Wafer Internal Inspection System

Measuring & Analysis Equipment

Quality management for semiconductor manufacturing processes and liquid crystal panel manufacturing processes, which require nano-order precision. Oxygen analyzers used in firing furnaces and N2 reflow ovens.Water quality meters used to monitor the water quality of plant discharge and the pure water used in semiconductor manufacturing processes.Our measuring and analysis equipment is used in a wide range of fields.

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Wafer Inspection System

INSPECTRA® Series - Toray Engineering Co., Ltd.

INSPECTRA® series meet the requests of 100% automatic inspection with high speed and high specifications from front-end to back-end of semiconductor processing. INSPECTRA® series are wafer inspection systems with high speed and high sensitivity. Our original "Die-to-Statistical-Image" comparison method achieves the target defects detection controlling process variation and overkill.

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Surface Profiler Measurement System

SP series - Toray Engineering Co., Ltd.

SP series, high accuracy 3D surface profiler measurement system with white light interferometry.

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Luminescence Defect Inspection System

INSPECTRA® PL Series - Toray Engineering Co., Ltd.

This system uses luminescent images created using photoluminescence (PL) to perform high-speed, high-sensitivity automatic inspection for crystal defects, cracks, and luminescence defects which cannot be detected with conventional visible light surface inspection!

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Wafer Internal Inspection System

Topics

Measuring & Analysis Equipment

Wafer Inspection System

Surface Profiler Measurement System

Luminescence Defect Inspection System