DELTA™ II 2-zone Flow Ratio Controller

Flow Ratio Controllers

Optimizing process performance just became easier with the DELTA™ Flow Ratio Controller (FRC). Widely used in a variety of flow splitting applications such as etching, stripping, and PECVD, the DELTA™ Flow Ratio Controller (FRC) provides users with the ability to distribute gas or gas mixtures to different zones in a process chamber.

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DELTA™ III 3-zone Flow Ratio Controller

MKS Instruments

The DELTA™ III Flow Ratio Controller divides and controls mixed process gas flows to three chambers or zones within a process chamber at proportions specified by the user to optimize process uniformity and repeatability. Available with EtherCAT® or DeviceNet™ communications, this device provides the latest in gas flow ratio measurement and control technology.

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DELTA™ IV 4-zone Flow Ratio Controller

MKS Instruments

DELTA™ IV 4-zone Flow Ratio Controller is a digital controlled, browser-enabled, process control instrument providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution for semiconductor, flat panel, and solar panel process uniformity and control. It is available in EtherCAT® or DeviceNet™ providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution.

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DELTA™ II 2-zone Flow Ratio Controller

Topics

Flow Ratio Controllers

DELTA™ III 3-zone Flow Ratio Controller

DELTA™ IV 4-zone Flow Ratio Controller