Beam Directing and Reflecting Optics

Beam directing and reflecting optics simply reflect, bend or translate the beam, but do not typically modify the polarization, except for polarizing beam splitters. For example, mirrors, cube corners and retroreflectors are attached to objects that move in order to keep the weight down on the moving object (instead of mounting the interferometer on the moving object).

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Laser Interferometer Position Measurement Systems

Keysight Technologies

When built into manufacturing and inspection equipment, a laser interferometer system reports the position or controls the motion of a product platform with more accuracy than any other method. It allows manufacturers to produce precision products from integrated circuits to medical devices to aerospace components that meet the most stringent specifications.

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2-Axis High-Resolution Laser Axis Board for VME

10898D - Keysight Technologies

The 10898D 2-axis high-resolution laser axis board provides the same resolution as the Keysight 10897D high-resolution laser axis board with increased slew rates and reduced noise. The increased stage velocity limits and low noise compared to previous laser systems offer premium positioning repeatability and accuracy for advanced applications such as IC fabrication equipment.

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Single Axis Interferometers

Keysight Technologies

Linear, single-beam, and plane mirror interferometers measure motion on a single axis.

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Differential and Compensation Interferometers

Keysight Technologies

One- and two-axis differential interferometers measure relative displacement between two objects. The wavelength tracker automatically compensates for environmental changes.

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Laser Heads

Keysight Technologies

The laser head is the source of the laser beam used in all laser motion and position measurement systems. The primary difference between laser heads is in the velocity, reference frequency and optical output power. Other considerations are size, heat dissipation, and input power requirements. Which laser you choose depends primarily on the application in which it will be used. For example, semiconductor lithography systems typically have faster moving parts (stages), and therefore need higher velocities than machine tool applications.

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Multiple Axis Interferometers

Keysight Technologies

Interferometers that measure two and three axes can increase accuracy, reduce alignment time and save space in high performance multi-axis systems.

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PC System Electronics

Keysight Technologies

Keysight PC electronics provide state of the art laser interferometer performance in the convenient PC backplane format. Axis, servo-axis and compensation boards are available.

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Receivers and Sensors

Keysight Technologies

Choose the optical receiver that meets your system performance and layout requirements. Add sensors for automatic compensation for environmental changes.

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VME System Electronics

Keysight Technologies

Keysight VME electronics give the highest performance available in a laser interferometer system. Choose from a variety of axis and compensation boards.

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1-Inch Cube Corner

10713B - Keysight Technologies

The Keysight 10713B cube corner reflector can be used as the measurement reflector for linear measurements. It may be paired with either the 10702A Linear Interferometer or the 10705A Single-Beam Interferometer. Supplied without housing, the 10713B is suited to applications where mass is extremely critical.

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High-Stability Adapter

10723A - Keysight Technologies

The Keysight 10723A high-stability adapter converts the 10706A Plane Mirror Interferometer into an 10706B High-Stability Plane Mirror Interferometer. The 10706B is a thermally-stable optic with measurement drift reduced to approximately 1/12 the value achieved by conventional plane mirror interferometers.

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Beam Bender

10707A - Keysight Technologies

The Keysight 10707A bends the incoming beam at a 90-degree angle and is designed for beam diameters of 6 mm or less . Includes a housing for standard mounting.

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Retroreflector

10703A - Keysight Technologies

The Keysight 10703A retroreflector (cube corner) is a basic measurement reflector for linear measurements. It is paired with the Keysight 10702A (or Keysight 10702A Opt. 001) linear interferometer, enabling general-purpose, single-axis measurements. If mass is critical, the Keysight 10703A is available without housing as the 10713B.

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Turning Mirror on Universal Mount

10769B - Keysight Technologies

The Keysight 10769B Turning Mirror on Universal Mount deflects a laser beam at any angle, in either the vertical or the horizontal polarization plane of the beam. The 10769B contains the same turning mirror as the 10769A, but has a different mounting.

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1/4-Inch Cube Corner

10713D - Keysight Technologies

The Keysight 10713D is one component of a family of measurement optics that tailor interferometer systems for the physical layout and measurement requirements of individual applications. Configured with appropriate laser head and system electronics, the optics are part of a precise positioning system that improves product quality, increases yields, and facilitates manufacture of precision products.

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Plane Mirror Reflector

10724A - Keysight Technologies

The Keysight 10724A reflector is used with the Keysight 10706A, 10706B, 10715A and 10716A interferometers for single-axis measurements. It can also be used with the Keysight 10737L/R Compact Three-Axis Interferometers. Alignment hardware is included.

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Plane Mirror Converter

10722A - Keysight Technologies

The Keysight 10722A plane mirror converter modifies the use of the 10702A linear interferometer. With an additional 10703A reflector, the 10722A converts the 10702A into a 10706A plane mirror interferometer. With an additional 10723A high-stability adapter, the 10722A converts the 10702A into an 10706B high-stability plane mirror interferometer.

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Plane Mirror

10728A - Keysight Technologies

The Keysight 10728A is a normal incidence plane mirror for beam diameters of 9 mm or less. It is a bare optic that requires a user-supplied mount. It is typically used with the 10735A and 10736A three axis interferometers.

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Beam Bender BK7, Fixed Vertical-Bend Mount

E1834Z - Keysight Technologies

The E1834Z is a beam bender that bends the incoming beam at a 90-degree angle and is designed for beam diameters of 9 mm or less. This referenced optics uses high performance vertical mount to deliver laser beam throughout a measurement system. The 8 flexure feet are designed for stable beam pointing.

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Beam Bender BK7, Fixed Horizontal-Bend Mount

E1834M - Keysight Technologies

The E1834M is a beam bender that bends the incoming beam at a 90-degree angle and is designed for beam diameters of 9 mm or less. This referenced optics uses high performance horizontal mount to deliver laser beam throughout a measurement system. The 8 flexure feet are designed for stable beam pointing.

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Beam Bender

10726A - Keysight Technologies

The Keysight 10726A bends the incoming beam at a 90-degree angle and is designed for beam diameters of 9 mm or less. This bare optic requires a user-supplied mount.

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67% Beam Splitter BK7, Fixed Horizontal-Bend Mount

E1834J - Keysight Technologies

The E1834J is a 67% beam splitter in a high performance horizontal mount that offer the high pointing stability for Keysight laser interferometer measurement system. The 8 flexure feet are designed for stable beam pointing.

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50% Beam Splitter BK7, Fixed Horizontal-Bend Mount

E1834G - Keysight Technologies

The E1834G is a 50% beam splitter in a high performance horizontal mount that offer the high pointing stability for Keysight laser interferometer measurement system. The 8 flexure feet are designed for stable beam pointing.

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50% Beam Splitter

10725A - Keysight Technologies

The 10725A 50% beam splitter, designed for beam diameters of 9 mm or less, divides the beam into equal parts. It transmits one part straight through, and bends the other part at a 90-degree angle. This optic is without housing and requires a user-supplied mount.

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50% Beam Splitter

10701A - Keysight Technologies

The Keysight 10701A beam splitter is designed for beam diameters of 6 mm or less. It reflects one half of the total incoming laser beam, and transmits one half. The Keysight 10701A optic includes a housing for standard mounting.

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