HORIBA, Ltd.
The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements.
- +81 75 313 8123
- +81 75 321 0752
- info@horiba.co.jp
- 2, Miyanohigashi,
Kisshoin
Minami-Ku, Kyoto 601-8510
Japan
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Product
Reference Ellipsometer for Thin Film Measurements
UVISEL Plus
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The UVISEL Plus ellipsometer range offers the best combination of modularity and performance for advanced thin film, surface and interface characterization. FastAcq technology enables a sample measurement from 190 to 2100nm to be completed within 3 minutes, at high resolution. The possibility to continuously adjust the spectral resolution along the measurement range enables to scan a sample smarter and faster.
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Product
Portable Automated Measuring System
PG-350 P-AMS
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For situations when you can only take measurements in the field, but you want the same precision that you get in the laboratory: HORIBA presents the Portable Automated Measuring System - PG-350 P-AMS.The HORIBA PG-350 P-AMS offers the same accuracy and reliability of laboratorymeasurements in a portable and durable unit, that is light and has a faster response time.With a shortened warm up time, a high visibility touch screen, high accuracy in measuring crucial components in the field and the durability to facilitate mobile measurement, the HORIBA PG-350 P-AMS is the analyzer system of the future.
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Product
Digital Automatic Pressure Regulator
UR-Z700 Series
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The high performance auto pressure regulator UR-Z700 Series has electronic regulators with high-precision pressure sensors and high resolution, fast response piezo actuator valves. They control the pressure relative to the external control signal that they receive. For both Digital/Analog and DeviceNet™ communications.
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Product
Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry
EV 2.0 Series
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To address new requirements in Semiconductor, lighting devices, automotive components, flat panels, MEMS sensors, memory chips, and logic electronics processed in the industry using dry etch, cleaning and (PE)CVD, HORIBA has introduced a unique generation of sensor dedicated to Advanced Endpoint Control, Fault Detection and Chamber Health Monitoring.
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Product
Large Cryogenic Mill that Accomodates Sample Sizes from 0.1 to 100 Grams
Shaqer 1500
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The ShaQer™ offers high throughput and improved pesticide extraction for QuEChERS Sample Prep! It agitates up to six samples simultaneously compared to just two samples processed by hand. The vigorous clamp movement results in thorough extraction of pesticide residue in fruit and vegetables. Every sample is handled in the same manner ensuring consistency and eliminating variations that can occur in manual sample prep. It also accommodates a variety of tube sizes and shapes. CE Approved.
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Product
High Precision, High Stability Chemical Concentration Monitor
CS-700
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The HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.By improving HORIBA's renowned spectroscopic measurement technology, the CS-700 realizes up to 5X improvement in measurement performance.
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Product
Multi-Wavelength Foresnic LED Light Source
HandScope LED
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The only LED unit that changes and selects wavelengths like a forensic light source.
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Product
Highest SNR PDA Miniature Spectrometer
VS70-PDA
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VS70-PDA OEM Photodiode Array Spectrometer is a high performance compact fiber coupled spectrometer covering wide spectral range of 200 to 1000 nm. This VS70 system for industrial applications uses a modified VS70 optical engine with Horiba’s type-IV Aberration-Corrected Flat-Field Holographic Ion-Etched concave grating optimized for UV-VIS and a linear photodiode array.
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Product
Wide Range TMAH Concentration Monitor
HE-960H-TM
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Accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions in semiconductor manufacturing. Wide measurement range : 0 - 10 %. Have the chemical resistant carbon sensor.
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Product
AFM (Atomic Force Microscope) Optical Platform
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The AFM platform allows fully-integrated use of confocal Raman microscopy and AFM for Tip-Enhanced Optical Spectroscopies (such as Tip-Enhanced Raman Spectroscopy (TERS) and Tip-Enhanced PhotoLuminescence (TEPL)), but also for truly co-localized AFM-Raman measurements.The myriad of AFM (Atomic Force Microscope) techniques that allow study of topographical, electrical and mechanical properties can be performed with any laser source available in Raman spectrometer, or with other external illumination (e.g., solar simulator or other tunable or continuum source). TERS and TEPL can provide nanoscale chemical and structural information, making the AFM-Raman platform a two-way road; where complimentary techniques provide novel and unique imaging capabilities to each other.
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Product
In-Situ Spectroscopic Ellipsometer for Real-Time Thin Film Monitoring
UVISEL Plus In-Situ
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The UVISEL Plus in-situ spectroscopic ellipsometer can be easily mounted on process chambers (PECVD, MOCVD, sputter, evaporation, ALD, MBE) for the real-time control of thin film deposition or etch processes.The UVISEL Plus in-situ provides the unique combinations of very high speed, sensitivity, dynamic range and accuracy making the instrument able to control deposition / etch at the atomic layer thickness level, even for rapid processes.
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Product
AFM-Raman for Physical and Chemical Imaging
LabRAM Nano
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Fully integrated system based on SmartSPM state of the art scanning probe microscope and LabRAM HR Evolution fully automated Raman micro-spectrometer. LabRAM HR Nano offers full automation and versatile compatibility with outstanding performance.
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Product
Digital Liquid Mass Flow Meters / Controllers
LF-F/LV-F Series
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The LF-F and LV-F Series are digital liquid mass flow controllers using a Peltier element which cools the liquid rather than using the more common method of thermal heating. This technique removes the risk of boiling chemicals with a low boiling point, thus allowing for greater chemical control.
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Product
Reticle / Mask Particle Detection System
PR-PD2HR
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In semiconductor plants, where high performance and demanding functionality are required, the HORIBA PD Series'' high operating rate and long-term dependability have earned it a solid reputation. Inheriting a transfer system that has proven to provide stable, high performance and superior throughput over long operating periods, the PR-PD2HR now offers the most sensitive detection in the series with exclusive signal processing that can detect particles as small as 0.35 m.
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Product
Multi-Channel Spectrometers
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HORIBA designs and manufactures a large range of custom OEM multi-channel spectrometers with up to 96 channel measurement simultaneously. Thanks to an imaging spectrometer with broadband spectral range, low resolution and a customized fiber bundle, the HORIBA OEM multi-channel spectrometers provide .Improve the speed and parallelize your process with costs reduction by using an HORIBA multi-channel spectrometer.
