Scanning Probe Workstation
Scan range : X&Y = 200 μm; Z = 100 μm• Practical minimum step size : 50 nm with <10 nm resolution• Max scan speed : 200 μm/s• Max discrete data acquisition for line or area scan : 20 points/s• Micrometer macro positioning : 13 mm range – the smallest graduation is 10 μm• Max area scan point density : >4,000,000
