Nano-Position Sensors
ZYGO nano-position sensors are widely used in closed-loop motion control systems like photolithography and semiconductor inspection tool stages, as well as for deformable optical systems. We have pioneered innovations in the displacement and position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs.
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Product
Absolute Position Measurement System
ZPS
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ZYGO's ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning.
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Product
Displacement Measuring Interferometers (DMI)
ZMI Series
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This unit measures retroreflector targets for tracking objects moving primarily in one linear dimension or rotating about a fixed point. ZYGO offers a standard and compact size linear interferometer to accommodate different system space constraints.
