality control software, which requires minimal clicks to run. A minimal interface means there will be no accidental error variance from operator to operator. The MiniFlex XpC can be configured with a conveyor belt or robot for automated sample processing and collaboration with other instruments. With an 800 W X-ray source and a short-diameter goniometer, the system has the performance of a lab unit, and thus can greatly improve throughput for quality control measurements.

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Windows-Based Software Suite for Rigaku's X-Ray Diffractometers

SmartLab Studio II - Rigaku Corp.

SmartLab Studio II is a new Windows®-based software suite developed for the flagship Rigaku SmartLab X-ray diffractometer that integrates user privileges, measurements, analyses, data visualization and reporting. Newly available for the MiniFlex, the modular (plugin) architecture of this software delivers state-of-the-art interoperability between the functional components. Just one click switches from measurement to analysis. Watch real-time scans from one experiment while simultaneously analyzing other data on the same desktop by selecting an appropriate layout. The software provides various analysis tools such as automatic phase identification, quantitative analysis, crystallite-size analysis, lattice constants refinement, Rietveld analysis, ab initio structure determination, etc.

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Labratory Micro-Spot XRD Residual Stress Analysus with both Iso- and Side-Inclination Methods

AutoMATE II - Rigaku Corp.

Residual stress may be created during the manufacturing process of a material, or it may accumulate in a structure over many years in operation. In either case, this stress can have a serious negative effect on a product's quality, durability and lifetime. Accurate detection of residual stress is an important element of the quality control process and helps predict the service lifetime of products.

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X-Ray Seamless Pixel Array Detector

XSPA-400 ER - Rigaku Corp.

In general, X-ray diffraction measurements using a Cu X-ray source are known to have difficulty detecting trace crystalline phases because of increased background when measuring samples containing transition metals. The high energy resolution of the XSPA-400 ER supresses the fluorescent X-rays originating from the sample, thereby reducing background, enabling highly sensitive measurements of samples containing transition metals, such as iron and steel compounds and battery materials.Therefore, it achieves higher sensitivity measurements than conventional detectors.

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Compact Photon Counting X-Ray Detector

HyPix-3000 - Rigaku Corp.

Rigaku’s HyPix-3000 is a next-generation two-dimensional semiconductor detector designed specifically to meet the needs of the home lab diffractionist. One of the HyPix-3000’s unique features is its large active area of approximately 3000 mm² with a small pixel size of 100 μm², resulting in a detector with high spatial resolution. In addition, the HyPix-3000 is a single photon counting X-ray detector with a high count rate of greater than 10⁶ cps/pixel, a fast readout speed and essentially no noise.

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