Wafer Flatness Measurement System

FLA-200 - NAPSON Corp.

*Measures Thickness, TTV, Bow, Warp and site and global Flatness (ASTM compliance)
*Measures all materials including Si, GaAs, Ge, InP, SiC
*Full 500 micron thickness measurement range without re-*calibration
2-D /3-D Mapping software