Fully Automatic 4 Point Probe System for Silicon Wafer

Fully Automatic 4 Point Probe System for Silicon Wafer

*Measurement of resistivity, thickness, conductivity(P/N) and temperature
*Tester self-test function, wide measuring range
*Thickness, measurement position and temperature correction function for silicon resistivity
*Number of cassette station can be changed by customers request
*Host (CIM) communication and SMIF or FOUP compatible

Get Help