Ultra-Precise Robot for Transporting 300/450mm Wafers and Large FPDs

GPR-GB8 - Genmark Automation (Genmark Automation)

Designed for ultra-precise transport of 300/450mm wafers and large FPDs, the GPR-GB8 Robot System combines increased reach and load capacity while employing Genmark’s breakthrough patented GPR™ technology.
The patented GPR™ technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.

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Topics

Robots
Wafer
Ground Penetrating Radars
Transport
Interfaces
Loads
Modules
Payload
Well
Systems