Plasma Generators
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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Product
RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Product
13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Product
6GHz RF Analog Signal Generator Module
LS6081D
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The LS6081D, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, combined with a compact small footprint form factor. The LS6081D features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081D was designed to offer industry leading price to performance ratio, needed from the R&D benches to the production lines.
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UXG X-Series Agile Signal Generator, 10 MHz to 40 GHz
N5193A
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Get closer to reality: simulate increasingly complex signal environments for radar, EW & antenna-test Test sooner & increase confidence in EW systems by generating signal simulations when you need them: the UXG is a scalable threat simulator Use pulse descriptor words (PDWs) to generate long pulse trains & individually control pulse characteristics Accurately simulate multi-threat environments: 180-ns PDW update rate, chirps 10 to 25% of carrier frequency, pulses as narrow as 10 ns
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Product
40GHz Dual Channel MW Signal Generator 19" 1U Rack
LSX4092R
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The Lucid-X is a small footprint modular microwave signal generator that is available in multiple form factors, including Desktop, PXIe module, benchtop, rackmount, and portable. It has been designed to provide low phase noise, with a frequency range all the way up to 40GHz.
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Product
PXI-5402, 14/16-Bit, 20/40 MHz Arbitrary Function Generator
779655-01
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20 MHz Bandwidth, 14-Bit PXI Waveform Generator—The PXI‑5402 is a 20 MHz function generator capable of generating standard functions including sine, square, triangle, and ramp as well as other signals like psuedorandom noise and DC signals. This function generator can generate signals from -5 V to +5 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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Waveform Generator, 20 MHz, 1-Channel
33509B
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The 33509B waveform generator provides Keysight’s exclusive Trueform technology which offers unmatched capabilities for generating a full range of signals for your most demanding measurements.
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2.5GS/s 16Bit 2GS Mem 8CH 16 Markers Arbitrary Waveform Generators
P2588B
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The Proteus P2588B, is a 2.5GS/s, eight channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2588B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXI Function Generator
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Our PXI Function Generator is capable of generating sine, square and triangle waveforms to 10MHz with 48-bit frequency resolution referenced to the 10MHz PXI clock or to an external standard. It can generate fast swept frequency signals, permitting the output to emulate the operation of variable speed devices. The module can also generate arbitrary waveforms loaded into its internal 256k memory, allowing the emulation of many waveform types including the typical waveforms of automotive and aerospace sensors.
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Product
PXIe-5433, 80 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
785117-01
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The PXIe-5433 is an 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5433 also features advanced synchronization and generation features like waveform scripting and streaming.
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Product
Comb Generator, 10 MHz to 67 GHz
U9391G
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The Keysight Technologies, Inc. U9391G comb generators were developed to provide precision phase calibration, for non-linear measurements using the PNA-X nonlinear vector network analyser (NVNA), referenced to the National Institute of Standards and Technology (NIST) standard. Additionally, the comb generators can be used to calibrate PNA and PNA-X network analyzers for phase and delay measurements of frequency converters without requiring reference or calibration mixers.
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MXG X-Series RF Analog Signal Generator, 9 kHz to 6 GHz
N5181B
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Take your devices & designs to their limit with outstanding hardware performance, including unmatched phase noise & spurious characteristicsDrive power amplifiers & characterize nonlinear behavior with industry-leading output powerThoroughly test receiver performance by simulating complex analog modulation scenarios with multi-function generator capabilityLower your cost of ownership with 3-year cal cycles & comprehensive solutions for self-maintenance
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9GS/s 8Bit, 4GS Mem 2CH 8 Markers AWG
P9082D
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The Proteus P9082D, is a 9GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9082D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Product
PXI RF Analog Signal Generator
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PXI RF Analog Signal Generators deliver the functionality of RF signal generators to the modular, compact PXI form factor. These modules support frequency ranges from 250 kHz to 20 GHz. You can combine PXI RF Analog Signal Generators with other PXI modular instrumentation to design automated test systems for radar, RF integrated circuits (RFICs), and automotive test applications.
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9GS/s 16Bit 8GS Mem 4CH 8 Markers RF AWG Desktop
P9484D
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The desktop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, half 19” dedicated chassis. The compact form size and small footprint save valuable bench space. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, space efficient and cost effective solution.
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16 Bit / 400 MS/s Arbitrary Waveform Generator
AWG16
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The AWG16 is a 16 bit Arbitrary Waveform Generator for high-speed / high resolution waveform generation. The fully differential signal path from the DAC all the way to the outputs ensures an exceptional high signal quality. Despite the emphasis on signal quality the AWG16 also has a very good DC accuracy.
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Product
PXIe 1.25GS/s Arbitrary Waveform Generator
P1200M
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P1200M Series PXIe 1.25Gs/s Arbitrary Waveform Generator ModuleThe P1200M series is a 1.25GS/s arbitrary waveform generator module based on PXIe3.0, providing technologically advanced options and configurations, such as dual-channel 5.4GS/s ADC signal acquisition channels with 9GHz bandwidth, which can convert the instrument to arbitrary waveform transceivers device. The P1200M offers industry-leading performance including innovative task-oriented programming, real-time data streaming, fast feedback loops for environment-based waveform generation, and user-definable FPGAs for application-specific solutions.
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40GHz Single Channel MW Signal Generator 19" 1U Rack
LSX4091R
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The LSX4091R is a 40GHz Single Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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250MS/s PXIBus Arbitrary Waveform Generator
5251
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Model 5251, is a single-channel frequency agile waveform synthesizer that combines industry leading performance, frequency agility and modulation capability in a stand-alone, modular product. Having 1.5Hz to 250MHz clock and 16-bit vertical DAC resolution provides the test stimuli required for the decades to come. It can be used as an arbitrary waveform generator, modulating generator, as well as function and pulse generator.
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Product
6GHz Single Channel Portable Signal Generator
LS6081P
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The LS6081P, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a modern tablet like design that can be used as a benchtop or portable unit. The LS6081P features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081P was designed to offer excellent performance and meet today’s most demanding applications, whether in the lab or out in the field.
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Dual Channel 100 MHz Pulse Generator
PXIe-1209
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The Astronics Test Systems PXIe-1209 PXI is a high-performance, 2-channel, 100 MHz Pulse Generator. Occupying a single PXI Express peripheral slot or hybrid slot, the PXIe-1209 provides dual independent pulse generation with fullcontrol of all timing parameters with extremely high resolution.
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Product
PXIe-5413, 20 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
784181-01
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PXIe, 20 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator - The PXIe-5413 is a 20 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5413 also features advanced synchronization.





























