Mass Spectrometry
identifies chemical composition by determing it's mass/charge ratio.
See Also: MALDI-TOF, Mass Spectrometers
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Product
Special Application Thermal & Pressure Mass Flow Controllers
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Certain process vapors and gases require mass flow controllers of a special design specific to the material as well as process conditions. MKS offers both thermal mass flow controllers and pressure based mass flow controllers for these applications that require flow control at elevated temperatures and/or low pressure drop conditions given the source material characteristics.
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Product
Multi Range/Multi Gas Digital Mass Flow Controller
SEC-Z500X Series
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This is HORIBA's best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily.With high accuracy +/- 1.0% S.P, piezo actuator valve, high speed response and being all-metal this mass flow controller is suitable for process yield improvement and simplified parts management. Digital/Analog, DeviceNet™, and EtherCAT® communications are all available.
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Product
Digital Mass Flow Controller and Meter
300 Vue Series Digital Flow Meter
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The 300 Vue is our newest series of digital gas thermal mass flow instruments which provide accurate, fast and convenient gas measurement and control. The color touchscreen display allows for local adjustments and monitoring of gas flow. Powerful and intuitive menus enable control of the gas flow in many ways. The instrument can be installed and operating in seconds. Flexible custom flow instruments without the custom price or lead time.
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Product
Mass Flow Meters
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Alicat Scientific, Incorporated
Use mass flow meters to measure gas flow from 0.5 SCCM to 10,000 SLPM, with accuracies as good as ±0.5% of reading or ±0.05% of full scale and a measurement range of 0.01-100% (10,000:1 turndown).
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Product
High Temperature Digital Mass Flow Controller
SEC-8000 F/D/E Series
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The SEC-8000F/D/E series can operate in high temperature environments, from 15 ℃ to 120 ℃, for a variety of tasks including semiconductor and compound semiconductor processing.
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Product
Mass Flow Controller for Medium Flow
HFM-201 / HFC-203
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The HFM-201/HFC-203, Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers accurately measure and control mass flow in a variety of applications. Featuring reliability and stability, the 200 Series is chosen for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.The HFM-201 / HFC-203 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and can be configured with normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Many corrosive gases and pressures up to 1000 psig are easily measured. Cleaning for oxygen service is available.
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Product
Coriolis Mass Flowmeters
CMF
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Applicable Fluids: Gases Slurries Liquids. Typical Applications: Custody transfer Reactor feed ratio Density measurement Batch control.
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Product
GCxGC Time-of-Flight Mass Spectrometer
PEGASUS® BT 4D
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The Pegasus BT 4D offers enhanced sensitivity by coupling our benchtop Pegasus BT with our high performance GCxGC thermal modulation system. This combination gives the Pegasus BT 4D the ability to interrogate challenging samples where the best sensitivity is needed. Unique and powerful software and hardware features simplify quantitation, while also dramatically making GCxGC easy to use and understand.
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Product
Mass Flow Controller for Medium Flow
HFM-201 / HFC-203
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The HFM-201/HFC-203, Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers accurately measure and control mass flow in a variety of applications. Featuring reliability and stability, the 200 Series is chosen for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.The HFM-201 / HFC-203 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and can be configured with normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Many corrosive gases and pressures up to 1000 psig are easily measured. Cleaning for oxygen service is available.
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Product
Principle Of Optical Emission Spectrometry
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Optical emission spectrometry involves applying electrical energy in the form of spark generated between an electrode and a metal sample, whereby the vaporized atoms are brought to a high energy state within a so-called "discharge plasma".
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Product
Mass Spectrometers
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Our wide range of powerful, versatile, and proven mass spectrometry-based solutions deliver a new level of understanding and control in vacuum and gas-related applications to customers.
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Product
Residual Gas Analyzers, Mass Spectrometers
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the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.
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Product
XCITE 1100-5 Inertial Mass Excitation System
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The 1100-5 Inertial Mass Modal Excitation system allows the testing of structures where backup fixturing is not available or possible. Accelerating an internal mass with the closed loop hydraulic excitation system generates the inertial forces. The compression control of the Xcite Master Controller maintains a constant force over a frequency sweep by continuously altering the drive signal to maintain the required dynamic force level.
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Product
Mass Interconnect Solution
SCOUT
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SCOUT is an innovative pull-through Mass Interconnect solution specifically designed to deliver the full performance potential of the PXI platform at the ATE interface. SCOUT, featuring DAK (Direct Access Kit) connectivity, enables system designers to limit or eliminate traditional instrument cables by replacing them with DAK connection modules that utilise PCB, flex-circuit or short wire connections.
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Product
High Speed & Precision Pressure Insensitive Mass Flow Module
D700MG
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Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose the new pressure based MFC D700MG, the upper compatible model of the D500MG to support customer’s challenges.
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Product
Mass Flow Controller
SEC-E Series
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This general purpose mass flow controller has a reliable thermal sensor and solenoid valve, allowing you to achieve high-level control of gas flow. A versatile component, the mass flow controller sec-e series can be used in a wide range of industries.Gas flow through the mass flow controller can be controlled over a range of flows: from 10 SCCM to 200 SLM.
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Product
Mass Flow Controller for Low Flow
HFM-200 / HFC-202
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The HFM-200/HFC-202 is Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers. Featuring reliability and stability, the 200 Series is chosen by OEM's for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.
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Product
Triple Quadrupole Gas Chromatograph Mass Spectrometer
GCMS-TQ8040 NX
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The Shimadzu triple-quad GCMS-TQ8040 NX features smart technologies to boost the efficiency of routine analytical work. For example, Smart MRM provides fully-automated MRM method development. It automatically determines all optimum transitions and collision energies, seamlessly incorporating them into the Smart Database Series. With features like this, the GCMS-TQ8040 NX GC-MS/MS is so smart it almost runs itself! Perfect for applications in fields such as environmental monitoring and food science.
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Product
High Performance Liquid Chromatograph Triple Quadrupole Mass Spectrometer
LCMS-8045
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Equipped with a heated ESI probe, the LCMS-8045 has the highest sensitivity in its class. The heated ESI probe, high-temperature heating block, desolvation line (DL) and drying gas, all act to promote desolvation and prevent contamination due to the penetration of liquid droplets into the MS unit. This improves the robustness, so reliable and high-accuracy data can be obtained over the long term. The LCMS-8045 also achieves the world's fastest scan speed (30,000 u/sec) and polarity switching speed (5 msec). These enable ultra-high-speed, high-sensitivity analysis. The excellent cost performance of this system is demonstrated in food safety, environmental analysis, and other quantitative analyses, it can be upgraded to the LCMS-8060.
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Product
QC Reporter™: Mass Confirmation And Quality Assessment
QC Reporter
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QC Reporter™: mass confirmation and quality assessment with confidence Within a given manufacturing process, quality control (QC) plays a fundamental role in guaranteeing the supply of a high quality product. QC Reporter is an automated analysis and reporting software solution for QC environments. Compatible with the MALDI-8020 benchtop linear MALDI-TOF mass spectrometer, this software provides a simple and secure platform for typical QC workflows.
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Digital Liquid Mass Flow Meters / Controllers
LF-F/LV-F Series
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The LF-F and LV-F Series are digital liquid mass flow controllers using a Peltier element which cools the liquid rather than using the more common method of thermal heating. This technique removes the risk of boiling chemicals with a low boiling point, thus allowing for greater chemical control.
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Product
Vapor Source Mass Flow Controller With Viscous Laminar Flow
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The 1152C Vapor Source Mass Flow Controller is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas. The 1152C consists of a fixed flow element and two capacitance manometers for flow measurement, with a proportioning solenoid control valve for flow control.
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Product
Low Pressure Drop Thermal Mass Flow Meter
HFM-200 LFE
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The HFM-200 LFE Series by Teledyne Hastings can be configured and accurately measure gas flow in a broad array of applications. Featuring reliability and stability, the 200 Series is chosen by users for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow meter compatible with most gases.The HFM-200 LFE meter has flow ranges from 0-10 sccm to flows of 0-15,000 slm; provides analog outputs, and is constructed of stainless steel. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Cleaning for oxygen service is available. Our laminar flow elements (smooth, threaded or flanged) are available in various sizes from 3/8" up to 8". Low pressure drops at full scale flow.
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Standard Mass Flow Meter
Series II
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Offers outstanding value in a wide range of industrial and lab applications. Exceptional accuracy and repeatability with flow ranges from 0.014 cc/min up to 1670 l/min. and working pressures up to 6000 PSIA. Offers multi-gas and multi-range capability
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Coriolis or Thermal Mass Flow Meters
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The RBCM Coriolis or Thermal Mass flow meter is measurable of liquid, gas, liquid-solid and gas-solid two phase fluid mass flow instantaneous rate and cumulative total and realizes display and remote transmitter of all measuring parameters.
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Product
Manual Fixture Kit With Mass Interconnect Cassette Interface, Max number of probes (2N) 1000 units, Max UUT 580 x 250 mm (wxd)
CMCSK-03-01
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Linear click system with ball bearings, using gas springs.10 mm ESD-proof top cover with aluminum reinforcement bars.Steel base cabinet with detachable aluminum back and bottom panels.Detachable interchangeable case system with an 8 mm spring-loaded probe protection cover.Base cabinet fitted with a telescopic guide rail and catch.
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Product
High Accuracy In-Situ Mass Flow Verifier
HA-MFV
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The HA-MFV, High Accuracy Mass Flow Verifier is designed for use on process tools to verify mass flow control flow rates in-situ. Available with EtherCAT® or DeviceNet™ communications and measurement accuracy of 1.0% of reading, the HA-MFV can verify MFC flow with the actual process gas significantly better than older rate-of-rise devices or process chamber rate-of rise methods.
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Product
PM Mass Monitor
Model T640
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Teledyne Advanced Pollution Instrumentation
The Model T640 PM Mass Monitor is the next breakthrough in ambient particulate monitors. The T640 delivers 1-min or better time resolution with exceptional sensitivity and precision. The instrument is very low maintenance and requires no sample media for minimal cost of operation.
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Product
Mass Spectrometers Gas Analyzers
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Our real-time Extrel quadrupole mass spectrometers are built for the demands of the gas and ion analysis for industrial and high purity process control, environmental monitoring, and cutting-edge laboratory research. Our mass spectrometers offer high sensitivity and a wide dynamic measurement range (ppb to %) for full, speciated composition. Our fast and powerful, quadrupole mass spectrometer performs precision quantitative analysis on every component in a gas or vapor mixture. It can easily be fully automated for sampling of multiple gas channels. For decades we have collaborated with research, academic, and industrial customers to deliver, design, integrate validate, and support these unique turnkey solutions.
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Product
Linear Testfixture for VPC iCon i1 Mass Interconnected Cassette Interface (Cassette Not Included) 4 or 10 Positions Blocks, UTT 306 x 248 mm
MG-02-01
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FEATURES• Linear click system with ball bearings, using gas springs• 10 mm ESD-proof top cover with aluminium reinforcement bars• Steel base cabinet with detachable aluminium back and bottom panels• Detachable interchangeable case system with an 8 mm spring loaded probe protection cover• Base cabinet fitted with a telescopic guide rail and catchTECHNICAL SPECIFICATIONS• Max. number of probes (2000N) 1300 units• Max. PCB height: 60 mm• Linear travel: 12 mm• Max UUT: 306 x 248 mm (wxd)• Outer dimensions: 470 x 490 x 100 x 170 mm (wxdxh1xh2)• Designed for Mass interconnect changeable cassette• Up to a maximum of 4 interface blocks of 160 signals• All interface blocks can be customized





























