Plasma Generators
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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Product
KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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Product
250 MS/s, Two Channel, Arbitrary Waveform Function Generator PXI Card
GX1120
Waveform Generator
The GX1120 is a high performance, two-channel PXI arbitrary waveform generator that offers function generator and arbitrary waveform generator functionality within one instrument. Built-in waveforms are available for use with both the DDS or AWG modes of operation and include Sine, Triangle, Ramp, Noise, and pulse waveform generation.
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Product
PXIe-5442, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 256 MB, PXI Waveform Generator
780109-02
Waveform Generator
PXIe, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 256 MB, PXI Waveform Generator—The PXIe‑5442 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms, standard functions including sine, square, triangle, and ramp, as well as signals that require onboard signal processing. Some of these signal processing operations include FIR and CIC interpolation filters, digtal prefilter gain, numerically-controlled oscillator, and I/Q mixing for quadrature digital upcoversion. The PXIe‑5442 also features advanced synchronization and data streaming capabilities.
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50MS/s Single-Channel Arbitrary Waveform Generator
WW5061
Waveform Generator
Model WW5061 represents the next generation of products in the field of function, pulse and arbitrary waveform generators. This instrument is superior and far more versatile than any existing equivalent whether it is an analog or digital product. As a waveform source, this model can replace analog generators in almost every application.
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Product
6GHz Single Channel Portable Signal Generator
LS6081P
Signal Generator
The LS6081P, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a modern tablet like design that can be used as a benchtop or portable unit. The LS6081P features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081P was designed to offer excellent performance and meet today’s most demanding applications, whether in the lab or out in the field.
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PXI-5404, 100 MHz Bandwidth, 1-Channel, 12-Bit PXI Waveform Generator
778577-02
Waveform Generator
The PXI‑5404 is a 100 MHz clock generator capable of generating clock and sine wave signals and some other standard functions. This clock generator can generate signals from -1 V to +1 V and uses direct … digital synthesis (DDS) to precisely generate waveforms.
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Product
PCI-5412, 100 MS/s, 14-Bit Waveform Generator Device
779177-02
Waveform Generator
The PCI‑5412 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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Product
9GS/s 16Bit 8GS Mem 4CH 8 Markers RF AWG Desktop
P9484D
Waveform Generator
The desktop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, half 19” dedicated chassis. The compact form size and small footprint save valuable bench space. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, space efficient and cost effective solution.
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Product
UXG X-Series Agile Signal Generator, 10 MHz to 40 GHz
N5193A
Signal Generator
Get closer to reality: simulate increasingly complex signal environments for radar, EW & antenna-test Test sooner & increase confidence in EW systems by generating signal simulations when you need them: the UXG is a scalable threat simulator Use pulse descriptor words (PDWs) to generate long pulse trains & individually control pulse characteristics Accurately simulate multi-threat environments: 180-ns PDW update rate, chirps 10 to 25% of carrier frequency, pulses as narrow as 10 ns
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100MS/s Four-Channel Arbitrary Waveform Generator
WW1074
Waveform Generator
The WW1074 offer a 100 MS/s four-channel universal waveform synthesizer. Each is built in a small case size to save space and cost but without compromising bandwidth and signal integrity. The instrument outputs either standard or user-defined waveforms in the range of 100µHz and up to 50MHz.
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Product
PXI-5422, 80 MHz Bandwidth, 16-Bit PXI Waveform Generator
779087-02
Waveform Generator
80 MHz Bandwidth, 16-Bit PXI Waveform Generator - The PXI‑5422 is a 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5422 also features advanced synchronization and data streaming capabilities.
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Product
PXIe I/Q Arbitrary Waveform Generator, 16 bit, 540 MHz, 3 Scalar Channels
M9336A
Waveform Generator
The M9336A AWG delivers exceptional performance for creation of complex wideband waveforms. Multiple, 540 MHz bandwidth channels with 16-bit resolution and up to a 1.28 GSa/s sampling rate are provided in a single-slot PXIe instrument. This enables the AWG to generate wide bandwidth signals with low Error Vector Magnitude (EVM), making it ideal for creating baseband waveforms for wireless communications, radar, and satellite. The M9336A can also be combined with a wideband I/Q upconverter, resulting in modulation bandwidths of 1 GHz at RF frequencies for signal simulations employed in functional testing of chip sets designed for modern digital communications radios.
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PXI/PXIe Arbitrary Generators
Waveform Generator
The arbitrary waveform generators of the PXA72xx family are characterized by a resolution of 16 bits with a maximum sample rate of 200 MS per second. The devices can also be used to directly output voltages of up to 30 V (or ±15 V).
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MXG X-Series RF Analog Signal Generator, 9 kHz to 6 GHz
N5181B
Signal Generator
Take your devices & designs to their limit with outstanding hardware performance, including unmatched phase noise & spurious characteristicsDrive power amplifiers & characterize nonlinear behavior with industry-leading output powerThoroughly test receiver performance by simulating complex analog modulation scenarios with multi-function generator capabilityLower your cost of ownership with 3-year cal cycles & comprehensive solutions for self-maintenance
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Product
PXI Three Channel Function Generator
41-620-003
Function Generator
The 41-620 is a compact 3 channel function generator provided in a PXI 3U single slot module. It is capable of generating sine waves to 10MHz with 48-bit frequency resolution referenced to the 10MHz PXI clock or to an external standard. The 41-620 can generate arbitrary waveforms loaded into the internal 256k memory, allowing the function generator to emulate many waveform types, including the typical waveforms of automotive and aerospace sensors.
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Product
Arbitrary/Function Generator,2 Ch,8-DIG ch, 150 MHz,16 bit,128Mpts/Ch,6 Vpp output, Wave Sequencing
T3AWG2152-D
Function Generator
Arbitrary/Function Generator,2 Ch,8-DIG ch, 150 MHz,16 bit,128Mpts/Ch,6 Vpp output, Wave Sequencing.
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Product
40GHz Dual Channel MW Benchtop Signal Generator
LSX4092B
Signal Generator
The LSX4092B is a 40GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
12GHz RF Analog Signal Generator Module
LS1291D
Signal Generator
The LS1291D, 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, combined with a compact small footprint form factor. The LS1291D features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1291D is designed to meet today’s most demanding specifications, needed from the R&D benches to the production lines.
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Waveform Generator, 80 MHz, 1-Channel
33611A
Waveform Generator
Keysight 33600A Series waveform generators with exclusive Trueform signal generation technology offer more capability, fidelity, and flexibility than previous generation DDS generators. Easily generate the full range of signals you need with confidence that the signal generator is outputting the signals you expect.
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Product
AT-1120, 14-Bit, 2 GS/s, 2-Channel Signal Generator Adapter Module for FlexRIO
782248-01
Signal Generator
The AT-1120 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs. The AT-1120 is ideal for generating complex signals like digital modulations and RF stimuli for functional and performance tests. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the AT-1120, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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Product
14-Bit Waveform Generator
PA72G14180
Waveform Generator
The PA72G14180 is a 14-bit arbitrary waveform generator, capable of generating waveforms at speeds up to 180Msps. An onboard offset voltage source allows generating offset signals while maintaining optimal utilization of the DAC’s digital range. With the 64MWord of memory, there is lots of room for uploading long complex waveforms. Also uploading of many different patterns is possible, allowing switching patterns with minimal bus communication.
