Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

EV 2.0 Series - HORIBA, Ltd.

To address new requirements in Semiconductor, lighting devices, automotive components, flat panels, MEMS sensors, memory chips, and logic electronics processed in the industry using dry etch, cleaning and (PE)CVD, HORIBA has introduced a unique generation of sensor dedicated to Advanced Endpoint Control, Fault Detection and Chamber Health Monitoring.