Gauge R&R ANOVA
Gauge R&R provides an analysis technique for engineers to determine the amount of variability caused by a measurement system. For semiconductor devices to ensure that specifications can be guaranteed the repeatability and reproducibility of measurements need to be small relative to the measured specification tolerances. Primarily product and test engineers use this to assess test equipment. Yet with advanced design-for-test (DFT) based test methods which rely upon on-die circuitry to take a parametric measurement, design engineers should perform a Gauge R & R analysis to understand their on-die measurement variability.
