Total Reflection X-Ray Fluorescence (TXRF) Products
Total Reflection X-Ray Fluorescence (TXRF) Products by Rigaku
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TXRF Analyzer
3800e
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Measure elemental contamination at discrete points or with full wafer maps. TXRF analysis can gauge contamination in all fab processes, including cleaning, litho, etch, ashing, films, etc. The TXRF 3800e can measure elements from S through U with a single-target, dual-beam X-ray system and a new liquid nitrogen-free detector system. Size of wafer: 200 mm max.
