MKS Instruments
MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor, and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.
- 978-645-5500
- 2 Tech Drive
Suite 201
Andover, MA 01810
United States of America
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Product
RF Power Generators
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MKS RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. MKS RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.
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Product
Microwave Plasma Subsystems
AX2600 And AX2700
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The AX2600 and AX2700 Microwave Plasma Delivery Subsystems are complete and highly reliable solutions for the cost-effective generation and safe delivery of atomic species to the wafer. Available in 3 kW, these highly reliable, field-proven plasma delivery subsystems deliver highly concentrated atomic species. Suitable for multiple chemistries, the high speed and precision of this plasma system’s automatic tuning guarantees immediate ignition and fast transition from plasma conditions for high productivity. Robust closed-loop control ensures high accuracy, precision, and optimal repeatability of the process from wafer to wafer and system to system.
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Product
DELTA™ III 3-zone Flow Ratio Controller
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The DELTA™ III Flow Ratio Controller divides and controls mixed process gas flows to three chambers or zones within a process chamber at proportions specified by the user to optimize process uniformity and repeatability. Available with EtherCAT® or DeviceNet™ communications, this device provides the latest in gas flow ratio measurement and control technology.
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Product
Vapor Mass Flow Controllers
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Heated pressure-based mass flow controllers are designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.
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Product
General Performance Pressure Transducers And Switches
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These general performance Baratron® capacitance manometers are available as pressure transducers with an analog signal proportional to absolute or differential pressure, or as switches with relay outputs based on pressure.
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Product
Vacuum Quality Monitor Systems
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The 835 VQM is a mass spectrometer that operates from UHV to 10-5 Torr and accurately measures the gases in the vacuum chamber. The 835 VQM Differential Pump System delivers the advantages of the 835 VQM at higher pressures. The VQM system consists of an autoresonant ion trap mass spectrometer gauge, a VQM Controller and VQM Viewer software that that converts raw data into actionable information. The system is ratiometric, meaning that it determines the ratio of each gas to other gases in a vacuum chamber. It is usually coupled with a total pressure gauge to provide partial pressures of each gas as indication of the quality of the vacuum in the chamber.
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Product
2450 MHz Industrial Microwave Generators
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Alter® 2450 MHz Industrial Microwave Generators are built on MKS Alter® Product experience and designed with rugged and reliable switch mode power supplies for demanding industrial applications. They offer compact generators up to 3kW in a 19 inch standard rack with a remote head and integrated isolator.
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Product
GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Product
Automation Controllers And Modules
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Our complete automation platform solution along with a suite of automation control hardware and software configurable modules allow semiconductor and other industrial manufacturing customers to better automate their processes through computer-controlled automation and seamlessly integrate with existing MKS products to provide a complete solution.
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Product
Granville-Phillips® 835 Vacuum Quality Monitor System
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The Granville-Phillips® Series 835 Vacuum Quality Monitor (VQM™) combines the highest performance gas analysis technology with intelligent functional design that transforms complex measurement into actionable information. The 835 VQM is the world's fastest, lowest power mass spectrometer with full data collection, spectral deconvolution, and data logging at 85 ms capture rates for the full 1-145 amu measurement range or 125 ms for 1-300 amu.
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Product
High Flow Mass Flow Controllers
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High flow thermal mass flow controllers and meters offer both elastomer and metal seals for flow rates up to 300 slm. Versions are available for standard and harsh environments where protection from water and dust is required.
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Product
Micro-Baratron® Pressure Transducers
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Micro-Baratron® pressure transducers are ideally suited for use in delivery systems that feed ultrapure gases to critical process systems. Their wetted surfaces exposed to the gas stream have a finish of better than 5 µin Ra. These transducers exhibit superior dry-down characteristics, and contribute no particles above background.
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Product
13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Newport Corporation
Newport is a brand within the MKS Instruments Light & Motion division. The Newport product portfolio consists of a full range of solutions including motion control, optical tables and vibration isolation systems, photonic instruments, optics and opto-mechanical components. Newport’s innovative solutions leverage core expertise in vibration isolation and sub-micron positioning systems, opto-mechanical and photonics subsystems, to enhance our customers’ capabilities and productivity in the semiconductor, industrial technologies, life and health sciences, and research and defense markets.
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Electro Scientific Industries, Inc.
Leveraging its innovative technical competencies, ESI's portfolio of micro-engineering solutions enhances manufacturing processes around the globe
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Newport Electronics
Newport Corporation, a wholly owned subsidiary of MKS Instruments, Inc. (NASDAQ: MKSI ), is a leading global supplier of advanced technology products and systems to customers in the scientific research, microelectronics, life and health sciences, industrial manufacturing and defense/security markets. Established in 1969, Newport has over 52 years of industry knowledge and expertise across a broad range of technologies allowing the company to continually deliver innovative products in the areas of lasers, photonics instrumentation, sub-micron positioning systems, vibration isolation, and optical components and subsystems to enhance the capabilities and productivity of its customers' manufacturing, engineering and research applications. In addition, Newport has built a strong history of partnering with OEM customers, delivering solutions from subassemblies to full solutions including design, testing and manufacturing.
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Ophir
Ophir is a brand within the MKS Instruments Light & Motion division. The Ophir product portfolio consists of laser and LED measurement products, including laser power and energy meters and laser beam profilers
