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Gas Flow
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Product
Gas Flow Meters & Controllers
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Accurate Mass Flow Measurement Sierra designs and manufactures a wide range of today's most advanced analog and digital gas flow meters, mass flow meters, controllers and switches across three core technologies: Capillary Thermal, Immersible Thermal, and Mass Vortex. Each gas flowmeter or controller meets exacting standards, and we can also customize your flow rate sensor to meet application requirements (often free of charge).
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Gas Flow Sensors
ESRF-ESF Sensor
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ESRF-ESF is one of the few gas flow sensors featuring bidirectional gas flow sensing of up to ±300 ln/min with a total error band of < 1.25% RD. ESRF-ESF gas flow sensors provide calibrated and temperature compensated output on an SPI, I2C bus or analog output making them plug & play for direct interfacing to low voltage MCUs and systems. The user is provided with a multitude of interface and output options so that the right sensor configuration can be selected based on the specific requirements for each application.
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Gas Flow Analyzer
venTest
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venTest is designed to accurately test the performance of Ventilators and Anaesthetic systems.
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Gas Flow Meters
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There are innumerable circumstances where gas flow rates need to be quickly and precisely measured. You’ll always be prepared with Netech’s versatile range of gas flow meters, which are designed to measure several types of gases including air, N2, O2, CO2, and He.
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Gas Flow Sensors
ESRF-HF Transmitter
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The ESRF-HF is a family of mass flow transmitters which enable fast and accurate measurements of gas flow over a wide dynamic range. Each transmitter integrates a MEMS flow sensor and readout electronics inside a housing with very small form factor made from stainless steel. The duty pressure of the flow transmitter is 11bar. All measurement data are fully calibrated, and temperature compensated on board, leading to a reduced temperature coefficient and high measurement accuracy.
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Automatic Thermogravimetric Analyzer
LD-LTGA-A10
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Automatic Thermogravimetric AnalyzerLD-LTGA-A10is a high performance, efficient unit designed to study thermal stability of materials and its allied components. It offers a resolution of 0.1 ºC and works between temperature range of room temperature to 1000 ºC. Operates in an inert, oxidizing, reducible, static and dynamic atmosphere and possess two-way gas and control flow volume.
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Gas Mixers
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Get the right gas mixture and flow rate using our Gas Mixers for Modified Atmosphere Packages. We offer gas mixers for CO2, Oxygen, Nitrogen, and Argon gases.
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DELTA™ IV 4-zone Flow Ratio Controller
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DELTA™ IV 4-zone Flow Ratio Controller is a digital controlled, browser-enabled, process control instrument providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution for semiconductor, flat panel, and solar panel process uniformity and control. It is available in EtherCAT® or DeviceNet™ providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution.
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Gas Meter Synthetical Test Bench
SY8506
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Hong Kong Songyang Industrial Ltd.
The test of the error of the rate of flow:Using the gas flow standard device (in the shape of the bell prover) as our standard equipment, we can figure the standard volume of the tested gas by using the high-precision revolving encoder to measure the descending displacement of the bell prover.
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Ultrasonic Exhaust Flow Meter for Real-time Measurement of Vehicle/Engine Exhaust Flow
EXFM-ONE
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EXFM-ONE employs an ultrasonic method for measuring exhaust gas flow rates directly from a vehicle or engine. The unit can be used for various applications such as real time mass measurement of raw exhaust gas combined with MEXA-ONE (Motor Exhaust Gas Analyzer), or for Particulate Matter/emission measurement combined with partial flow dilution system such as MDLT (Partial Flow Dilution Tunnel) or BMD (Bag Mini Diluter). Fuel consumption evaluation is also available when EXFM-ONE is paired with an optional air-to-fuel ratio (AFR) analyzer.
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Flow Measurement
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HighReach Measuring & Controlling System Co.,Ltd
Involves using flow meters that measure the flow rate of steam, liquid, or gas flowing through a pipe.
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CEMS
FMD 02
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IMR Environmental Equipment, Inc.
The continuous measurement of velocity and temperature of gas flows is much important at operation of a system with flowing gases (e.g. hall outlet air, exhaust etc.).
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Multi Range/Multi Gas Digital Mass Flow Controller
SEC-Z500X Series
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This is HORIBA's best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily.With high accuracy +/- 1.0% S.P, piezo actuator valve, high speed response and being all-metal this mass flow controller is suitable for process yield improvement and simplified parts management. Digital/Analog, DeviceNet™, and EtherCAT® communications are all available.
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Long Term Test Kit
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When long term electro-chemical tests (>1000 hours) are run to monitor the cell degradation at the cathode for example, it is important to avoid any contaminant in the gas flow rate.Inconel 601 flange equipped with alumina housing and alumina tube to feed the gas to the electrode during long term test (>1000 h)Typical poisoning is coming from the chromium contained in the steel tubing. The volatile chromium species (Cr6+) will flow into the cathode (with the air) and thanks to the intake of electrons at the electrode, the chromium ion will transform to chromium oxide and be deposited at the cathode triple point. In such a case, the long term test kit is used. The Inconel 601 flange is equipped with an alumina housing (>96 % Al2O3) and the air (or other gas) is led through an alumina tube. The long term test kit is fully compatible with other functionalities proposed with the Open Flanges™ test Set-Up as the integrated steamer or the small pellet test kit. The long term test kit can be implemented on the fuel, on the air or on both sides.
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Constant Temperature Anemometry (CTA) - Hot-Wire Anemometry - Thermal Anemometry
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Constant Temperature Anemometry (CTA), also known as Thermal Anemometry, is a technique for the measurement of turbulence in 1, 2 or 3-dimensional gas and liquid flows, using hot-wire or hot-film probes inserted in the flow. CTA is particularly suitable for the measurement of flows with very fast fluctuations at a point (high turbulence) and the study of flow micro structures, where there is a need to resolve small flow eddies down to the order of tenths of a mm.
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Ultra-thin Mass Flow Controller
DZ-100
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The DZ-100 inherits the same CRITERION™ technology—a differential pressure detection system for laminar viscous flow ranges—used on HORIBA STEC’s MFC, the D500. This innovative technology controls the mass flow of various gases with high precision. As with the D500, the user-configurable DZ-100 supports multi-range and multi-gas applications. The compact design of the MFC reduces the internal volume of the internal gas flow path, and the optimized control algorithm improves response characteristics. It uses a compact CPU with high processing capacity, and the piezo drive circuit and control CPU are installed in the MFC module while the power supply components are housed in a separate small control box. Up to four MFC modules can be controlled by connecting them with the dedicated miniature connectors.
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Vapor Concentration Monitor
IR-300 Series
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Metal-Organic Chemical Vapor Deposition (MOCVD) is widely used in the manufacture of LEDs, optical devices and other components. Liquid and solid precursors are delivered to the reaction chamber by controlling the temperature, pressure and the carrier gas flow rate (bubbling method). Process results can be affected by changes especially in temperature and liquid level. The in-line IR-300 Series measures and reports the precursor concentration in real time.
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Mass Flow Controllers
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Alicat Scientific, Incorporated
Use mass flow controllers to measure and control gas flow from 0.5 SCCM to 10,000 SLPM, with accuracies as good as ±0.5% of reading or ±0.05% of full scale and a control ranges as good as 0.01-100% (10,000:1 turndown).
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Gas Mixers / Gas Blenders
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WITT offers high-quality gas mixers and gas dosing systems for two or more gases, especially for high and strongly fluctuating gas mixture flow rates.
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Vapor Source Mass Flow Controller With Viscous Choked Flow
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The 1150C Vapor Source Mass Flow Controllers are pressure based measurement and control systems designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas using viscous flow through a choked orifice.
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High Speed & Precision Pressure Insensitive Mass Flow Module
D700MG
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Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose the new pressure based MFC D700MG, the upper compatible model of the D500MG to support customer’s challenges.
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Pitot Tube Flow Meter
PTFM-1000V2
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The Pitot Tube Flow Meter, PTFM-1000V2 is a standalone interface for measuring exhaust gas flow rate of combustion engines. The system uses the tried-and-tested pitot tube principle with high-frequency transducers to accurately measure highly pulsating exhaust flows with a sampling rate of 1kHz. This rapid capture rate ensures that any pulsations or exotic behaviour in an engine is measured, and the unique design of the PTFM pitot tube means reverse flows can be measured with the same guarantee of sensitivity. The interface can be run standalone with a laptop, or seamlessly integrated to run alongside an analyser system without adding any more steps to the test cycle process.
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Smaet LDV III
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A Laser Doppler Velocimeter (LDV) measures fluid velocity by utilizing coherence of laser light. It detects the Doppler shift frequency of the scattering light of particles in the fluid and calculates the velocity of the particles (fluid). With a LDV system, non-intrusive measurements without disturbing the measuring object, liquid or gas flow, are achieved. No calibration is necessary and reverse flow measurements at a high resolution is also possible. The LDV system provides the absolute value of the flow velocity with accuracy.
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Paragon® 8.0 Slm NF3 Flow Intelligent Remote Plasma Source
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For cleaning CVD and ALD/ALE process chambers, the Paragon remote plasma source is designed for high gas dissociation rates (> 98%) of NF3 with gas flows up to 8 slm and pressures up to 10 Torr. This leading-edge performance translates into increased process throughput and repeatable process results. The Paragon design incorporates a proprietary plasma block design with a Plasma Electrolytic Oxidation coating for low particle, long block life that delivers lower cost of ownership.
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Digital Mass Flow Controller and Meter
300 Vue Series Digital Flow Meter
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The 300 Vue is our newest series of digital gas thermal mass flow instruments which provide accurate, fast and convenient gas measurement and control. The color touchscreen display allows for local adjustments and monitoring of gas flow. Powerful and intuitive menus enable control of the gas flow in many ways. The instrument can be installed and operating in seconds. Flexible custom flow instruments without the custom price or lead time.
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Digital "A" Flow Controller for Medium Flow
HFM-D-301A / HFC-D-303A
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Mass flow techniques provide reliable, repeatable and accurate gas flow rate measurements.HFM-D-301A/HFC-D-303A mass flow instruments have flow ranges from 0-25 slm to 0-1000 slm; provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available. Available with a variety of elastomer seals for maximum flexibility.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
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On-board Emissions Measurement System for NH3/N2O
OBS-ONE IRLAM Unit
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The OBS-ONE IRLAM unit is an on-board emissions measurement system for analyzing the NH3/N2O under real-world driving conditions and supports our customer’s future regulatory development.The IRLAM unit combines with the GAS unit and the PN unit to measure the specified exhaust gas components, along with the exhaust gas flow rate, the GPS position, and the atmospheric conditions (temperature, humidity, pressure).
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DELTA™ III 3-zone Flow Ratio Controller
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The DELTA™ III Flow Ratio Controller divides and controls mixed process gas flows to three chambers or zones within a process chamber at proportions specified by the user to optimize process uniformity and repeatability. Available with EtherCAT® or DeviceNet™ communications, this device provides the latest in gas flow ratio measurement and control technology.
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Multi Gas Analyser
OR-703
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The OR-703 multi gas analyser expands the capabilities of the PF-300 series gas flow analysers. Its compact ad lightweight housing makes the OR-703 an ideal and integrated solution for the accurate measurement of anesthetic gas concentration.
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Process Particle Size Analyzers
Parsum Range
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Parsum Probes use Spatial Filter Velocimetry to deliver in situ, real-time size and velocity measurements for solid particles suspended in a pneumatic or gravity flow gas stream. Robust, dustproof and waterproof they measure particles in the size range 50-6000 µm with velocities from 0.01-50 m/s and are suitable for any industrial environment.
