Variable Angle Spectroscopic Ellipsometer

VUV-VASE - J.A. Woollam Co., Inc. (J. A. Woollam Co.)

The VUV-VASE variable angle spectroscopic ellipsometer is the standard in optical characterization of materials used in lithography applications. Its measurement range spans vacuum ultraviolet (VUV) to near infrared (NIR). This provides incredible versatility to characterize numerous types of materials: semiconductors, dielectrics, polymers, metals, multilayers and now liquids such as immersion fluids.