Liquid Auto Refill System

LU Series - HORIBA, Ltd.

The LU Series offers uninterrupted, safe and reliable delivery of the liquid precursor to liquid material baking systems and injection systems. This leads to increased uptime, reduced operator handling and reduced risk of process contamination.
The LU Series includes a function for automatically implementing a remaining liquid purge sequence.
Using the LU Series, product throughput and maintenance efficiency is improved.