Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Surface Analysis
Dimension AFP
The Dimension AFP is the world's only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler tomonitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability.
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microRSP
M200
The window of acceptable sheet resistance is shrinking with each technology node resulting in increasingly more rigorous standards for scale and accuracy of metrology tools. The shortcomings of traditional types of 4 point probes are becoming more and more evident. By developing the microRSP-M200, a unique tool for measuring the sheet resistance of conducting films, hereunder ultra shallow junctions (USJ’s), CAPRES A/S has responded to the growing need for reliable sheet resistance measurements on micro scale.
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Potable Coordinate Measuring Machines
Romer
A first in the world of portable measuring arms: The ROMER Absolute Arm features absolute encoders and is therefore the first measuring arm which does not require referencing before measurement. When the arm is turned on, it’s ready to go.Quality control, inspection, on-machine verification, reverse engineering, virtual assembly or 3D modelling. Wherever these needs arise, you will find the ROMER Absolute Arm. Much more than just a metrology tool, its value lies in its versatility.Portability, stability, light weight and high-performance laser scanners make the ROMER Absolute Arm an all-purpose 3D measurement, analysis and digitising tool that can be used by anyone, anywhere and with minimum training.Unlike many metrology devices, the ROMER Absolute Arm does not require warm-up time or initialization, thanks to a stable carbon fiber structure and industry leading Absolute encoders. Simply take the measuring arm to the part, switch it on and start measuring.
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Non Contact Measurement
There is no one-size-fits-all solution for accurate measurement, and different applications require different measurement systems. At Vision Engineering, we design and manufacture a broad range of non-contact measurement systems from toolmakers’ measuring microscopes to fully automated CNC video measuring systems with optional contact measurement available. Combined with the latest metrology software solutions available, we offer the right tool for the job.
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Panels
Designed mainly for Fanout Panel-Level-Package (FO-PLP) applications, Camtek’s Golden Eagle is used for the inspection and metrology of standard panel sizes, up to 650mm x 650mm. The Golden Eagle addresses the challenges of FOWLP while providing a robust system that addresses the most stringent, high-volume manufacturing requirements.
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CT PT Tester
HTFA-103 / 335
Wuhan Huatian Electric Power Automation Co., Ltd.
Used for automatic testing of protective and metrological CT/PT.
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Measurement Systems
MicroMeasure3D
Sciences et Techniques Industrielles de la Lumière
STIL MicroMeasure3D, PORTICO3D and MAESTRO3D are measurement systems designed to achieve true 3D metrology of each point for the most demanding applications adapted to Industry 4.0 standards.
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Thermal Warpage and Strain Measurement Tool
PS200S
The TherMoir PS200S is a metrology solution that utilizes the shadow moir measurement technique combined with automated phase-stepping to characterize out-of-plane displacement forsamples up to 150 mm x 200 mm. With time-temperature profiling capability, the TherMoir PS200S captures a complete history of a sample's behavior during a user-defined thermal excursion.
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Stand alone Software
MeX
MeX is a stand alone software package that turns any SEM with digital imaging into a true surface metrology device. Using stereoscopic images the software automatically retrieves 3D information and presents a highly accurate, robust and dense 3D dataset which is then used to perform traceable metrology examination. The results are obtained irrespective of the SEM magnification providing metrology at macro and micro levels. No additional hardware is necessary to run MeX and it can be used with any SEM. Due to the unique AutoCalibration routine the calibration data is automatically refined. Thereby only MeX enables traceable 3D measurements at any magnification in the SEM.
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Nano-Position Sensors
ZYGO nano-position sensors are widely used in closed-loop motion control systems like photolithography and semiconductor inspection tool stages, as well as for deformable optical systems. We have pioneered innovations in the displacement and position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs.
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Software
LK Metrology offers the ultimate choice of CMM multi-sensor metrology softwares. The CAMIO software fits all solutions, especially those high-end industries, such as the aerospace industry, point cloud measurements and for offline solutions while the ARCOCAD software suits standard application, manual CMMs and portable measuring arms.
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Semiconductor Solutions
Bruker's suite of technologies for semiconductor manufacturing address critical metrology and process needs across the broadest range of applications from R&D to process improvement. 75% of the world's top 25 semiconductor manufacturers rely on Bruker metrology tools for front-end and back-end applications, including development of their next-generation products.
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Metrology Equipment
Exact Metrology sells, services and implements metrology equipment from the 3D scanning industry's leading manufacturers. Our highly trained team can configure our comprehensive lineup of portable CMMs, 3D scanners, 3D laser scanners and 3D metrology equipment & digitization equipment and software for practically any application.You'd have to scan far and wide to find a more inclusive selection of 3D metrology equipment. We sell everything from Faro arms to 3D body scanners; white light scanners to blue light scanners; coordinate measuring machines to desktop 3D scanners.
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CT PT Tester
HTFA-103A / 336
Wuhan Huatian Electric Power Automation Co., Ltd.
Used for automatic testing of protective and metrological CT/PT.
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Optical Metrology
Complex measurements can be performed quickly and easily with optical measuring solutions from ZEISS. With a high degree of automation and state-of-the-art sensors, they reduce operating errors and guarantee high measuring accuracy.
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Lens Test Equipment
ZEISS lenses for technical applications are key components in complex production processes (Machine Vision) as well as in optical metrology, medical applications, traffic enforcement, quality assurance, sports and many other applications. Here they prove their outstanding image performance and reliability. Due to the precise manual adjustment of the helical focusing mount our partners will gain much better results than with comparable lenses.
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Dimensional Metrology System
PINNACLE PLUS
Pinnacle+ Plus elevates Pinnacle performance to the next level. Pinnacle+ Plus features a rigid granite optical support structure and a high performance Z-axis motion assembly to produce the lowest possible uncertainty on micro-electronic parts and assemblies/
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Colorimeter Measurement
DRK8620
Shandong Drick Instruments Co., Ltd.
WSC-S Colorimeter measurement is a superior performance, versatile and convenient operation colorimeter,suitable for the determination of various objects reflection color, whiteness test, chromaticity and color object with two objects. It is equipped with a geometry test head, that the provisions of CIE 0 / d. WSC-S Colorimeter measurement with two portable desktop, digital display, and available for print. The instrument can be widely used in textiles, dyes, printing and dyeing, paper, building materials, ceramics, food, printing, metrology and other departments.
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Metrology Device
XPLOR 100
XPLOR 100 is a state of the art, fully automated metrology device designed for measurement and analysis of bubbles and inclusions for optical substrates in the Visible and NIR wave-bands.
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Pulser Sensor, Sent Signal, CNEX/ATEX Certificates
SK-S
Beijing SANKI Petroleum Technology Co., Ltd.
*convert the mechanical transmission signal of flow meter into electrical pulse signal* send the electrical pulse signal to main-board to realize the metrology function of the flow meter
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Packaging Manufacturing
KLA’s extensive portfolio of packaging solutions accelerates the manufacturing process for outsourced semiconductor assembly and test (OSAT) providers, device manufacturers and foundries for a wide range of packaging applications. Innovations in advanced packaging, such as 2.5D/3D IC integration using through silicon vias (TSVs), wafer-level chip scale packaging (WLCSP), fan-out wafer-level packaging (FOWLP) and heterogeneous integration as well as a wide range of IC substrates create new and evolving process requirements. KLA offers systems for packaging inspection, metrology, die sorting and data analytics focused on meeting quality standards and increasing yield before and after singulation. SPTS provides a broad range of etch and deposition process solutions for advanced packaging applications. Orbotech offers a portfolio of technologies that includes automated optical inspection (AOI), automated optical shaping (AOS), direct imaging (DI), UV laser drilling, inkjet/additive printing and software solutions to ensure manufacture of the highest quality of IC substrates.
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Customized Solutions
Artifex Engineering GmbH & Co. KG
Our products form the basis of a wide range of R&D and industrial metrological applications. At Artifex Engineering we strive to maintain a close relationship with our customers to ensure that the products we deliver meet your needs cost effectively. We understand that your application is not standard and so we offer customization of all of our products, even for single units. Our manufacturing infrastructure includes rapid prototyping machinery and a flexible manufacturing environment allowing us to customize quickly and efficiently – a definite pricing advantage.
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3D Optical Microscopy
Bruker is the worldwide leader in 3D surface measurement and inspection, offering fast, non-contact analyses for samples ranging in size from microscopic MEMS to entire engine blocks. Our microscopes are the culmination of ten generations of proprietary Wyko® Technology advances that provide the high sensitivity and stability necessary for precision 3D surface measurements in applications and environments that are challenging for other metrology systems.
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Post Dicing
Camtek offers dedicated inspection and metrology solutions for dicing-related processes, ensuring the reliability of the end product. Camtek developed new capabilities to address new dicing technologies such as Stealth and Plasma dicing using new algorithmic and technologies such as Back Light illumination, as well as various handling solutions.
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Dimensional Metrology
Fleet Connectivity & Control Family
Nova’s Fleet Management and Performance Monitoring Center simplify the management and enhance the productivity of Nova tools in the fab. The platform’s ability to process and analyze large amounts of fleet and metrology data using advanced data analytic tools provides our customers with intelligent and predictive insights on tool performance and process trends.
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InnovMetric-Polyworks Software
PolyWorks is a powerful industrial 3D metrology software solution.
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Photovoltaic/Solar Metrology System
Multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials.
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Precision Connectors
Rosenberger Hochfrequenztechnik GmbH & Co. KG
Connectors form the electronic bridge for active and passive components and devices in a variety of applications. In the laboratory and metrology sector – for example in research and development, testing or quality assurance departments – precision connectors are used due to the detailed requirements for technology and processes.
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CT PT Tester
HTFA-107A / 341
Wuhan Huatian Electric Power Automation Co., Ltd.
Used for automatic testing of protective and metrological CT/PT.
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Smart Energy Solutions
To address the needs of the smart energy market, we offer a platform that incorporates application-specific solutions as well as standard microcontroller, microprocessor, security, memory, wireless and power-line connectivity devices. This smart energy portfolio offers you best-in-class feature sets and performance for designing equipment for the smart grid. The smart meter architecture requires different levels of integration depending on system architecture partitioning, project timelines and the level of flexibility needed to address the requirements of different geographies and utility companies. Our platform provides a unique multi-level architecture built around a multi-core solution as illustrated below. A variety of devices can be used as building blocks for your smart meter design. These include metrology sensing (analog-to-digital conversion); metrology digital signal processing; application, communication and security processing as well as connectivity to area networks in homes neighborhoods.
