Wide Range Pressure Insensitive Mass Flow Module

D700WR - HORIBA, Ltd.

The D700WR installs a new restrictor designed specifically for a wide range control application with high accuracy performance based on the CRITERION™ technology. D700WR can control flow rate down to 0.1% of full scale range which helps users to optimize the flexibility of gas delivery system. For example, if the system installs multiple MFCs for high and low flow rate control, users can reduce the number of MFCs and use another MFC in the same position for a different purpose.