HORIBA, Ltd.
The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements.
- +81 75 313 8123
- +81 75 321 0752
- info@horiba.co.jp
- 2, Miyanohigashi,
Kisshoin
Minami-Ku, Kyoto 601-8510
Japan
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Product
BHF Concentration Monitor
CS-137
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The CS-137 is a high-precision chemical solution concentration monitor designed to meet the strict demands of semiconductor wet-etching processes.
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Product
Mid-Focal Length Imaging Spectrometers
iHR Series
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The iHR Series of 320 mm and 550 mm focal length high performance and versatile imaging spectrometers are HORIBA’s most popular and iconic spectrometers. The iHR series is built on decades of experience in spectroscopy and represents the highest quality, performance and versatility of any spectrometers in this class. The iHR 320 and iHR 550 spectrometers are immediately recognizable around the world by their unique shape, the result of a superior optical design. These spectrometers benefit from the highest quality of gratings, also designed and manufactured by HORIBA.
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Product
Ultrasonic Exhaust Flow Meter for Real-time Measurement of Vehicle/Engine Exhaust Flow
EXFM-ONE
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EXFM-ONE employs an ultrasonic method for measuring exhaust gas flow rates directly from a vehicle or engine. The unit can be used for various applications such as real time mass measurement of raw exhaust gas combined with MEXA-ONE (Motor Exhaust Gas Analyzer), or for Particulate Matter/emission measurement combined with partial flow dilution system such as MDLT (Partial Flow Dilution Tunnel) or BMD (Bag Mini Diluter). Fuel consumption evaluation is also available when EXFM-ONE is paired with an optional air-to-fuel ratio (AFR) analyzer.
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Product
Most Compact Vacuum UV Back-Illuminated CCD Spectrometer (VUV-FUV)
VU90 Spectrometer
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Horiba has developed a compact size Vacuum Ultraviolet (VUV) Spectrometer with a dedicated CCD Camera Syncerity-VUV, all manufactured in its NJ facility. This unique system features a special CCD sensor with high sensitivity in the far-UV wavelength range with capability to measure from 115 nm with a resolution better than 0.5 nm under vacuum or high purity nitrogen. The system’s internal optical cavity can be black coated for ultimate suppression of stray light.
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Product
Washwater Monitoring System
EG-100
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Washwater Monitoring System for NOx and SOx Scrubber.Monitoring pH/Temperature, Turbidity, and PAH.EG-100 has flow type sensors.
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Product
Gratings for Scientific Research
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HORIBA Scientific’s diffraction gratings are found in cutting-edge scientific applications including ultrafast and highenergy lasers, space flight instruments, astronomy, and synchrotron spectrometers.HORIBA’s scientific gratings are either masters or replicas, depending on the application. HORIBA Scientific also produces custom diffraction gratings, which can be specified according to our customers’ unique technical requirements.
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Product
Powerful and Cost Effective Spectroscopic Ellipsometer
Smart SE
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The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast and accurate thin film measurements. It characterizes thin film thickness from a few Angstroms to 20µm, optical constants (n,k), and thin film structure properties (such as roughness, optical graded and anisotropic layers, etc).The spectral range from 450 to 1000nm is measured in a few seconds and ellipsometric data are analyzed using the DeltaPsi2 software platform. The software integrates two levels of software to fulfil both routine analysis with predefined recipes and advanced analysis with state-of-the art ellipsometric modelling.
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Product
AFM-Raman for Physical and Chemical Imaging
LabRAM Nano
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Fully integrated system based on SmartSPM state of the art scanning probe microscope and LabRAM HR Evolution fully automated Raman micro-spectrometer. LabRAM HR Nano offers full automation and versatile compatibility with outstanding performance.
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Product
Heated Type NOx Analyzer
MEXA-1170HCLD
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The MEXA-1170HCLD is available as an atmospheric (A) and a vacuum (V) model. With nine ranges available from 10 ppm up to 10,000ppm, these instruments are designed to fit most applications in the industry.
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Product
Eddy Current Dynamometers
WT Dyno
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Our WT series eddy current dynamometers are mainly used in the development and testing of all types of prime mover, as well as various engine assemblies. Due to their robust design, which incorporates improved control characteristics, they can be used both as steady state and as transient test stands.Their high speeds for automobile engine testing and their optimised cooling chamber, are convincing arguments that speak for themselves. All WT type dynamometers are suitable for operation in both directions of rotation.
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Product
In-line Sensor & Auto Range Switching Concentration Monitor
HF-960EM
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Measures a wide range of HF concentration from low concentration to undiluted liquid. The HF-960EM achieves high precision measurement by the auto-correction range switching function. Also has the capibility of cleanliness with all PFA sensors. Measurement range: 0 - 50%.
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Product
Low Concentration Type HF/HCl/NH3 Concentration Monitor
HF-960M
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The HF-960M uses sensors that offer outstanding corrosion resistance for high-precision, high-speed measurement of low concentrations of hydrofluoric acid, hydrochloric acid and ammonia, and is thus perfect for single-bath and wafer cleaning. The HF-960M is also an environmentally-friendly product that uses lead-free solder for mounting chips on the PCB.
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Product
Non-Contact Chemical Concentration Monitor
CS-900
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In order to fulfil the tight chemical concentration control required in semiconductor WET process, HORIBA realizes higher functionality to meet the needs by designing compact equipment while maintaining stable measurement and carrying out operator safety through its original sensor design.
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Product
Nanoparticle Analyzer
nanoPartica SZ-100V2 Series
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A highly advanced analyzer solves the mysteries of the nano-world. A single device analyzes the three parameters that characterize nanoparticles: particle size, zeta potential, and molecular weight.
