EUV (Extreme UltraViolet) Chucks

Lightweighted and low-expansion chucks with 10nm active-area flatness are required in EUV lithographic tools. These chucks also have low outgassing and low particle generation.

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Electrostatic Chucks

Electrogrip Company

Chucks grip for micropatterning, temperature control, or robotics ...*insulating substrates,*hard disk drive head substrates,*semiconductor wafers,*InP-coated sapphire,*metal foils,*... and many other materials.

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Electrostatic Chuck

CP Series - Electrogrip Company

'CP' electrostatic chucks all employ a Chuck Puck, bolted onto a Service Base. Standard CP chucks operate between -60 and +120 deg. C.

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Glass-Gripping Chucks

Electrogrip Company

Electrogrip is able to grip through one substrate to grip a second masking substrate.

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High Temperature Chucks

Electrogrip Company

High temperature electrostatic chucks are available for the ranges -60 to +400 deg. C, and for 350 to 600 deg. C. Different materials and constructions are used in these two ranges.

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Metal Foil Chucks

Electrogrip Company

Electrostatic chucks are the most reliable solution for gripping delicate, microfabricated metal foils - even in air. These chucks induce no distortion, are easily cleaned, are amazingly robust, economically priced, and exhibit uniform grip forces over their entire area.

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EUV (Extreme UltraViolet) Chucks

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Electrostatic Chucks

Electrostatic Chuck

Glass-Gripping Chucks

High Temperature Chucks

Metal Foil Chucks