Plasma Generators
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Product
GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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Product
AT-1120, 14-Bit, 2 GS/s, 2-Channel Signal Generator Adapter Module for FlexRIO
782248-01
Signal Generator
The AT-1120 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs. The AT-1120 is ideal for generating complex signals like digital modulations and RF stimuli for functional and performance tests. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the AT-1120, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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Product
PXIe3.0-based 9GS/s Arbitrary Waveform Generator
P9082M
Waveform Generator
The P9082M is a PXIe3.0-based 9GS/s arbitrary waveform generator module that provides technologically advanced options and configurations, such as a dual-channel 5.4GS/s ADC signal acquisition channel with 9GHz bandwidth that converts the instrument into an arbitrary waveform transceiver .
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Product
Multichannel Signal Generator for DOCSIS 3.1 Downstream & Upstream
CLGD DOCSIS
Signal Generator
The R&S®CLGD is a multichannel signal generator for simulating a cable TV network with full channel loading. It generates broadband data signals for DOCSIS 3.1 as well as digital and analog TV channels. Signals can be freely combined in the downstream or upstream, allowing users to simulate any conceivable channel loading scenario in the lab.
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3GHz Four Channel Signal Generator
LS3084B
Signal Generator
The LS3084B is a 3GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Arbitrary Function Generator
HMF2525/HMF2550
Function Generator
Powerful pulse generator Provides pulses with a recurrence rate of up to 12.5 MHz/25 MHz; the pulse width can be set from 15 ns to 999 s with a resolution of 5 ns. Rise/fall time can be selected from 8 ns to 500 ns – a very useful feature when characterizing input hysteresis of semiconductor devices Easily create arbitrary waveforms Arbitrary waveforms can be developed with PC software. Stored waveforms can be loaded via front USB port or imported via the complimentary HMExplorer software (available for download)
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20 Bit / 2 MS/s Arbitrary Waveform Generator
AWG20
Waveform Generator
The AWG20 is a 20 bit Arbitrary Waveform Generator for medium-speed / high resolution waveform generation. The module combines an excellent dynamic performance with a very high DC accuracy.
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Product
2.5GS/s 16Bit 2GS Mem 2CH 8 Markers AWG
P2582D
Waveform Generator
The Proteus P2582D, is a 2.5GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2582D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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6GHz Dual Channel Signal Generator 19" 1U Rack Module
LS6082R
Signal Generator
The LS6082R, 6GHz dual channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS6082R features two phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6082R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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9GS/s 8Bit, 4GS Mem 2CH 8 Markers AWG
P9082D
Waveform Generator
The Proteus P9082D, is a 9GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9082D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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100MS/s Four-Channel Arbitrary Waveform Generator
WW1074
Waveform Generator
The WW1074 offer a 100 MS/s four-channel universal waveform synthesizer. Each is built in a small case size to save space and cost but without compromising bandwidth and signal integrity. The instrument outputs either standard or user-defined waveforms in the range of 100µHz and up to 50MHz.
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Product
100MS/s Dual-Channel Arbitrary Waveform Generator
WW1072
Waveform Generator
The WW1072 represents a new dimension in arbitrary waveform generator design. With an unprecedented combination of arbitrary generator and synthesizer, versatility, high resolution and wide frequency range, and outstanding performance-to-price ratio, the WW1071 delivers diverse benefits that will facilitate tasks in many fields.
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Waveform Generator, 20 MHz, 2 Channel
EDU33212A
Waveform Generator
The EDU33212A dual channel function / arbitrary waveform generator provides uncompromising performance for dual channel synchronized test output signals.
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Product
EXG X-Series Microwave Analog Signal Generator, 9 kHz to 40 GHz
N5173B
Signal Generator
Balance budget & performance to address parametric testing of microwave components & receiversPerform LO up conversion for microwave backhaul links or CW blocking for receiver testingMaximize test throughput with 600-s frequency switchingCharacterize microwave filters & amplifiers with the best combination of output power, low harmonics & full step attenuationUse as a high-stability system reference: the standard high-performance OCXO has an aging rate of 5x10-10 parts/day
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40GHz Dual Channel MW Benchtop Signal Generator
LSX4092B
Signal Generator
The LSX4092B is a 40GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Waveform Generator, 120 MHz, 1-Channel
33621A
Waveform Generator
Keysight 33600A Series waveform generators with exclusive Trueform signal generation technology offer more capability, fidelity and flexibility than previous generation DDS generators. Easily generate the full range of signals you need to your devices with confidence the signal generator is outputting the signals you expect.
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PXI-5402, 14/16-Bit, 20/40 MHz Arbitrary Function Generator
779655-01
Waveform Generator
20 MHz Bandwidth, 14-Bit PXI Waveform Generator—The PXI‑5402 is a 20 MHz function generator capable of generating standard functions including sine, square, triangle, and ramp as well as other signals like psuedorandom noise and DC signals. This function generator can generate signals from -5 V to +5 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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3GHz Single Channel Signal Generator
LS3081B
Signal Generator
The LS3081B is a 3GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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VXI Single/Dual Channel Arbitrary Waveform Generator
3100M
Waveform Generator
The Astronics Test Systems 3100M Waveform Synthesizer Series combines 300 MS/s waveform generation performance, versatility, and compact size into a single-slot VXIbus format.The 3100M is a greatly improved version of a field-proven instrument ideal for VXI test stimulus generation. It replaces one or two of the popular 3152A Precision PLL Waveform Synthesizers, which are standard on many military and commercial test platforms.
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Product
USB Modular Function Generator
U2761A
Waveform Generator
Keysight U2761A is a 20 MHz function generator that offers 10 standard waveforms plus pulse and arbitrary waveforms generation capabilities.
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Product
Waveform Generator, 20 MHz, 1-Channel
33509B
Waveform Generator
The 33509B waveform generator provides Keysight’s exclusive Trueform technology which offers unmatched capabilities for generating a full range of signals for your most demanding measurements.
