Brooks Automation, Inc.
Brooks Automation has been a leading automation provider and trusted partner to the global manufacturing industry. We deliver value through our understanding of the application challenge, providing solutions at scale that create an automated advantage for our customers.
- +1-978-262-2400
- 15 Elizabeth Drive
Chelmsford, MA 01824
United States of America
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Product
Semiconductor Automation
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Brooks' years of experience providing application-specific solutions backed by unparalleled technology leadership, industry expertise.
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Product
Sorters
Spartan™
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The unified wafer management system gives the Spartan™ Sorter the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. The Spartan Sorter offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.
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Product
Reticle Handling
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A reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
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Product
PuroMaxx Contamination Control
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Brooks offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes.
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Product
GuardianPro Clean Storage
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The GuardianPro™ family of semi bare reticle stockers, with Tec-Cell® Technology pod stockers, provides ultra-clean highly reliable storage and inspection solutions to meet the current and future needs of fabs around the world. GuardianPro reticle stockers deliver technical advantage by ensuring reticle safety, reducing haze, and providing automation solutions to improve reticle logistics and optimize stepper utilization.
