HORIBA, Ltd.
The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements.
- +81 75 313 8123
- +81 75 321 0752
- info@horiba.co.jp
- 2, Miyanohigashi,
Kisshoin
Minami-Ku, Kyoto 601-8510
Japan
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Product
Camera Endpoint Monitor based on Real Time Laser Interferometry
LEM Series
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Our Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/deposition process.Depending on applications, LEM camera includes a 670 or 905 or 980 nm laser and when mounted on any dry etch/deposition process chamber with a direct top view of the wafer this generates a small laser spot on the sample surface.Interference occurs when monochromatic light hits the sample surface, resulting in different optical path lengths due to film thickness and height variations in the film.This allows the etch/deposition rate and thus thickness to be monitored in real time, also fringes counting or more complex analysis, providing enhanced process control Endpoint for a wide variety of processes. Additionally interfaces can be detected by their change in reflectivity.
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Product
Handheld Water Quality Meters
LAQUA DO220
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Measures dissolved oxygen (DO) concentration in ppm (mg/L) and % saturation0.01 mg/L or 0.1% DO resolutionCompensates salinity, temperature, and atmospheric pressure Allows up to 2 calibration points using galvanic DO electrode°C & °F temperature readingsWith real-time clock and date/time stamp for GLP complianceAuto log data; built-in memory can store up to 1000 dataAuto stable, auto hold, and real-time measurement modesAuto shut-off (programmable: up to 30 minutes)Built-in electrode holder allows 2 electrodes to be attached Monochrome LCD with white LED backlight: 50 x 50 mmPhono jack output for connecting meter to computer via PC (USB) cable for data collection and to printer via printer (RS232) cable for printout Casing is IP67 waterproof/dustproof, shock & scratch resistant, non-slipPowered by 2 x AA batteriesPackaged with galvanic electrode in carrying case3 years meter warranty
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Product
SC-1 Monitor
CS-131
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The CS-131 is a high-precision chemical concentration monitor designed for use with SC-1 solutions used in cleaning processes during semiconductor manufacturing. It offers a faster response speed in a more compact size than anything available to date. The CS-131 monitors the concentrations of the individual components of the SC-1 solutions (NH3/H2O2/H2O) which is widely used to remove particles and organic substances. The monitor has a number of outputs which can be utilized to keep the concentrations of the individual elements of the SC-1 solutions within the allowable ranges; this eliminates unnecessary replacement of chemicals potentially increasing bath life time and reducing chemical cost. In addition, a model with an integrated cooling unit is available, allowing accommodation of a broader range of sample temperatures.
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Product
Pocket Water Quality Meters
LAQUAtwin Ca-11
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HORIBA's unique compact meter integrates the electrode, display and sample container to enable simple, effective on-site testing by direct measurement from a single drop.
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Product
Wireless Commander for Multi Block Wireless Temperature Control for Digestions
WIreless Commander
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The new Wireless Commander is the only system which can wirelessly control up to 8 hot blocks providing unparalleled temperature control, data computation and ease of operation through its touch screen based wireless controller.
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Product
Exhaust Pressure Controller
EC-5000 Series
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The EC-5000 series exhaust pressure controller can maintain a consistent pressure, of the user’s choice, within the chamber. The high-resolution stepper motor and unique butterfly valve ensure a fast, sensitive response to any pressure changes.
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Product
Compact Baking System
LSC series
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HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit.
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Product
Broadband Xe Light Source
PowerArc
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75W Xe Ozone free light source for UV-Visible-NIR applicationsThe PowerArc™ is a complete, integrated light source that includes power supply, starter, high efficiency collection optics and lamp housing in one compact package.
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Product
Panel-mount Type Resistivity Meter (Four-Wire Transmission)
HE-480R
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HE-480R connects resistivity sensor(ERF sereies) and measures resistivity and temperature in the sample water.The feature is the high-precision temperature compensation function.Its high-performance temperature compensation makes it ideal for sequential monitoring of ultra-pure water used in manufacturing processes in the semiconductor field, and many other fields, including the areas of electrical goods, foods and medicines.
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Product
High Speed & Precision Pressure Insensitive Mass Flow Module
D700MG
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Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose the new pressure based MFC D700MG, the upper compatible model of the D500MG to support customer’s challenges.
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Product
Facility & Asset Management System
Insight
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Today’s environment confronts lab managers in new, challenging ways. The current regulations demand increasingly complex test procedures that require more time and resources to execute, which counteracts the goals to improve productivity and reduce costs. Therefore, lab managers need to maximize the test cell availability by continual awareness of the current situation in their facility. They must ensure the equipment is fully functional, meets all mandatory quality standards and regulations, and is up to date with all service and maintenance requirements.
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Product
Microscope Photomultiplier Photometers
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HORIBA's microscope photometers are ideal for any lab wishing to quantitate light intensity from a sample on a microscope stage. Initially designed for the most demanding low light level fluorescence kinetics of labeled mammalian cells, these photometers are also just as well suited for mineral analysis or transmission studies.
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Product
Water Treatment Plant Analyzer
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Aqualog® is the only instrument to simultaneously measure both absorbance spectra and fluorescence Excitation-Emission Matrices. EEMs are acquired up to a 100 times faster than with other instruments. Dedicated software automates traceable Quinine Sulfate Unit calibration and correction of inner-filter effects and Rayleigh and Raman scattering lines, enabling rapid export to modeling algorithms like PARAFAC.
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Product
Oxygen/Nitrogen/Hydrogen Analyzers
EMGA-Expert
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The characteristics and performance of metal and solid materials, including steel, various other metals, ceramics, and electronic materials, are determined by the amount of oxygen, nitrogen, and hydrogen. Analyzing elements in such materials at high accuracy and with a small amount has become increasingly important in the study and performance analysis of materials.The EMGA Series Oxygen/Nitrogen/Hydrogen Analyzers significantly reduces analysis time and costs while enhancing analysis accuracy and functionality. Pursuing also usability, the EMGA Series strongly supports improved efficiency in material research and development and quality control.
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Product
Laser Scanning Oil Film Detector
LO-300
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LO-300 provides early warning by on-line detection of oil leakage with a laser and a security camera (option)LO-300 uses a laser to scan water surface or the ground to detect an oil film with high sensitivity.LO-300 with camera unit (option) enables to record the video when LO-300 detects the alarm and stores the image captured before and after alarm signal.
