RF Plasma Generators

Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.

Product Home Contact/Sales Distributors/Reps Company Catalog Share Add To List

Topics

Family

Plasma Power Generators

Advanced Energy

Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.

Product Home Contact/Sales Distributors/Reps Company Catalog Share Add To List
DC Power Source Systems

Advanced Energy

Looking for a proven, precise DC power source? Advanced Energy offers standard DC and pulsed-DC power-delivery options. Thanks to vast feature sets and reliable performance, our DC power generators are used in nearly every manufacturing market — semiconductor, flat panel, glass, thin film, etc. And via our global, dedicated support staff, we make sure you get the right DC power product for your processes and applications.

Product Home Contact/Sales Distributors/Reps Company Catalog Share Add To List
RF Match Networks

Advanced Energy

Enable fast, accurate, and reliable matching. Advanced Energy’s match networks expertly perform in multiple power ranges. Available in plug-and-play models or configurable units, easily install, expedite tuning, and tighten process control.

Product Home Contact/Sales Distributors/Reps Company Catalog Share Add To List
Low/Mid-Frequency Power Systems

Advanced Energy

Advanced Energy’s low- and mid-frequency power supplies offer highly efficient, easy-to-integrate power. Quickly improve process control in a wide variety of applications.

Product Home Contact/Sales Distributors/Reps Company Catalog Share Add To List
Pulsed-DC Systems

Advanced Energy

Extend process innovation with Advanced Energy’s comprehensive pulsed-DC suite. Minimize arcing, enhance deposition rate, improve film flatness and packing density.

Product Home Contact/Sales Distributors/Reps Company Catalog Share Add To List
High-Power Density

Apex - Advanced Energy

The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.

Product Home Contact/Sales Distributors/Reps Datasheet Company Catalog Share Add To List
Pulsing and Pulse Waveform Control

Paramount Plus - Advanced Energy

Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 1 to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.

Product Home Contact/Sales Distributors/Reps Datasheet Company Catalog Share Add To List

RF Plasma Generators

Topics

Plasma Power Generators

DC Power Source Systems

RF Match Networks

Low/Mid-Frequency Power Systems

Pulsed-DC Systems

High-Power Density

Pulsing and Pulse Waveform Control