Plasma Generators
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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In Situ Diagnostics
For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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High Power Microwave Plasma System
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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12GHz Single Channel Signal Generator 19" 1U Rack Module
LS1291R
The LS1291R, 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS1291R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1291R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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1.25GS/s 16Bit 1GS Mem 2CH 4 Markers Arbitrary Waveform Generator
P1282B
The Proteus P1282B, is a 1.25GS/s, dual channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P1282B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PCI-5402, 20 MHz Bandwidth, 14-Bit Waveform Generator Device
779656-01
The PCI‑5402 can generate standard functions, including sine, square, triangle, and ramp as well as other signals like pseudorandom noise and DC signals. This function generator can generate signals from -5 V to +5 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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PXIe-5451, 145 MHz, 16-Bit, 128 MB, PXI Waveform Generator
781204-01
PXIe, 145 MHz, 16-Bit, 128 MB, PXI Waveform Generator—The PXIe‑5451 is a 145 MHz, dual‐channel arbitrary waveform generator capable of generating user-definied waveforms, standard functions, and I/Q communications signals. It is an ideal instrument for including in systems for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator as wells as time-domain signals like envelope tracking. The PXIe‑5451 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5451 also features advanced synchronization and data streaming capabilities.
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9GS/s 16Bit 8GS Mem 8CH 16 Markers RF AWG Benchtop
P9488B
The benchtop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, 19” benchtop box. With a 9” touch display and on-board PC the benchtop platform enables users to program the instrument without the need of an external PC. Users can program the instrument from the onboard PC using various programming environments such as MATLAB, LabView, Python, and more. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, high performance, and cost effective solution.
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PXI/PXIe Arbitrary Generator Family
PXA(e)72xx
The arbitrary waveform generators of the PXA72xx family feature 16-bit resolution at a maximum sample rate of 200 ms per second. Furthermore, the devices can directly output voltages up to 30 V (or ±15 V).
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Multichannel Signal Generator for DOCSIS 3.1 Downstream & Upstream
CLGD DOCSIS
The R&S®CLGD is a multichannel signal generator for simulating a cable TV network with full channel loading. It generates broadband data signals for DOCSIS 3.1 as well as digital and analog TV channels. Signals can be freely combined in the downstream or upstream, allowing users to simulate any conceivable channel loading scenario in the lab.
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VXI Single/Dual Channel Arbitrary Waveform Generator
3100M
The Astronics Test Systems 3100M Waveform Synthesizer Series combines 300 MS/s waveform generation performance, versatility, and compact size into a single-slot VXIbus format.The 3100M is a greatly improved version of a field-proven instrument ideal for VXI test stimulus generation. It replaces one or two of the popular 3152A Precision PLL Waveform Synthesizers, which are standard on many military and commercial test platforms.
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2.5GS/s 16Bit 2GS Mem 4CH Arbitrary Waveform Generators
P2584B
The Proteus P2584B, is a 2.5GS/s, four channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2584B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXIe Frequency Reference: 10 MHz And 100 MHz
M9300A
The M9300A PXIe frequency reference is a PXIe-compatible, compact, modular instrument that can be used with the Keysight M9301A synthesizer, M9310A source output, and M9311A modulator to create the world’s fastest vector signal generator, the M9381A. Create a CW source, the M9380A, by combining the M9300A with the M9301A and M9310A or use it as the 10-MHz or 100-MHz reference with other PXI solutions. Control the instrument through a soft front panel and programmatic interfaces tuned to your application development environment of choice.
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PXI Waveform Generator
PXI Waveform Generators can produce precise waveforms including sine, square, triangle, and ramp as well as arbitrary, user-defined waveforms using sequences of data or streaming continuously from a host or peer-to-peer instrument within the PXI system. These instruments are ideal for tightly synchronized, mixed-signal test systems in scientific research or test of semiconductor devices, consumer electronics, automotive, and aerospace/defense.
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Analog Output/Arbitrary Waveform Generator PXI Card
GX1649 Series
The GX1649 is a 3U PXI digital to analog output board designed specifically for applications where multiple DC or AC analog outputs are required. The GX1649 offers 64 output channels with 16-bits of precision signal sourcing performance and can be used as a DC source or arbitrary waveform generator.
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NI-5742, 16-Bit, 1 MS/s, 32-Channel Signal Generator Adapter Module for FlexRIO
782865-01
The NI‑5742 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs and general-purpose digital input and output lines for system stimulus and control. The NI‑5742 is ideal for applications requiring high-channel density and the power of a user-programmable FPGA. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the NI‑5742, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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Waveform Generator, 20 MHz, 2-Channel
33510B
The 33510B waveform generator provides Keysight’s exclusive Trueform technology which offers unmatched capabilities for generating a full range of signals for your most demanding measurements.
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100MS/s Dual-Channel Arbitrary Waveform Generator
WW1072
The WW1072 represents a new dimension in arbitrary waveform generator design. With an unprecedented combination of arbitrary generator and synthesizer, versatility, high resolution and wide frequency range, and outstanding performance-to-price ratio, the WW1071 delivers diverse benefits that will facilitate tasks in many fields.
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9GS/s 8 Bit, 4GS Mem 6CH 24 Markers AWG
P9086B
The Proteus P9086B, is a 9GS/s, six channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9086B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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22 Bit / 2 MS/s Arbitrary Waveform Generator
AWG22
A 22 bit Arbitrary Waveform Generator for medium-speed / high resolution waveform generation.The AWG22 is upwards compatible with the AWG20 and also features differential outputs with a programmable common-mode voltage.
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12GHz Single Channel Portable Signal Generator
LS1291P
The LS1291P, 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a modern tablet like design that can be used as a benchtop or portable unit. The LS1291P features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1291P was designed to offer excellent performance and meet today’s most demanding applications, whether in the lab or out in the field.
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PXI-5404, 100 MHz Bandwidth, 1-Channel, 12-Bit PXI Waveform Generator
778577-02
The PXI‑5404 is a 100 MHz clock generator capable of generating clock and sine wave signals and some other standard functions. This clock generator can generate signals from -1 V to +1 V and uses direct … digital synthesis (DDS) to precisely generate waveforms.
