Plasma Generators
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Product
13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Product
GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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Product
PXI-5412, 20 MHz Bandwidth, 1-Channel, 14-Bit PXI Waveform Generator
779176-03
Waveform Generator
20 MHz Bandwidth, 1-Channel, 14-Bit PXI Waveform Generator - The PXI‑5412 is a 20 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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Product
Waveform Generator, 20 MHz, 2-Channel
33510B
Waveform Generator
The 33510B waveform generator provides Keysight’s exclusive Trueform technology which offers unmatched capabilities for generating a full range of signals for your most demanding measurements.
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Product
9GS/s 8Bit, 4GS Mem 2CH 8 Markers AWG
P9082B
Waveform Generator
The Proteus P9082B, is a 9GS/s, dual channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9082B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
779176-01
Waveform Generator
43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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Product
Comb Generator, 10 MHz to 67 GHz
U9391G
Comb Generator
The Keysight Technologies, Inc. U9391G comb generators were developed to provide precision phase calibration, for non-linear measurements using the PNA-X nonlinear vector network analyser (NVNA), referenced to the National Institute of Standards and Technology (NIST) standard. Additionally, the comb generators can be used to calibrate PNA and PNA-X network analyzers for phase and delay measurements of frequency converters without requiring reference or calibration mixers.
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204.8 kSa/s Smart PXIe Arb. Waveform Source
EMX-1434
Waveform Generator
The VTI Instruments EMX-1434 is an arbitrary source/tach high performance modular PXIe board. It is uniquely designed for sound/vibration and DSA applications and can be easily synchronized with digitized data giving the capability to combine the required source and signal analysis into one single chassis to maximize flexibility. The module can also functions as a high-performance arbitrary waveform generator for electronic test applications requiring standard function generator capability, or the need to generate custom-defined waveforms.
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Product
180/400 MS/s Dual Channel PXI Express Arbitrary Waveform Generator
PXIe-1802
Waveform Generator
The Astronics Test Systems PXIe-1802 is a 2-channel Arbitrary Waveform Generator (AWG). Occupying just one PXI Express periphal slot or hybrid slot, this AWG offers the best speed and performance available for output frequencies up to 125 MHz
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EXG X-Series RF Analog Signal Generator, 9 kHz to 6 GHz
N5171B
Signal Generator
Achieve faster throughput and greater uptime with the cost-effective performance optimized for manufacturing testPerform basic parametric testing of components and functional verification of receivers with industry-leading output powerThoroughly verify receiver performance by simulating complex analog modulation scenarios with multi-function generator capabilityMinimize downtime and expenses with self-maintenance solutions and low-cost repairs
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Product
AT-1120, 14-Bit, 2 GS/s, 2-Channel Signal Generator Adapter Module for FlexRIO
782248-01
Signal Generator
The AT-1120 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs. The AT-1120 is ideal for generating complex signals like digital modulations and RF stimuli for functional and performance tests. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the AT-1120, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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Product
40GHz MW Benchtop Signal Generator
LSX4094B
Signal Generator
The LSX4094B is a 40GHz Four Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
3GHz Four Channel Signal Generator
LS3084B
Signal Generator
The LS3084B is a 3GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXIe Vector Modulator
M9316A
Waveform Generator
The M9316A PXIe Vector Modulator is a 3-slot module with integrated wideband IQ modulator and arbitrary waveform generator (AWG) designed to work with the M9383A PXIe Microwave Signal Generator. When ordered with M9383A, it can support 1MHz to 20 GHz frequency coverage, up to 160 MHz RF bandwidth, and up to 1 Giga-sample of AWG playback memory. (See M9383A PXIe Microwave Signal Generator options.
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250 MS/s, Two Channel, Arbitrary Waveform Function Generator PXI Card
GX1120
Waveform Generator
The GX1120 is a high performance, two-channel PXI arbitrary waveform generator that offers function generator and arbitrary waveform generator functionality within one instrument. Built-in waveforms are available for use with both the DDS or AWG modes of operation and include Sine, Triangle, Ramp, Noise, and pulse waveform generation.
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Product
200 MS/s Waveform Generator & Dual 50 MHz Pulse/ Timing Generator
3172
Pulse Generator
The Racal Instruments™ 3172, a 200 MS/s Waveform Generator and Dual 50 MHz Pulse and Timing Generator, combines multi-instrument density and highfrequency performance in a single-slot, C-sized VXIbus format.Waveform output in the range of 100 μHz to 30 MHz with 16-bit vertical resolution (12-bit vertical for 3171 emulation) and pulse output to 50 MHz make the 3172 a powerful solution to a variety of test stimulus requirements.
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MXG X-Series Microwave Analog Signal Generator, 9 kHz to 40 GHz
N5183B
Signal Generator
Get a fast, compact (2U) alternative to the PSG in the lab, depot or fieldAddress demanding tests of radar modules & systems with near-PSG levels of spectral purityCompensate for system loss & drive high-power amplifiers: +19 dBm output power, -55 dBc harmonics & -68 dBc spurious @ 20 GHzReduce calibration time with switching speed 600 sSimulate narrowband chirps & radar antenna scans with up to five internal function generators that can be used with AM, FM, OM pulse modulation
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12GHz Single Channel Signal Generator 19" 1U Rack Module
LS1291R
Signal Generator
The LS1291R, 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS1291R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1291R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXIe-5433, 80 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
785117-01
Waveform Generator
The PXIe-5433 is an 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5433 also features advanced synchronization and generation features like waveform scripting and streaming.
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PSG Analog Signal Generator, 100 kHz to 67 GHz
E8257D
Signal Generator
Address your toughest requirements with metrology-grade frequency & level accuracy with excellent distortion & spurious characteristicsTest high-power devices & overcome test system losses with 1 W output powerAddress the demanding needs of Doppler radar, ADC & receiver-blocking tests with the PSG's extremely low phase noiseCharacterize devices & circuits by adding AM, FM, PM & pulse modulation to your signalMeet test system needs up to 1.1 THz with frequency extender modules
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20GHz Dual Channel MW Benchtop Signal Generator
LSX2092B
Signal Generator
The LSX2092B is a 20GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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2.5GS/s 16Bit 2GS Mem 2CH 8 Markers AWG
P2582D
Waveform Generator
The Proteus P2582D, is a 2.5GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2582D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
