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Product
wavefront sensors
HASO EUV
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Imagine Optic's HASO EUV wavefront sensor, developed in conjunction with LOA and the SOLEIL synchrotron, is the only device of its kind available that offers you the extreme precision and direct measurement functionality needed for today's demanding laboratory and industrial applications.
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Product
Gratings for Synchrotron, FEL and EUV Light Sources
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HORIBA Scientific holographic lamellar gratings exhibit ultra-low grooves roughness and unique efficiency uniformity making them ideal for Synchrotron, Free Electron Laser (FEL), EUV or Soft X-ray light sources.
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Product
Scanning Electron Microscope
E5620
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The E5620 is a MASK DR-SEM(∗) product for reviewing and classifying ultra-small defects in photomasks and mask blanks. It implements Advantest’s highly stable image capture technology to easily import defect location data from mask inspection systems and automatically image the locations. Compared to the E5610, our predecessor DR-SEM system, the E5620 features a number of improvements designed specifically to target mask requirements for extreme ultraviolet (EUV) lithography.
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Product
Electrodeless Z-Pinch™10 Watt EUV Source
EQ-10
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The EQ-10 is a compact, easy-to-use, reliable, and cost-effective EUV light source, based on Energetiq's proven Electrodeless Z-pinch™ technology using Xenon gas. The EQ-10 EUV source is uniquely suited for metrology and research applications.
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Product
Immersion Systems
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Immersion systems are the workhorses of the industry. Our latest NXT machines have shown the ability to run in excess of 6,000 wafers per day, with an average five percent productivity increase over 12 months, supporting our customers' value requirements. We continue to innovate our immersion systems to meet the requirements of future nodes, benefiting from commonalities in R&D with our EUV program, while ensuring the platform’s extendibility through System Node Enhancement Package upgrades. Thanks to these packages, any NXT system can be upgraded to the latest technology.
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EUV Lithography
NXE systems
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NXE lithography systems are used in high-volume manufacturing of advanced Logic and Memory chips. The first systems to use ASML’s novel 13.5 nm EUV light source, they print microchip features with a resolution of 13 nm, which is unreachable with deep ultraviolet (DUV) lithography. Chipmakers use our NXE systems to print the highly complex foundation layers of their 7 nm, 5 nm and 3 nm nodes. Read about how EUV lithography went from imagination to reality.
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Product
Detectors
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Solar blind detector for operation in the 1 to 180 nanometer region. It is encased in a vacuum tight housing for vacuum operation. The Model 425 is ideal for measurements in the Extreme and Vacuum UV (EUV and VUV) where the solar blind feature eliminates potential interference from long wavelength ultraviolet and visible light. It may be operated in pulse-counting mode or DC. The CEM is also available with coatings like Cesium Iodide or Magnesium Fluoride to enhance response in different energy regions.
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EUV Lithography Systems
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Using extreme ultraviolet (EUV) light, our NXE and EXE systems deliver high-resolution lithography and make mass production of the world’s most advanced microchips possible
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Product
Semiconductor
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Aerotech has a long history of engineering and manufacturing motion systems and components for high precision wafer processing, scanning electron microscopy (SEM), wafer bumping, 450 mm wafer manufacturing, lithography equipment and advanced laser micromachining. We also specialize in systems and components for vacuum applications, such as EUV lithography. So whether you need off-the-shelf wafer bumping components or a custom-engineered SEM system manufactured and tested to exacting specifications, Aerotech can provide the optimal solution for your application.
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Product
Patterning Simulation
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KLA’s patterning simulation systems use advanced models to explore critical-feature designs, manufacturability and process-limited yield of proposed lithography and patterning technologies. Our patterning simulation software allows researchers to evaluate advanced patterning technologies, such as EUV lithography and multiple patterning techniques, without the time and expense of printing hundreds of test wafers using experimental materials and prototype process equipment.
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Product
EUV Lithography
EXE systems
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EXE, or ‘High NA’, systems are the latest generation in EUV lithography. With a numerical aperture (NA) of 0.55, their innovative new optics provide higher contrast and print with a resolution of just 8 nm.
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Product
Dry Systems
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Chips are made up of many layers stacked on top of one another, and it’s not necessarily the latest and greatest immersion lithography machines that are used to produce these layers. In a given chip, there may be one or two more complicated layers that are made using an EUV lithography machine, but the rest can often be printed using ‘older’ technology such as dry lithography systems. This is certainly more cost-effective for customers, since these older machines are less expensive to purchase and maintain. Read about how dry lithography systems are enabling progress.
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Product
PCE-2000UV_1.5 Ultraviolet Light Radiation Measurement System
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Hangzhou Everfine Photo-E-Info Co., LTD
PCE-2000UV UV light source radiation Measurement system can realize the measurement of the relative spectral power distribution of ultraviolet LED, UV fluorescent lamp, UV light source, peak wavelength, half-peak wavelength, spectral radiation flux of UV-A/B/C, and the total radiation flux in specific wavelength.
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Product
Ultraviolet Light Distribution Measurement Film
UVSCALE
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UVSCALE is a film that responds to UV light, and changes color depending on the amount of light it is exposed. This makes it easy to see UV light distribution. There are a roll type and a sheet type, with three types for different amounts of light.
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Product
Cockpit Lighting
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Astronics works side by side with you to deliver customized lighted cockpit control panel assemblies and illuminated panels for your commercial, military, and business aviation programs.
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Product
Light Meters
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Our light meters are designed for simple and accurate results in an industrial setting. Whether you are checking work spaces, parking lots, or baseball fields for safe levels of lighting or measuring for testing design compliance, a light meter from Sper Scientific will get the job done. Obtain precise UV, FC or Lux measurements, in multiple light measurement ranges. These light meters are designed for use in work spaces, labs, schools, outdoor studies, optics, home inspections, and many others. In addition, you may use these meters to check compliance with ANSI/NFPA 101 (standards for emergency & exit lighting).
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Vehicle Lighting
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The lights are designed for both the retrofit and new build market and include normal visible, NVG Compatible, NVG Friendly and Covert technology. Solutions include infra-red (IR) external lights and low profile interior cabin lighting and task lighting.
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Light Sources
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Fiber optic light sources are a low-cost way to analyze and identify accurate fiber optic readings, while certifying optical fiber. Receive the ability to measure fiber optic light continuity, loss, and quality of the signal.
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Product
Light Source
UVF-205S
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By use of the light guide with the quartz sensor fiber, feed-back control and monitoring of UV irradiation intensity is possible. Also setting of UV intensity and meaurement by personal computer is possible
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Product
GO-SPEX200 Ultraviolet Space Radiation Distribution Measurement System
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Hangzhou Everfine Photo-E-Info Co., LTD
GO-SPEX200 adopts the special darkroom-integrated design, integratesl electric, radiation, temperature controller, it specialized for UV LED package (including integrated packaging) of the total radiation flux, spatial distribution of radiation intensity (light distribution performance), radiation intensity data, angle, total radiation flux accurate testing, comply with relevant standards.
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Product
Light Analysis
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Welcome to Thorlabs; below you will find links to detectors and instrumentation that measure the various properties of light, a subset of our entire line of photonics products. Thorlabs offers an extensive selection of instruments that measure the properties of light. Our versatile power and energy meters can be used with over 25 different sensors in order to make NIST-traceable power and energy measurements. If the convenience of a meter is not desired, our selection of detectors includes basic photodiodes (uncalibrated and calibrated), photodetectors (biased, amplified, and avalanche), CCD and CMOS arrays, position detectors, integrating spheres, and photomultiplier tubes. The Beam Characterization category contains beam profilers (camera and scanning slit), a wavefront sensor, spectrometers, and interferometers, while the Polarimetery link leads to a selection of instruments used to measure and control the polarization of light.
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Light Sources
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Bentham's range of light sources has evolved to suit the requirements of our systems and their users and now offers single or multiple sources from 200nm to 40m:
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Product
Extreme Performance Edge Servers
Ark-7000 Series
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ARK-7000 series feature Intel Xeon processors and multiple expansion slots, delivering high-speed data transfer rates and enhanced remote management.
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Product
Light Meter
DL1076
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Switchable between LUX and FC (footcandles). Auto-ranging. Auto-zero at turn-on. Display hold function. Analog output (2 VDC F.S.)
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Light Shaping
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VirtualLab Fusion supports light shaping by freeform surfaces, diffractive beam splitters and pattern generators, diffusers, and general arrays of micro-optical components, including, but not limited to, micro-lens arrays.
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Deep Ultraviolet Observation System for Microscope
U-UVF248
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Model Capable of High-magnification/High-contrast Deep Ultraviolet (DUV) Observation. A Semiconductor / FPD Inspection Microscopes.
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Product
Light Transmitter
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Measure Range: Range 1: 0-2,000 LuxRange 2: 2,000-20,000 LuxRange 3: 20,000-50,000 LuxOutput: 4-20 mARange 1: 1,000 Lux = 12mA2,000 Lux = 20 mARange 2: 2,000 Lux = 5.6mA20,000 Lux = 20mARange 3: 20,000 Lux = 10.4 mA50,000 Lux = 20 mA90 - 260 ACV50 Hz/60 Hz
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Product
Light Meter
LI-250A
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The LI-250A is a portable meter that displays the output from any LI-COR light sensor that has a cable terminated with a BNC connector. It shows instantaneous values or 15-second averages of values from a sensor.
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Product
Light Meter
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Lumu Light Meter incorporate two state of the art sensors. True color sensor, based on the color standard CIE 1931/DIN 5033, and fast silicon photodiode capturing light at astonishing 750 000 measurements/second. Each Lumu Light Meter is calibrated before leaving the manufacturing line and comes with calibration certificate.
