Login

Brooks Automation, Inc.

Brooks atmospheric robots and modules are an integral part of high-performance atmospheric wafer handling solutions in Process Equipment and Cluster Tool Front Ends for semiconductor material handling applications. Razor atmospheric robots provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing operations.

Company Website
Contact/Sales
Distributors/Reps
News

Phone:+1-978-262-2400
Fax:+1-978-262-2500
Address:15 Elizabeth Drive
Chelmsford,, MA 01824
United States

Products
Related Companies

hide

Filter Results By:

Products

Inspection Systems (1)
Robots (1)
Sorters (1)

Applications

Wafer (2)
Component (1)
Level (1)
Particle (1)
Reliability (1)
Reticle (1)
Wafer Level (1)
Wafer Level Reliability (1)

Search This Catalog:

Showing results: 1 - 3 of 3 items found.

Components

Brooks Automation, Inc.

The Brooks field-proven wafer transport robots and modules deliver high performance and low total cost of ownership to create manufacturing efficiency, accelerate innovation, and drive profits for today’s manufacturers.

Company Website Contact/Sales Distributors/Reps Company Catalog Share Add To List
Reticle Handling

Brooks Automation, Inc.

A reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).

Product Home Contact/Sales Distributors/Reps Company Catalog Share Add To List
Sorters

Spartan™ - Brooks Automation, Inc.

The unified wafer management system gives the Spartan™ Sorter the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. The Spartan Sorter offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.

Product Home Contact/Sales Distributors/Reps Company Catalog Share Add To List

No companies were found.

Home
About eTesters
Manage Your Catalog
Contact Us
Privacy
Cookie
Site Map

© 2024 InstantKnowledge, LLC

We use cookies to optimize site functionality and give you the best possible experience.
To learn more including options for managing cookies, please check out our cookie policy.

Login to eTesters.com

Enter your email address and password to login.

Email address

Password

Keep me logged in

I forgot my password.

Logging in...

Share

Submit Support Request

Your Name:

Email:

Reason:

Your message:

Confirm

Alert

Object List