Brooks Automation, Inc.
Brooks atmospheric robots and modules are an integral part of high-performance atmospheric wafer handling solutions in Process Equipment and Cluster Tool Front Ends for semiconductor material handling applications. Razor atmospheric robots provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing operations.
- +1-978-262-2400
- +1-978-262-2500
- 15 Elizabeth Drive
Chelmsford,, MA 01824
United States
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