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Semiconductor
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Aerotech has a long history of engineering and manufacturing motion systems and components for high precision wafer processing, scanning electron microscopy (SEM), wafer bumping, 450 mm wafer manufacturing, lithography equipment and advanced laser micromachining. We also specialize in systems and components for vacuum applications, such as EUV lithography. So whether you need off-the-shelf wafer bumping components or a custom-engineered SEM system manufactured and tested to exacting specifications, Aerotech can provide the optimal solution for your application.
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EUV Lithography
NXE systems
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NXE lithography systems are used in high-volume manufacturing of advanced Logic and Memory chips. The first systems to use ASML’s novel 13.5 nm EUV light source, they print microchip features with a resolution of 13 nm, which is unreachable with deep ultraviolet (DUV) lithography. Chipmakers use our NXE systems to print the highly complex foundation layers of their 7 nm, 5 nm and 3 nm nodes. Read about how EUV lithography went from imagination to reality.
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EUV Lithography
EXE systems
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EXE, or ‘High NA’, systems are the latest generation in EUV lithography. With a numerical aperture (NA) of 0.55, their innovative new optics provide higher contrast and print with a resolution of just 8 nm.
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Product
Detectors
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Solar blind detector for operation in the 1 to 180 nanometer region. It is encased in a vacuum tight housing for vacuum operation. The Model 425 is ideal for measurements in the Extreme and Vacuum UV (EUV and VUV) where the solar blind feature eliminates potential interference from long wavelength ultraviolet and visible light. It may be operated in pulse-counting mode or DC. The CEM is also available with coatings like Cesium Iodide or Magnesium Fluoride to enhance response in different energy regions.
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EUV Lithography Systems
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Using extreme ultraviolet (EUV) light, our NXE and EXE systems deliver high-resolution lithography and make mass production of the world’s most advanced microchips possible
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Scanning Electron Microscope
E5620
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The E5620 is a MASK DR-SEM(∗) product for reviewing and classifying ultra-small defects in photomasks and mask blanks. It implements Advantest’s highly stable image capture technology to easily import defect location data from mask inspection systems and automatically image the locations. Compared to the E5610, our predecessor DR-SEM system, the E5620 features a number of improvements designed specifically to target mask requirements for extreme ultraviolet (EUV) lithography.
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Gratings for Synchrotron, FEL and EUV Light Sources
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HORIBA Scientific holographic lamellar gratings exhibit ultra-low grooves roughness and unique efficiency uniformity making them ideal for Synchrotron, Free Electron Laser (FEL), EUV or Soft X-ray light sources.
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Immersion Systems
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Immersion systems are the workhorses of the industry. Our latest NXT machines have shown the ability to run in excess of 6,000 wafers per day, with an average five percent productivity increase over 12 months, supporting our customers' value requirements. We continue to innovate our immersion systems to meet the requirements of future nodes, benefiting from commonalities in R&D with our EUV program, while ensuring the platform’s extendibility through System Node Enhancement Package upgrades. Thanks to these packages, any NXT system can be upgraded to the latest technology.
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wavefront sensors
HASO EUV
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Imagine Optic's HASO EUV wavefront sensor, developed in conjunction with LOA and the SOLEIL synchrotron, is the only device of its kind available that offers you the extreme precision and direct measurement functionality needed for today's demanding laboratory and industrial applications.
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Product
Electrodeless Z-Pinch™10 Watt EUV Source
EQ-10
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The EQ-10 is a compact, easy-to-use, reliable, and cost-effective EUV light source, based on Energetiq's proven Electrodeless Z-pinch™ technology using Xenon gas. The EQ-10 EUV source is uniquely suited for metrology and research applications.
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Patterning Simulation
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KLA’s patterning simulation systems use advanced models to explore critical-feature designs, manufacturability and process-limited yield of proposed lithography and patterning technologies. Our patterning simulation software allows researchers to evaluate advanced patterning technologies, such as EUV lithography and multiple patterning techniques, without the time and expense of printing hundreds of test wafers using experimental materials and prototype process equipment.
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Dry Systems
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Chips are made up of many layers stacked on top of one another, and it’s not necessarily the latest and greatest immersion lithography machines that are used to produce these layers. In a given chip, there may be one or two more complicated layers that are made using an EUV lithography machine, but the rest can often be printed using ‘older’ technology such as dry lithography systems. This is certainly more cost-effective for customers, since these older machines are less expensive to purchase and maintain. Read about how dry lithography systems are enabling progress.
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Ultraviolet Light Distribution Measurement Film
UVSCALE
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UVSCALE is a film that responds to UV light, and changes color depending on the amount of light it is exposed. This makes it easy to see UV light distribution. There are a roll type and a sheet type, with three types for different amounts of light.
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Product
PCE-2000UV_1.5 Ultraviolet Light Radiation Measurement System
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Hangzhou Everfine Photo-E-Info Co., LTD
PCE-2000UV UV light source radiation Measurement system can realize the measurement of the relative spectral power distribution of ultraviolet LED, UV fluorescent lamp, UV light source, peak wavelength, half-peak wavelength, spectral radiation flux of UV-A/B/C, and the total radiation flux in specific wavelength.
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Product
Light Meter
MODEL 5202
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Kyoritsu Electrical Instruments Works, Ltd.
Digital Light Meter 3 ranges changeable from low to high illuminance. (200/2000/20000lux) Data hold function. Digital light meter with separate light recieving sensor and meter.
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Ultraviolet Checker
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For magnetic particle testing. Intensity of ultraviolet can be read directly in mw/c directly.
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Product
Light Soaker
MESO-11
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Greensolar Equipment Manufacturing Ltd.
The Light Soaker (MESO) is used in photovoltaic production lines for reliability testing. Its purpose is to expose the PV panels with a constant, high intensity light to get it deteriorated. Measuring the time dependent deterioration of the electrical parameters of the PV structure the reliability parameters could be defined.
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Light Meters
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A light meter is a very sensitive electronic measuring device used to help monitor the illumination of any given area. Most light meter devices are small in size, simple to operate and equipped with an easy-to-read lighted screen made of special glass. Typically, a heavy-duty housing protects the light sensor inside the light meter from damage. A light meter is used for measuring brightness in lux (lx), foot candle (fc) or candela per square meter (cd/m²)measuring units. Some light meter devices are equipped with an internal memory or data logger to record and save measurements. The measurement of light intensity with a light meter is becoming increasingly important in the workplace due to safety concerns. Light measurement is also necessary to determine the best location and angle when installing and adjusting solar panels.
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Light Booths
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Konica Minolta Sensing Americas, Inc
Konica Minolta’s Light Booth products provide accurate results when inspecting a range of unique products including inks, paints, plastics, textiles, paper and colorants. Light booths simulate lighting conditions which allows testing in a multitude of different lighting conditions. This allows for incredibly precise color measurements in a spectrum of different lights and angles.
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Light Sources
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Excelitas offers an array of illumination and lighting technologies with custom design capabilities aligned with customer requirements to deliver an illumination solution optimized to your specifications. From simply supplying a discrete LED, Laser, Lamp or UVC source to providing a complete, integrated system, Excelitas consistently delivers lighting solutions for the most demanding applications.
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Light Sources
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There are many low cost artificial light sources used for illumination or for industrial applications: tungsten or halogen bulbs, fluorescent lamps, LED lamps etc. Some of these sources have regulated intensity of emitted light. However, there very few calibrated light sources of precisely known parameters. A light source can be considered as calibrated when its user can precisely regulate its photometric/radiometric parameters like luminance (or illuminance), radiance (or irradiance) at defined spectrum of interest. Such light sources are needed in many applications among them, in systems for testing night vision devices, VIS-NIR cameras and SWIR imagers. Inframet offers a series of calibrated light sources that can be divides into three groups:
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Light Source
pE-300white
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CoolLED's pE-300white offers intense, broad-spectrum LED illumination for imaging most common fluorescent stains. The pE-300white Light Source can be fitted directly to the microscope or specified with a liquid light guide. The system is a mercury-free alternative that is safer, more controllable, and repeatable than conventional high-pressure gas discharge illuminators. Spectral coverage is from the UV (DAPI excitation) to the Red region (Cy5 excitation). The system is perfect for hospital and regular research laboratory environments.
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Forensic Light Source
HandScope LASER
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The new HandScope LASER is the latest Forensic Light Source by SPEX Forensics. The unique design allows one-hand operation. The same hand holding the light source can change cycle through the four different wavelengths and three power settings using the LCD touch panel. No other Laser offers the same versatility.
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Light Meter
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Shenzhen UYIGAO Electronic Technology Co., Ltd
Digital Luxmeter Lux light meter for photography Photometer Mini spectrometer spectrophotometer Luminometer
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Fanless Machine Vision Computers for Extreme Operating Conditions
Neousys SEMIL
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Neousys SEMIL are fanless computers for extreme operating conditions.- Intel® Xeon® E or Core ™ i7 / i5 / i3 9th / 8th Generation- IP67 - protection against water and dust (SEMIL 1700)- Operating range -40 ° C to 70 ° C with fanless cooling system- Up to 8 ports 802.3at Gigabit PoE +- M12 connectors- MIL-STD-810G and EN 50155 certified
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Light Transmittance Meters
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Shenzhen Linshang Technology Co., Ltd.
As a manufacturer of desktop spectrum transmission meter, Linshang Technology provides you with a series of light transmittance meters, including LS108A, LS108D lens transmssion tester for testing IR holes of mobile phone covers, and LS108 blue-violet tester for eyeglass lenses. Universal desktop light transmission meter LS108H, portable optical transmission measuring instrument LS183.
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Lighting Systems for Aviation
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Flying on every major platform, Astronics offers decades of proven experience in delivering standard and custom lighting solutions that illuminate the world’s aircraft. From commercial to business to military, chances are we offer experience with your type of fixed-wing or rotorcraft program.
