Plasma Generators
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Product
13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Product
50MS/s PCIBus Arbitrary Waveform Generator
5325
Waveform Generator
Model 5325 is a Single-Channel Arbitrary Waveform Generator that combines many powerful functions in one small package. Supplied free with the instrument is ArbConnection software, which is used for controlling the 5325 and for generating, editing and downloading waveforms from a remote computer.
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Product
20 Bit / 2 MS/s Arbitrary Waveform Generator
AWG20
Waveform Generator
The AWG20 is a 20 bit Arbitrary Waveform Generator for medium-speed / high resolution waveform generation. The module combines an excellent dynamic performance with a very high DC accuracy.
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Product
VXI Single/Dual Channel Arbitrary Waveform Generator
3100M
Waveform Generator
The Astronics Test Systems 3100M Waveform Synthesizer Series combines 300 MS/s waveform generation performance, versatility, and compact size into a single-slot VXIbus format.The 3100M is a greatly improved version of a field-proven instrument ideal for VXI test stimulus generation. It replaces one or two of the popular 3152A Precision PLL Waveform Synthesizers, which are standard on many military and commercial test platforms.
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Product
PXI-5412, 20 MHz Bandwidth, 1-Channel, 14-Bit PXI Waveform Generator
779176-02
Waveform Generator
20 MHz Bandwidth, 1-Channel, 14-Bit PXI Waveform Generator - The PXI‑5412 is a 20 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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Product
3GHz Four Channel Signal Generator
LS3084B
Signal Generator
The LS3084B is a 3GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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14-Bit AWQ, 2 GSPS Waveform Generator
SDR14TX
Waveform Generator
The SDR14TX is a dual-channel flexible arbitrary waveform generator (AWG). It offers an outstanding combination of high bandwidth and dynamic range which enables generation of wideband signals.
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Four Channel Arbitrary Waveform Generator 1.25GS/s 16Bit 1GS Mem 4CH 4 Markers AWG
P1284M
Waveform Generator
The Proteus P1284M, is a PXIe based, 1.25GS/s, four channel arbitrary waveform generator offering technologically advanced options and configurations such as, a dual channel 2.7GS/s digitizer with 9GHz bandwidth, to transform the instrument to an arbitrary waveform transceiver. The P1284M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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50MS/s Single-Channel Arbitrary Waveform Generator
WW5061
Waveform Generator
Model WW5061 represents the next generation of products in the field of function, pulse and arbitrary waveform generators. This instrument is superior and far more versatile than any existing equivalent whether it is an analog or digital product. As a waveform source, this model can replace analog generators in almost every application.
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Product
20GHz Four Channel MW Benchtop Signal Generator
LSX2094B
Signal Generator
The LSX2094B is a 20GHz Four Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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1.25GS/s 16Bit 1GS Mem 2CH 4 Markers AWG
P1282D
Waveform Generator
The Proteus P1282D, is a 1.25GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit and perform digital signal processing all in a single instrument. The P1282D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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EXG X-Series RF Analog Signal Generator, 9 kHz to 6 GHz
N5171B
Signal Generator
Achieve faster throughput and greater uptime with the cost-effective performance optimized for manufacturing testPerform basic parametric testing of components and functional verification of receivers with industry-leading output powerThoroughly verify receiver performance by simulating complex analog modulation scenarios with multi-function generator capabilityMinimize downtime and expenses with self-maintenance solutions and low-cost repairs
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PXI-5651, 3.3 GHz RF Signal Generator
779670-01
Signal Generator
3.3 GHz PXI RF Analog Signal Generator—The PXI‑5651 features continuous-wave generation capabilities with FM, 2‑FSK, or OOK modulation. It uses direct digital synthesis (DDS) for high-resolution frequency hopping or phase-continuous sweeping for fixture and device characterization applications. The PXI‑5651 is ideal for clocking nonstandard sample rates, such as WCDMA signals at baseband or intermediate frequency (IF). With these versatile signal generators, you can perform analog and digital modulation through the onboard DDS circuit, which gives you frequency modulation and frequency-shift keying for applications such as bit error rate test, antenna testing, or even keyless entry. You can also perform amplitude modulation using on-off keying.
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125MS/s PCIBus Arbitrary Waveform Generator
5300
Waveform Generator
Model 5300 is a Single-Channel Arbitrary Waveform / Function Generator that combines many powerful functions in one small package. Supplied free with the instrument is ArbConnection software, which is used for controlling the 5300 and for generating, editing and downloading waveforms from a remote computer.
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PSG Analog Signal Generator, 100 kHz to 67 GHz
E8257D
Signal Generator
Address your toughest requirements with metrology-grade frequency & level accuracy with excellent distortion & spurious characteristicsTest high-power devices & overcome test system losses with 1 W output powerAddress the demanding needs of Doppler radar, ADC & receiver-blocking tests with the PSG's extremely low phase noiseCharacterize devices & circuits by adding AM, FM, PM & pulse modulation to your signalMeet test system needs up to 1.1 THz with frequency extender modules
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20GHz Single Channel MW Benchtop Signal Generator
LSX2091B
Signal Generator
The LSX2091B is a 20GHz Single Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXIe-5451, 145 MHz, 16-Bit, 2 GB PXI Waveform Generator
781204-03
Waveform Generator
PXIe, 145 MHz, 16-Bit, 2 GB PXI Waveform Generator—The PXIe‑5451 is a 145 MHz, dual‐channel arbitrary waveform generator capable of generating user-definied waveforms, standard functions, and I/Q communications signals. It is an ideal instrument for including in systems for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator as wells as time-domain signals like envelope tracking. The PXIe‑5451 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5451 also features advanced synchronization and data streaming capabilities.
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20GHz Dual Channel MW Signal Generator 19" 1U Rack
LSX2092R
Signal Generator
The LSX2092R is a 20GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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9GS/s 8 Bit, 4GS Mem 4CH 16 Markers AWG
P9084B
Waveform Generator
The Proteus P9084B, is a 9GS/s, four channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9084B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXI Waveform Generator
Waveform Generator
PXI Waveform Generators can produce precise waveforms including sine, square, triangle, and ramp as well as arbitrary, user-defined waveforms using sequences of data or streaming continuously from a host or peer-to-peer instrument within the PXI system. These instruments are ideal for tightly synchronized, mixed-signal test systems in scientific research or test of semiconductor devices, consumer electronics, automotive, and aerospace/defense.
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PXIe-5413, 20 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
784181-01
Waveform Generator
PXIe, 20 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator - The PXIe-5413 is a 20 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5413 also features advanced synchronization.
