HORIBA, Ltd.
The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements.
- +81 75 313 8123
- +81 75 321 0752
- info@horiba.co.jp
- 2, Miyanohigashi,
Kisshoin
Minami-Ku, Kyoto 601-8510
Japan
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Product
Mini Raman Spectrometers
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Complete range of miniature Raman components and full systems with deep-cooled CCD cameras.
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Product
pH Pocket Water Quality Meter
LAQUAtwin pH-22
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The only pocket meter that directly measures pH in 0.1ml sample (or 0.05ml sample with sampling sheet B). Unique sensor allows measurement of viscous liquids, solids, and even powder samples. No need for a beaker to calibrate your meter or measure a sample. Just place few drops of the standard or sample onto the flat sensor. This procedure saves you time and prevents wasting your precious sample.
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Product
Highly Sensitive Silica Monitor
SLIA-300
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Highly sensitive silica monitor for ultrapure water management in semiconductor/FPD processes
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Product
Benchtop Water Quality Meters
LAQUA PH1500
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Water quality analysis is repeatedly performed in laboratories on a daily basis. Our high-end benchtop model was developed to provide simplicity with excellent on-site usability - from operation and maintenance through to troubleshooting.
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Product
Compact Baking System
LSC series
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HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit.
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Product
Large Flow Liquid Source Vaporization Control System
LE Series
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A high-flow, high-efficiency, liquid vaporizer with flow channels and heater elements embedded in a cast aluminium block which ensures maximum heat transfer, and the elimination of both cold spots and the risk of condensation. This Liquid Source Vaporization Control System can operate at up to 300 °C and can vaporize up to 30g/min of IPA (or equivalent).
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Product
Miniature High Throughput Spectrometer
VS20-VIS
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HORIBA designs and manufactures miniature high-throughput OEM spectrometers from 190 nm to 1700 nm for various applications. Thanks to a low stray light aberrations corrected concave holographic grating, the VS20-SYS platform offers in a 1.68 x 1.87 x 2 inches footprint a very reliable and robust spectrometer.VS20 OEM spectrometers can be fully customized in sensors, entrance, slit size, electronics board, interface, etc.
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Product
Stack Gas Analyzer
ENDA-7000 Series
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After decades of experience in precise stack gas measurement, HORIBA's brand new ENDA series represents the ultimate stack gas analyzer. With enhanced lower cost and reduced maintenance time, high sensitivity, and usability, we focused on the users' point of view. The ENDA-7000 is designed to continuously measure the concentrations of NOX, SO2, CO, CO2, O2, and NH3 in stack flue gas streams. The model is offered in dozens of combinations based on your measurement requirements. The ENDA-7000 uses an extractive method which measures undiluted sample gases, and is very suitable to stack gas measurements such as shale gas, LNG, or biogas and other combustion applications. The ENDA-7000 is an excellent choice for measurements in power generation facilities, boilers, furnaces, steel manufacturing, cement plants, pulp and paper mills, etc.
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Product
Multispectra Spectrometers
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Providing simultaneous measurements up to 32 channels, excellent imaging and as low as 0.1% crosstalk
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Product
Multi-Component Gas Analyzer
VA-5000 / VA-5000WM Series
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The Multi-Component Gas Analyzer VA-5000 Series is an all-round analyzer that satisfies measurement needs as required for environmental monitoring, energy development support, quality controls, and continuous emission monitoring, etc. The VA-5000 Analyzer can be configured with up to 4 detector modules within a single case. Many combinations of detector modules with a wide selection of ranges allows this series of analyzers to be used for a variety of applications. The VS-5000 Sample Gas Conditioning Systems are designed to support the VA-5000 Analyzers by proving the optimal sample conditions for measurement. We also have wall mounted type analyzer (VA-5000WM) that enables to install in a limitted installation space.
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Product
Flat Carbon Sensor Conductivity meter
HE-960LF / FS-09F-1/2
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It is effective to keep the dilution of Slurry constant. Maintaining an appropriate conductivity value contributes to process stability in the wafer polishing process. Even highly viscous sample liquids such as CMP Slurry can be measured without problems because they use a sensor structure that reduces the risk of the sample liquid sticking to the electrodes. In addition, the sensor is made of a wetted material with excellent chemical resistance, which meets the cleanliness requirements of semiconductor processes. In addition to the above, it can also be used for introduction at the semiconductor process development stage and conductivity control of special chemicals.
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Product
High Spectral Rate and High Dynamic Range Miniature Spectrometers
VS70-HSR & VS70-HDR
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VS70 is a high performance compact fiber coupled spectrometer system covering wide spectral range of 200 to 1050 nm. This OEM optical module is built around Horiba’stype-IV Aberration-Corrected Flat-Field Holographic Ion-Etched concave grating and is specially designed to easily adapt to a large variety of detectors and electronic drivers. This system is fitted with a custom variable order-sorting filter to eliminate higher orders.
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Product
Handheld Water Quality Meters
LAQUA PD220
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- Automatic pH calibration - up to 5 points (NIST, USA pH buffers) / up to 6 points (DIN pH buffers)- 0.01 pH resolution- Offset and average slope display - Automatic / manual temperature compensation and temperature calibration function- ORP calibration option- Dissolved oxygen (DO) concentration in ppm (mg/L) and % saturation- 0.01 mg/L or 0.1% DO resolution- Compensates salinity, temperature, and atmospheric pressure - Up to 2 DO calibration points - With real-time clock and date/time stamp for GLP compliance- Auto log data; built-in memory can store up to 1000 data- Auto shut-off (programmable: up to 30 minutes)- Auto stable, auto hold, and real time measurement modes- Calibration alarm (programmable: up to 90 days)- Built-in electrode holder allows 2 electrodes to be attached- Monochrome LCD with white LED backlight: 50 x 50 mm- Phono jack output for connecting the meter to computer via PC (USB) cable for data collection and to printer via printer (RS232) cable for printout - Casing is IP67 waterproof/dustproof, shock & scratch resistant, non-slip- Powered by 2 x AA batteries- Packaged with electrodes and calibration solutions in carrying case- 3 years meter warranty
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Product
Blood Ionized Calcium Pocket Water Quality Meters
LAQUAtwin Ca-11C
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Milk fever, or Sub Clinical Hypocalcemia (SCH) is a significant problem with dairy cows. Total calcium levels in the cows’ blood drop after lactation. By measuring the ionized calcium levels of the blood directly cow side, the treatment can start sooner and is more effective. The new LAQUAtwin CA-11C has been specially developed for cow side measurement of ionized calcium in blood. Ionized calcium reflects more accurately the current calcemic blood situation compared to total blood calcium as it equals the free available calcium ions.
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Product
Camera Endpoint Monitor based on Real Time Laser Interferometry
LEM Series
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Our Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/deposition process.Depending on applications, LEM camera includes a 670 or 905 or 980 nm laser and when mounted on any dry etch/deposition process chamber with a direct top view of the wafer this generates a small laser spot on the sample surface.Interference occurs when monochromatic light hits the sample surface, resulting in different optical path lengths due to film thickness and height variations in the film.This allows the etch/deposition rate and thus thickness to be monitored in real time, also fringes counting or more complex analysis, providing enhanced process control Endpoint for a wide variety of processes. Additionally interfaces can be detected by their change in reflectivity.
