HORIBA, Ltd.
The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements.
- +81 75 313 8123
- +81 75 321 0752
- info@horiba.co.jp
- 2, Miyanohigashi,
Kisshoin
Minami-Ku, Kyoto 601-8510
Japan
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Product
Piezo Actuator Valve
PV Series
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The Piezo Actuator Valve PV Series consists of piezo actuator valves with metal diaphragms and metal O-rings. When combined with a pressure sensor or flow rate sensor and ratio control unit (PCU series) you can use the Piezo Actuator Valve PV Series to create a pressure control or flow rate control system.
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Product
Cathodoluminescence Solutions for Electron Microscopy
CLUE Series
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HORIBA Scientific's Cathodoluminescence Universal Extension enhances any SEM’s analytical capabilities while maintaining its original functionality. Since the sample is able to remain in the same spot, CLUE can easily be combined with other microscopy applications, such as EDS and EBIC.
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Product
Vapor Concentration Monitor
IR-300 Series
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Metal-Organic Chemical Vapor Deposition (MOCVD) is widely used in the manufacture of LEDs, optical devices and other components. Liquid and solid precursors are delivered to the reaction chamber by controlling the temperature, pressure and the carrier gas flow rate (bubbling method). Process results can be affected by changes especially in temperature and liquid level. The in-line IR-300 Series measures and reports the precursor concentration in real time.
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Product
Benchtop Conductivity Meter
LAQUA EC2000
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Water quality analysis is repeatedly performed in laboratories on a daily basis. Our compact and powerful benchtop model was developed to provide simplicity with excellent on-site usability.
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Product
Handheld Water Quality Meters
LAQUA DO210
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Measures dissolved oxygen (DO) concentration in ppm (mg/L) and % saturation0.01 mg/L or 0.1% DO resolutionCompensates salinity, temperature, and atmospheric pressure Allows up to 2 calibration points using galvanic DO electrode°C & °F temperature readingsAuto log data; built-in memory can store up to 500 dataAuto stable, auto hold, and real-time measurement modesAuto shut-off (programmable: up to 30 minutes)Built-in electrode holder allows 2 electrodes to be attached Monochrome LCD with white LED backlight: 50 x 50 mmCasing is IP67 waterproof/dustproof, shock & scratch resistant, non-slipPowered by 2 x AA batteriesPackaged with galvanic electrode in carrying case3 years meter warranty
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Product
Tunable Deuterium and Tungsten-Halogen Light Sources
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Deuterium and Tungsten-Halogen tunable light sources are convenient and affordable solutions for your laboratory experiments. Their optimized optical design, delivers efficient and power stabilized broadband optical power with variable aperture and selectable bandwidth with wavelength ranging from 180 nm up to 2 micron depending on your choice of the lamp.
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Product
Imaging Scanning Monochromator
H1034
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HORIBA Scientific OEM has developed a high-throughput imaging scanning monochromator based on an aberration-corrected concave holographic grating with low stray light and high efficiency. This proprietary layout with single optics design is ideal for imaging for low-light applications. It features a 3-position external filter wheel, TTL drive electronics, 4-phase stepper motor and associated worm/gear 90:1 ratio mechanism, encoded, aligned and focused at factory.
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Product
Forensic Light Source
CrimeScope CS-16-500W
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The flagship of the SPEX Forensics Product Line, the CS-16-500W was designed for those departments that prefer the power and IR capabilities of 500W Xenon lamps.
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Product
Ultra-thin Mass Flow Controller
DZ-100
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The DZ-100 inherits the same CRITERION™ technology—a differential pressure detection system for laminar viscous flow ranges—used on HORIBA STEC’s MFC, the D500. This innovative technology controls the mass flow of various gases with high precision. As with the D500, the user-configurable DZ-100 supports multi-range and multi-gas applications. The compact design of the MFC reduces the internal volume of the internal gas flow path, and the optimized control algorithm improves response characteristics. It uses a compact CPU with high processing capacity, and the piezo drive circuit and control CPU are installed in the MFC module while the power supply components are housed in a separate small control box. Up to four MFC modules can be controlled by connecting them with the dedicated miniature connectors.
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Product
Air-to-Fuel Ratio Analyzer
MEXA-730λ
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Previously MEXA-700λII used know-how and ingenuity gathered from HORIBA air-to-fuel ratio measurement technologies used worldwide, to provide the highest level of performance.The MEXA-730λ adopts this performance and adds original design for enhanced visibility and operation.A new sensor coefficient data memory function makes it possible to restore back-up data, providing faster start-up times and saving valuable operation time.This enhanced device will meet your multiple testing requirements covering applications from, lab analysis of air-to-fuel ratio, excess air ratio and oxygen concentration, to on-board real time measurement.
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Product
Camera Endpoint Monitor based on Real Time Laser Interferometry
LEM Series
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Our Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/deposition process.Depending on applications, LEM camera includes a 670 or 905 or 980 nm laser and when mounted on any dry etch/deposition process chamber with a direct top view of the wafer this generates a small laser spot on the sample surface.Interference occurs when monochromatic light hits the sample surface, resulting in different optical path lengths due to film thickness and height variations in the film.This allows the etch/deposition rate and thus thickness to be monitored in real time, also fringes counting or more complex analysis, providing enhanced process control Endpoint for a wide variety of processes. Additionally interfaces can be detected by their change in reflectivity.
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Product
Highly Sensitive Silica Monitor
SLIA-300
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Highly sensitive silica monitor for ultrapure water management in semiconductor/FPD processes
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Product
BHF Concentration Monitor
CS-137
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The CS-137 is a high-precision chemical solution concentration monitor designed to meet the strict demands of semiconductor wet-etching processes.
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Product
Forensic Light Source
Mini-CrimeScope Advance
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The Mini-CrimeScope Advance builds on the knowledge and expertise of more than 20 years of Forensic Light Source design. It incorporates the same ease of use and unmatched reliability of its predecessor, along with the latest in arc lamp technology. The result – a unit that is unsurpassed in performance.
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Product
Gratings for Synchrotron, FEL and EUV Light Sources
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HORIBA Scientific holographic lamellar gratings exhibit ultra-low grooves roughness and unique efficiency uniformity making them ideal for Synchrotron, Free Electron Laser (FEL), EUV or Soft X-ray light sources.
