- Applied Instruments, Inc.
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CATV Multi Carrier Signal Generators
5112
The 5112 is a portable RF signal generator, available in four or six carrier configurations. Each carrier can be activated individually or simultaneously.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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High-Power Density
Apex
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
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Generators
Radio Pulse Signal Generator
The Software Signal generator allows to to produce radio pulse signals of various pulse rate and frequency at the DAC output.
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Microwave Plasma Subsystems
AX2600 And AX2700
The AX2600 and AX2700 Microwave Plasma Delivery Subsystems are complete and highly reliable solutions for the cost-effective generation and safe delivery of atomic species to the wafer. Available in 3 kW, these highly reliable, field-proven plasma delivery subsystems deliver highly concentrated atomic species. Suitable for multiple chemistries, the high speed and precision of this plasma system’s automatic tuning guarantees immediate ignition and fast transition from plasma conditions for high productivity. Robust closed-loop control ensures high accuracy, precision, and optimal repeatability of the process from wafer to wafer and system to system.
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Plasma Emission Controller
RU-1000
The optical technology developed by HORIBA and the gas control technology offered by HORIBA STEC have been combined to make further advances in plasma control technology. The plasma emission controller RU-100 offers; faster deposition by controlling the transition region, optimized distribution in a large-area, high-capacity chamber, plasma stabilization in a long sputtering process (stable deposition), and mixture optimization of compounds for reactive sputtering.
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Generators
Amplitude-Modulated Signal Generator
The Software Signal generator allows to produce amplitude-modulated signals at the DAC output.
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Signal Generators
Whether the BPSG generators with their precisely generated RF signals for testing EMC shielding and EMI/RFI measurements, or the brand new SPECTRAN V6 VSG vector signal generators with a frequency range of 10 MHz - 6 GHz and a large number of modulation types, the Aaronia signal generators impress with their quality and price.
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Pulse Generators
Active Technologies Pulse Generators can be used to set up continuous or triggered pulse streams and offers flexibility to address the most challenging applications like big physics, automated testing, microwaves, modulators, wireless communication, medical and chemistry.
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Multifunctional Generators
The multifunctional test simulators from Hilo- Test are perfect basic equipment for each EMC test laboratory. These combination devices offer the most versatile and at the same time economical solution for full-compliant immunity tests. Below you will find all the "All-In-One" - test generators for various purposes with a wide range of accessories.
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Pulse Generators
Keysight Technologies offers the most comprehensive portfolio of stimulus solutions for the generation of digital and analog waveforms and data signals. The Keysight instruments cover a frequency range from 1 μHz to 56 Gb/s and an output amplitude range from 50 mV to 20V.
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Generators and Sources
For general purpose standalone applications or as core components in a high speed test and measurement system, Yokogawa sources and signal generators are highly accurate and functional. The integration of source and measurement into a single unit greatly simplifies the test process. Semiconductor devices, sensors, displays or batteries etc can therefore be quickly and easily characterized.
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Remote Plasma Source
Xstream
The highly efficient Xstream® RPS dissociates large volumes of NF3 and quickly cleans chambers, improving your overall tool performance. Its plasma chamber showcases high-purity aluminum alloy and patented cooling capabilities. Built to last for years without repair or expensive chamber coatings, the Xstream RPS is the smart choice for dependability and efficient performance.
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Waveform Generators
PeakTech Prüf- und Messtechnik GmbH
Produce repetitive waveforms for analysis of devices that employ them.
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Pattern Generators
A Pattern Generator outputs digital data and is used to stimulate circuits. The data can be from user files, previously captured data or from the data creation wizard (editor) in the software. All of our Pattern Generators (digital word generators) are also Logic Analyzers and are controlled with easy-to-use Windows software. Some or all of the outputs are bi-directional and can be used to capture data.
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Pattern Generators
PG311P Series
The MicroImage PG311 series of pattern generators are for applications to display custom designed patterns on screen. The PG311 units will overlay the pattern or patterns on top of the video signal provided to the input of the device. The PG311 can be factory programmed with one unique pattern.
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Plasma Etcher / Asher
PA-3000-A ETCHER
Process chamber with plasma view window and full access hinged door. RF hot process shelves with opposing ground electrodes. Throttle valve. Capacitance manometer. Internal pumping system with option for Fomblin filled chemical series mechanical pump. Flow control electronics and cabinet. Up to four mass flow control assemblies can be incorporated into our system. RF matching network and 600 watt maximum power supply. Fully enclosed cabinet. Custom internal fixturing to accommodate specific substrate shapes and sizes. Plasma gas selection for optimal performance.
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Polydisperse Generators
This type of generator is typically capable of spraying aqueous solutions (e.g. salt), suspensions (e.g. PSL, nanoparticles), or oil or alike substances. They serve a variety of applications from laboratory research field tests of detectors, and filter testing.
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Signal Generators
2, 4 and 8 Channel Arbitrary Waveform Generator and Pulse Pattern Generator solutions are ideal choice in automated test benches, for physics experiments, semiconductor tests, analog and digital debugging.
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Surge Generators
Hybrid
Surge pulses occur due to direct or indirect lightning strikes in a circuit or by switching transients caused by switching inductive loads or short circuits. This leads to currents or electromagnetic fields causing high voltage or current transients. Surge voltages and currents can reach several thousands of volts and thousands of amperes. Our following Surge generators simulate these disturbances for all the necessary level in accordance with IEC / EN 61000-4-5 and IEC / EN 60060.
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Seed Aerosol Generators
These types of generators are specifically designed to generate particles in droplet and solid forms. The generators can be used to disperse various types of matter, including water droplets, salt or sugar particles, polystyrene latex particles and oil droplets. They serve a variety of applications from laboratory research, filter testing and flow velocity measurements.
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Digital Pattern Generators
DPG
Active Technologies Digital Pattern Generators also known as DPG, allow digital stimuli generation to stimulate digital designs, providing the capability to emulate standard serial or parallel bus transactions or custom digital interfaces, for system or device debugging and characterization.
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Generators
Pulse Signal Generator
The Software Signal generator allows to produce pulse signals with various pulse ratio and frequency at the DAC output.
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