Thin Film
layer of material ranging < a nanometer to > a micrometer in thickness.
See Also: Film, Ellipsometers
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RF Power Generators
MKS RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. MKS RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.
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Low Voltage Holiday Detector
M1-AC
For use such as: Coatings, in-plant environments, rebar, pipelines, sheet materials coated with thin film under 20milsa,
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Inductor Coils
SemiGen's Inductor Coils are manufactured using our thin film process on quartz substrates. The precision photolithography and non-chemical etching process provides clean edges to assure uniformity from coil to coil. By using quartz and applying a polyimide coating we produce a device that eliminates the need for conformal coating or staking. Inductors can be epoxied down with nonconductive epoxy and the wire bonded for connection.
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Microspectrophotometer
MSP Series
Angstrom Sun Technologies, Inc.
Microspectrophotometer (MSP) is an advanced optical system. The key difference with typical low cost reflectometer is in its capability to characterize optical properties of thin films over a micron region area. With unique design by Angstrom's professionals, user can enjoy digital imaging capability in Microspectrophotometers (MSP series) by live video, powerful digital editing, measurement tools for reflection, transmission, absorption spectra. Data acquisition only takes milliseconds.
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Thin Film
Substrates: ceramics, glass, soft substrates. Conductor: Au, Pt, Pd, Ni, Cu, Ta, WTi. Dielectrics: Polyimide, SiN. Micro strip and coplanar design. Through hole metallisation, filled via. Integrated resistor and capacitor. Air bridges. Polyimide Multilayer.
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Resistance Temperature Detectors (RTD) Simulators
Simulation of resistance based temperature sensors such as positive or negative temperature coefficient thermistors. Resistance Temperature Detectors (RTDs) can be wire-wound or thin film. Our RTD simulator modules provide a cost-effective method of simulating both PT100 and PT1000 RTD sensor types that require fine setting resolution.
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Datapaq Solar Tracker System
The SolarPaq® Thermal Profiling Systems from Fluke Process Instruments are designed specifically for solar photovoltaic (PV) manufacturing including applications like contact firing, contact drying, anti-reflection coating for the solar cell, lamination and other thin film processes. These systems, consisting of user-friendly Insight™ software, Datapaq® Q18 data loggers, stainless steel thermal barriers, thermocouples with PTFE or mineral insulation and accessories, provide users with the tools needed to gather accurate, repeatable results for process optimization, maximize cell efficiency and throughput, and more.
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Power Amplifiers
Power amplifiers are designed and manufactured by utilizing the most advanced PHEMT or MMIC devices, thin film technologies, and an improved DC power supply to deliver a high output power with superior power added efficiency (PAE) and high linearity. While standard models focus on general purpose applications, additional models with differing frequency ranges, gains and power levels are listed on the website. Custom designs are also offered to meet any user’s specific needs.
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Gas and Vapor Delivery Systems
In thin film deposition, high-quality results start with how process gases are delivered, as they help create the stable environment needed for consistency by controlling flow, pressure and composition to support processes like ALD, CVD, and PVD. Advanced semiconductor devices developed for the most advanced computing processes, such as AI and edge computing, need the ultra-high-purity environments of our gas and vapor deposition delivery systems.
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Vacuum Process And Chamber Environment Monitors
Our process monitors are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), analytical equipment, and control software. Process mass spectrometers are used in varied applications, including; Semiconductor, Thin Film (CVD, Etch, PVD and degas), pharmaceutical lyophylization and bulk gas purity monitoring.
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Stylus Profilometry
Dektak®
Bruker's Dektak stylus profilers are the product of over four decades of proprietary technology advances. They provide repeatable, accurate measurements on varied surfaces, from traditional 2D roughness surface characterization and step height measurements to advanced 3D mapping and film stress analyses. Dektak surface profilers have been widely accepted as a superior solution for measuring thin film thickness, stress, and surface roughness and form in applications ranging from educational research verification to semiconductor process control.
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Resistive Components
Diamond is the best thermal conductor on earth. Combined with a low dielectric constant, it is an excellent RF dielectric material for high-frequency applications in which thermal performance is equally critical. By applying cutting-edge thin film process and extensive millimeter wave design experience, Smiths Interconnect has created a high-performance line of resistive components. The resulting products, our Diamond RF Resistives® resistors, terminations, and attenuators, are significantly reduced in size and unparalleled in average and peak power handling.
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Benchtop Metrology System
FilmTek 2000 SE
Scientific Computing International
Benchtop metrology system delivering unmatched measurement performance, versatility, and speed for unpatterned thin to thick film applications. Ideally suited for academic and R&D settings. Combines spectroscopic rotating compensator ellipsometry, multi-angle polarized spectroscopic reflection, and intuitive material modeling software to make even the most demanding of measurement tasks simple and reliable.
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CWDM Mux/Demux in 1U Rackmount(4,8,16,18-Channel)
Flyin Optronics’ Coarse wavelength division multiplexer (CWDM Mux/Demux) utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging. It provides low insertion loss, high channel isolation, wide pass band, low temperature sensitivity and epoxy free optical path.
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In-Situ Spectroscopic Ellipsometer for Real-Time Thin Film Monitoring
UVISEL Plus In-Situ
The UVISEL Plus in-situ spectroscopic ellipsometer can be easily mounted on process chambers (PECVD, MOCVD, sputter, evaporation, ALD, MBE) for the real-time control of thin film deposition or etch processes.The UVISEL Plus in-situ provides the unique combinations of very high speed, sensitivity, dynamic range and accuracy making the instrument able to control deposition / etch at the atomic layer thickness level, even for rapid processes.
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Spectroscopic Ellipsometer
PH-SE
The spectroscopic ellipsometer is used for thin film and material characterization in R & D. The spectroscopic ellipsometer is designed to meet the requirements in modern research with special emphasis on speed and accuracy for an unmatched variety of applications.
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Physical Vapor Deposition Systems
Physical Vapor Deposition (PVD) systems use physical processes, like sputtering and evaporation, to deposit thin films with exceptional purity and control. These techniques are widely used in semiconductor manufacturing, optical coatings and protective applications.
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MBE Technologies
When you’re creating thin films of exotic compound semiconductor materials one crystal at a time, you need a molecular beam epitaxy system that is configurable for different applications.
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Affordable EDXRF Analyzers
NEX QC Series
Applied Rigaku Technologies, Inc
NEX QC is the lowest cost variant of a line of affordable benchtop EDXRF spectrometers designed for rapid qualitative and quantitative analysis of elements from sodium (Na) to uranium (U) in solids, liquids, alloys, powders, and thin films. For more demanding applications, or for situations where short analysis time is critical, we recommend the NEX QC+ spectrometer. Employing the next generation silicon detector technology, the enhanced NEX QC+ affords significant improvement in elemental peak resolution and counting statistics.
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Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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Portable Detectors
Portable holiday detectors are designed for various pipeline, plant, and other surface applications where the inspection surface remains stationary and the detector is moved over the inspection surface. High voltage detectors are used for thicker surface coatings, such as those used on pipelines and other industrial applications. low voltage, wet sponge detectors are used for thin film applications.
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Proton Induced X-ray Emission (PIXE)
Elemental Analysis Incorporated, utilizing Proton Induced X-ray Emission (PIXE), provides a non-destructive, simultaneous analysis for the 72 inorganic elements from Sodium through Uranium on the Periodic Table for solid, liquid, and thin film (i.e. aerosol filter) samples. The PIXE technique offers the advantage of analysis, without the necessity for time consuming digestion, thereby minimizing the potential for error resulting from sample preparation.
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Surface Quality Monitors
PET manufactures and markets non-destructive, non-contact surface contamination and thin film detection models and automated systems (surface quality monitoring system) capable of detecting thin layer contamination, thin films and coating down to the Angstrom level. These systems represent a major breakthrough by providing, for the first time, a quantitative measure of surface cleanliness. As surface cleanliness verification instruments, in a part cleaning environment, these products are capable of validating the cleaning quality of all the part cleaning equipment available in the market. Any of SQM model series is capable of verifying metal contamination; monitoring absence/presence of organic and/or inorganic on virtually on surfaces of all metals. They are, price/performance, the most sufficient product available for testing surface of metals for surface cleanliness. These systems operate in an ambient environment, require no sample preparation or deposit of any agents on the surface. In any parts cleaning environment where the quality and efficiency of part cleaning equipment for removal of surface contamination is highly desired, these systems provide a scientific solution by quantitatively measuring the surface cleanliness. The SQM series has the sensitivity and operational simplicity required to provide fast and cost effective surface evaluation for all metals.
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ALD Advantages
Atomic Layer Deposition (ALD) stands out for one reason: control. The most significant advantages of thin film deposition via Atomic Later Deposition over other methods, are manifest in four distinct areas – film conformality, low temperature processing, stoichiometric control, and inherent film quality associated with the self-limiting, and self-assembled nature of the ALD mechanism ALD is exceptionally effective at coating surfaces that exhibit ultra high aspect ratio topographies, as well as surfaces requiring multilayer films with good quality interfaces technology. This thin-film process builds materials one atomic layer at a time, delivering unmatched uniformity and sub-nanometer precision, even on complex 3D structures. That level of accuracy makes ALD a critical technology for advanced semiconductor manufacturing, flexible electronics, and materials research.
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CWDM OADM Module(4,8,16,18-Channel)
Flyin Optronics' Coarse wavelength division multiplexer (CWDM Mux/Demux) utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging. It provides low insertion loss, high channel isolation, wide pass band, low temperature sensitivity and epoxy free optical path.
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1x2 CWDM Device(3 Ports)
Flyin Optronics’ Coarse wavelength division multiplexer (CWDM) utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging. It provideslow insertion loss, high channel isolation, wide pass band, low temperature sensitivity and epoxy free optical path .
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Film Thickness Mapping Systems
Angstrom Sun Technologies, Inc.
Spectroscopic reflectometer mapping (SRM) tools are for industry or lab routine thin film uniformity measurement. This is relatively low cost and easy to use setup. Mapping size can be configured from 2" to 18" if needed. Dependent on film thickness range, a broad wavelength range can be configured within DUV, Vis and/or NIR range. A user-friendly software interface allows you to define various mapping patterns to map. A CCD array based detecting and data acquisition mechanism offers fast measurements. 2D/3D data presentation gives user option to quickly generate reports.
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X-ray Fluorescence Measuring System
FISCHERSCOPE X-RAY 5000
Inline measuring with highest precision for thin films. Robust XRF instrument for measuring and analyzing thin films and layer systems in the running process with connection to the production control system.
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100GHz DWDM Optical Add/Drop Multiplexer (CATV Overlay Multiplexer)
OADM-1001-VOA (100GHz)
Hangzhou Huatai Optic Tech. Co., Ltd.
Huatai OADM-1001-VOA is an optical Add-Drop multiplexer with 100GHz channel interval. It is based on mature thin film filter technology, sealed with metal shell, and featured with low insertion loss, high isolation, wide channel and flexible configuration. It is the ideal device to Add(insertion Add)/Drop(Tape-out Drop) a specific wavelength(OADM) in optical fiber DWDM system. OADM-1001-VOA configures a manual-adjust optical attenuation, for adjust the equilibrium the optical power between insert channel and main signal channel, which is conveniently used for VOD overlay in CATV system.
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PED Systems
Pulsed Electron Deposition
Is a process in which a pulsed (80-100 ns) high power electron beam (~1000 A, 15 kV) penetrates approximately 1 μm into the target resulting in a rapid evaporation of target material. The non-equilibrium heating of the target facilitates stoichiometric ablation of the target material. Under optimum conditions, the target stoichiometry is preserved in the deposited films. All solid state materials – metals, semiconductors and insulators, including those transparent to laser wavelengths in PLD – can be deposited as thin films with PED. By combining PLD and PED, the range of complex materials that can be prepared as thin films can be greatly enhanced.
