NAPSON Corp.
Developing, manufacturing and selling measurement systems and software for silicon wafers/ingots and FPD process production
- +81-3-3636-0286
- +81-3-3636-0976
- 2-36-12, Kameido
Tokyo, Koto-ku, 136-0071
Japan
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product
Wide Measurement Range Model Of Semi-automatic 4 Point Probe Sheet Resistance/resistivity Measurement
RT-3000/RG-2000 (RG-3000)
*User programable measurement pattern & programmable measuring pattern*Tester self-test function, wide measuring range*Thickness, edge, temperature correction for silicon wafer*Film thickness conversion function from sheet resistance*2 types measuring tester (S version: Standard type, H version: High range resistivity measurement type)
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product
Non-Contact (Pulse-Voltage Excitation Method) Ultra-Low Sheet Resistance Measurement System
PVE-80
*No damage measurement by non-contact Pulse-Voltage excitation method*Easy to measure & carry around, Removable stage plate*Easy operation and data processing by PC with Software*Measurement result can shown by 3 types of measurement unit (Sheet resistance[Ohm/Sq], Electric conductivity[S/cm], Electrical conduction[S])*Pulse-Voltage excitation method : Pat. No.5386394 Joint development with Chiba Univ.
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product
Non-contact Inline Resistivity Measurement Module
NC-110 (NC-110PV)
*Possible to measure sheet resistance without contact by Max. 3 types of probes*Suitable for production line and tranceportation system*Connect to host PC by LAN to send measurement command and data
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product
Non-contact Sheet Resistance Multi-points Measurement System With Wide Range
NC-80MAP
*Possible to measure wide range of sheet resistance by installing Max. 4 probes*Min. 7 mm position from edge can be measured*User programable measurement pattern & programmable measuring pattern
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product
Life-time Measurement System For Silicon Bulks/ingots By JIS Method
HF-100DCA
*Global standard model for the lifetime test of silicon bulk*JIS direct current anodizing method*Data processing by digital oscilloscope and PC with software
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product
Conductivity Type (P/N) Checker By Contact Thermo-electromotive Force Method (seebek Effect)
PN-12α
*Thermo electrode and cold electrode is mounted detecting part of measuring probes*Possible to check most figure of sample such as single crystalline silicon wafer, bulk, ingot and so on*Please select from 2 types;1) 2 probe ver.(Hot probe, Cold probe),2) 1 probe ver.(Hot & Cold probe)
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product
Non-contact Measurement Wafer Sorting System (Robot Hand Tranceportation)
NC-3000R
*High accuracy measurement system for large diameter wafer*Non-contact measurement of resistivity, thickness and conductivity (P/N)*Compact design of Two-stage by measuring area and transfer area*Number of cassette station can be changed by customers request Option : Add wafer flattness measurement system(FLA-200)
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product
Non-contact Inline Sheet Resistance Measurement Module For Conductive Layer On Substrate
NC-700
*Inline measurement module for moving substrates such as PET film, glass or paper*Continuous measurement(~24h) in Roll to Roll with OFF-SET FREE capability system*Various applications from the research and development to the production line
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product
Non-contact Measurement Wafer Sorting System (Belt Drive Tranceportation)
NC-6800
*Non-contact measurement of resistivity, thickness and conductivity (P/N)*Number of cassette station can be changed by customers request*Eddy current method for resistivity, Electric capacitance method for wafer thickness*Temperature correction for silicon wafer function
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product
Global Standard Model For 4 Point Probe Sheet Resistance Automatic Measurement System
RT-3000/RG-1000F
*Fully automatic system for large sizes of flat panel with glass loading robot*Tester self-test function, Measurement position correction function, wide measurement range*Min. 0.1 mm meas. resolution and user programmable test pattern*Host (CIM) communication and 2-D/3-D Mapping software
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product
Non-contact Conductivity Type (P/N) Checker For Quick Check
PN-50α
*Principle: Photovoltaic effect by light pulse irradiation*No damage and no stain by Non-contact method*Possible to check even oxidized film on wafer surface*Instantly discrimination by optical pulse illuminate
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product
Non-contact Inline P/N Checker Module For Solar Wafer
PN-100BI
*Principle: Photovoltaic effect with the laser diode*Suitable for production line and tranceportation system*Connect to host PC by LAN to send measurement command and data
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product
Non-contact Sheet Resistance /resistivity Measurement Instrument
EC-80
*Easy operation and compact design*Auto-measurement start by inserting a wafer under the probe*Easy set up to measurement condition by JOG dial*5 types of model for each measuring range
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product
Life-time Measurement System For Silicon Bulks / Ingots With Non-contact
HF-90R
*Silicon bulk, Prismatic shape (JIS code), Ingot condition*Non-contact photoconduction vibration decay method*Data processing by digital oscilloscope and PC with software
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product
Manual Four Point Probe Sheet Resistance/resistivity Measurement
RT70V series
• Combinational measurement system by Measurement tester(RT-70V) & Stage.• Thickness input with easy JOG dial operation (RT-70V Tester)• Tester self-test function/Auto change-over measurement range function• Thickness & Temperature correction function for Silicon sample