Plasma Generators
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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Product
13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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PXIe-5423, 40 MHz Bandwidth, 2-Channel, 16-Bit PXI Waveform Generator
785116-01
Waveform Generator
The PXIe-5423 is a 40 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5423 also features advanced synchronization and generation features like waveform scripting and streaming.
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Product
Comb Generator, 10 MHz to 67 GHz
U9391G
Comb Generator
The Keysight Technologies, Inc. U9391G comb generators were developed to provide precision phase calibration, for non-linear measurements using the PNA-X nonlinear vector network analyser (NVNA), referenced to the National Institute of Standards and Technology (NIST) standard. Additionally, the comb generators can be used to calibrate PNA and PNA-X network analyzers for phase and delay measurements of frequency converters without requiring reference or calibration mixers.
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Product
1.25GS/s 16Bit 1GS Mem 4CH 4 Markers AWG
P1284D
Waveform Generator
The Proteus P1284D, is a 1.25GS/s, four channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P1284D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Product
2.5GS/s 16Bit 2GS Mem 8CH 16 Markers AWG
P2588D
Waveform Generator
The Proteus P2588D, is a 2.5GS/s, eight channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2588D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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6GHz Four Channel Signal Generator
LS6084B
Signal Generator
The LS6084B is a 6GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
PCI-5412, 100 MS/s, 14-Bit Waveform Generator Device
779177-02
Waveform Generator
The PCI‑5412 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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Product
PXI Waveform Generator
Waveform Generator
PXI Waveform Generators can produce precise waveforms including sine, square, triangle, and ramp as well as arbitrary, user-defined waveforms using sequences of data or streaming continuously from a host or peer-to-peer instrument within the PXI system. These instruments are ideal for tightly synchronized, mixed-signal test systems in scientific research or test of semiconductor devices, consumer electronics, automotive, and aerospace/defense.
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Product
40GHz Single Channel MW Benchtop Signal Generator
LXS4091B
Signal Generator
The LSX4091B is a 40GHz Single Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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20GHz Dual Channel MW Benchtop Signal Generator
LSX2092B
Signal Generator
The LSX2092B is a 20GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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40GHz Single Channel MW Signal Generator 19" 1U Rack
LSX4091R
Signal Generator
The LSX4091R is a 40GHz Single Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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20GHz Four Channel MW Benchtop Signal Generator
LSX2094B
Signal Generator
The LSX2094B is a 20GHz Four Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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2-Channel Arbitrary Waveform Generator
3156C
Waveform Generator
Racal Instruments™ 3156C Dual Channel Arbitrary Waveform Generator outputs 16-bit waveforms from 2 channels at up to 225 MS/s. 12-bit digital patterns may be output at rates up to 200 Mbits/s.
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PXIe-5442, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 512 MB, PXI Waveform Generator
780109-03
Waveform Generator
PXIe, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 512 MB, PXI Waveform Generator—The PXIe‑5442 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms, standard functions including sine, square, triangle, and ramp, as well as signals that require onboard signal processing. Some of these signal processing operations include FIR and CIC interpolation filters, digtal prefilter gain, numerically-controlled oscillator, and I/Q mixing for quadrature digital upcoversion. The PXIe‑5442 also features advanced synchronization and data streaming capabilities.
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PXI RF Analog Signal Generator
Signal Generator
PXI RF Analog Signal Generators deliver the functionality of RF signal generators to the modular, compact PXI form factor. These modules support frequency ranges from 250 kHz to 20 GHz. You can combine PXI RF Analog Signal Generators with other PXI modular instrumentation to design automated test systems for radar, RF integrated circuits (RFICs), and automotive test applications.
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Product
1.25GS/s 16Bit 1GS Mem 8CH Arbitrary Waveform Generators
P1288B
Waveform Generator
The Proteus P1288B, is a 1.25GS/s, eight channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P1288B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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40GHz Four Channel MW Signal Generator 19" 1U Rack
LSX4094R
Signal Generator
The Lucid-X is a small footprint modular microwave signal generator that is available in multiple form factors, including Desktop, PXIe module, benchtop, rackmount, and portable. It has been designed to provide low phase noise, with a frequency range all the way up to 40GHz.
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PXIe-5451, 145 MHz, 16-Bit, 128 MB, PXI Waveform Generator
781204-01
Waveform Generator
PXIe, 145 MHz, 16-Bit, 128 MB, PXI Waveform Generator—The PXIe‑5451 is a 145 MHz, dual‐channel arbitrary waveform generator capable of generating user-definied waveforms, standard functions, and I/Q communications signals. It is an ideal instrument for including in systems for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator as wells as time-domain signals like envelope tracking. The PXIe‑5451 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5451 also features advanced synchronization and data streaming capabilities.
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Product
204.8 kSa/s Smart PXIe Arb. Waveform Source
EMX-1434
Waveform Generator
The VTI Instruments EMX-1434 is an arbitrary source/tach high performance modular PXIe board. It is uniquely designed for sound/vibration and DSA applications and can be easily synchronized with digitized data giving the capability to combine the required source and signal analysis into one single chassis to maximize flexibility. The module can also functions as a high-performance arbitrary waveform generator for electronic test applications requiring standard function generator capability, or the need to generate custom-defined waveforms.
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250 MS/s, Two Channel, Arbitrary Waveform Function Generator PXI Card
GX1120
Waveform Generator
The GX1120 is a high performance, two-channel PXI arbitrary waveform generator that offers function generator and arbitrary waveform generator functionality within one instrument. Built-in waveforms are available for use with both the DDS or AWG modes of operation and include Sine, Triangle, Ramp, Noise, and pulse waveform generation.
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Multichannel Signal Generator for DOCSIS 3.1 Downstream & Upstream
CLGD DOCSIS
Signal Generator
The R&S®CLGD is a multichannel signal generator for simulating a cable TV network with full channel loading. It generates broadband data signals for DOCSIS 3.1 as well as digital and analog TV channels. Signals can be freely combined in the downstream or upstream, allowing users to simulate any conceivable channel loading scenario in the lab.
