- TEAM SOLUTIONS, INC.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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High-Power Density
Apex
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Microwave Plasma Subsystems
AX2600 And AX2700
The AX2600 and AX2700 Microwave Plasma Delivery Subsystems are complete and highly reliable solutions for the cost-effective generation and safe delivery of atomic species to the wafer. Available in 3 kW, these highly reliable, field-proven plasma delivery subsystems deliver highly concentrated atomic species. Suitable for multiple chemistries, the high speed and precision of this plasma system’s automatic tuning guarantees immediate ignition and fast transition from plasma conditions for high productivity. Robust closed-loop control ensures high accuracy, precision, and optimal repeatability of the process from wafer to wafer and system to system.
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Plasma Processing Systems
PlasmaSTAR
The PlasmaSTAR® Series of Plasma Processing Systems from Axic, Inc. defines a new concept in barrel plasma processing. The systems are based on a modular design concept. Starting with a universal base unit, multiple electrode modules are available for easy insertion into the base unit. You will find the ease of use, variety of plasma processes, serviceability and attractive pricing unsurpassed by any other plasma.
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Remote Plasma Sources
Equip your manufacturing and abatement processes with high functionality and exceptional reliability. Customize your chemistry. Expand your operating range. Deliver higher process rates. Advanced Energy’s remote plasma sources offer sophisticated options in streamlined designs.
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Plasma Profiling TOFMS
PP-TOFMS
Plasma Profiling TOFMS addresses the needs of materials scientists across a wide range of application areas. PP-TOFMS provides fast elemental depth distribution of any inorganic material. The speed and ease of use of PP-TOFMS permit to reduce optimization time of growth processes as many research scientists strive to reduce the time from discovery to applications of new materials.The simultaneous full coverage of TOFMS available for each point of depth permits the detection of non suspected contamination. This is key for failure analysis and optimization of thin film processes that tend to no longer be based on ultra-high grade methods (i.e. ink jet printing…).
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Function Generators
Scientific Mes-Technik Private Ltd
Scientific offer wide range of function generators from 3 MHz to 10 MHz in general purpose and multifunction. Selection of waveform shapes apart from standard sine, triangle , square to ramp, pulse are available. SM5071 , SM5074 , SM5061 & SM5075 have built-in auto ranging frequency counter. The outputs are protected against short circuits and overload.
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Waveform/Function Generators
Our function generator offers the standard signals and features you expect — modulation, sweep, and burst. It also has features that give you the capabilities and flexibility you need to get your job done quickly, no matter how complex.
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Signal Generators
Are electronic devices that generate repeating or non-repeating electronic signals (in either the analog or digital domains). They are generally used in designing, testing, troubleshooting, and repairing electronic or electroacoustic devices; though they often have artistic uses as well.
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Tone Generators
Traditional Tone Generators were designed for one primary mission; to identify the termination point of a cable. Unfortunately, these were designed for telephony, not network maintenance.
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Waveform Generators
SIGLENT's function generators / arbitrary waveform generators use advanced Digital Frequency Synthesis (DDS) technology to produce high quality standard function and arbitrary waveform signals. They also provide a wide range of analog and digital modulation functions.
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Polydisperse Generators
This type of generator is typically capable of spraying aqueous solutions (e.g. salt), suspensions (e.g. PSL, nanoparticles), or oil or alike substances. They serve a variety of applications from laboratory research field tests of detectors, and filter testing.
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Pulse Generators
Pulse generators provide electronic pulses which mimic events from radiation detectors and are useful in set-up, diagnostics, and noise measurement in spectroscopy systems.
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Signal Generators
SSG5000X Series
SIGLENT’S SSG5000X series of signal generators can generate analog and vector signals, and have a frequency range of 9 kHz to 4 GHz/6 GHz. They feature the industry-leading performance in phase noise, spectral purity, bandwidth, EVM, output power. The internal IQ modulation generator and waveform playback function make it easy to create even the most complex signal types. They also cover the most important RF band for digital wireless communications and include standard waveform files. The SIGLENT SSG5000X are powerful and cost effective sources that are ideal for R&D, education, and manufacturing.
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Remote Plasma Source
Xstream
The highly efficient Xstream® RPS dissociates large volumes of NF3 and quickly cleans chambers, improving your overall tool performance. Its plasma chamber showcases high-purity aluminum alloy and patented cooling capabilities. Built to last for years without repair or expensive chamber coatings, the Xstream RPS is the smart choice for dependability and efficient performance.
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ICP Plasma System
The AXIC IsoLok® Inductively Coupled Plasma (ICP) Load-Locked Processing System from AXIC, Inc. defines a new concept in Deep Reactive Ion Etch (DRIE) and low temperature-low damage Plasma Enhanced Chemical Vapor Deposition (ICP-PECVD) plasma processing. The system is based on a modular design starting with a universal chamber and cabinet unit with ICP etch or deposition bottom electrodes available for easy installation into the chamber unit combined with a load-lock. We are confident you will find the ease of use, variety of plasma processes, serviceability and attractive pricing unsurpassed by any other plasma product in the market.
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Function Generators
These models provide sine, square, triangular waveforms, with variable DC offsets. They may also be used as variable gain amplifiers. Gain and amplitude parameters can often be customized for special applications.
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Pattern Generators
PG311P Series
The MicroImage PG311 series of pattern generators are for applications to display custom designed patterns on screen. The PG311 units will overlay the pattern or patterns on top of the video signal provided to the input of the device. The PG311 can be factory programmed with one unique pattern.
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Signal Generators
Kuhne electronic Signal Generators are available in the following variations:RF Generator as Compact Module in the form factor of a power amplifier (frequency and power can be adjusted)Laboratory Instrument for immediate use with self-explaining user interface for adjustment of frequency and power as well as multiple monitor information possibilities
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Pulse Pattern Generators
PPG
The Pulse Pattern Generator family (PPG), also knows as Serial Data Pattern Generator (SPG), is designed to generate a stream of binary information.
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Pattern Generators
PG311N Series
The MicroImage PG311 series of pattern generators are for applications to display custom designed patterns on screen. The PG311 units will overlay the pattern or patterns on top of the video signal provided to the input of the device. The PG311 can be factory programmed with one unique pattern.