Electrostatic Chucks
Chucks grip for micropatterning, temperature control, or robotics ...
*insulating substrates,
*hard disk drive head substrates,
*semiconductor wafers,
*InP-coated sapphire,
*metal foils,
*... and many other materials.
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Electrostatic Chuck
CP Series
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'CP' electrostatic chucks all employ a Chuck Puck, bolted onto a Service Base. Standard CP chucks operate between -60 and +120 deg. C.
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EUV (Extreme UltraViolet) Chucks
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Lightweighted and low-expansion chucks with 10nm active-area flatness are required in EUV lithographic tools. These chucks also have low outgassing and low particle generation.
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Glass-Gripping Chucks
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Electrogrip is able to grip through one substrate to grip a second masking substrate.
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High Temperature Chucks
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High temperature electrostatic chucks are available for the ranges -60 to +400 deg. C, and for 350 to 600 deg. C. Different materials and constructions are used in these two ranges.
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Metal Foil Chucks
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Electrostatic chucks are the most reliable solution for gripping delicate, microfabricated metal foils - even in air. These chucks induce no distortion, are easily cleaned, are amazingly robust, economically priced, and exhibit uniform grip forces over their entire area.
