Electron Microscopes

Have you ever operated a high resolution electron microscope near an elevator or in the vicinity of cables carrying high AC currents? Then you probably know what magnetic noise is! The magnetic field compensation system MR-3 is a proven solution of problems related with magnetic field noise in the frequency range from DC to ~1000 Hz.  ...more

The all new LIBRA range of Energy Filtering Transmission Electron Microscopes (EFTEM) combine state of the art electron optics with unique Koehler illumination, OMEGA In-column energy filtering, extremely stable digital electronics and genuine ease of operation through the WinTEM graphical user interface (GUI). ...more

Modular reflected light microscope systems for 6 inch wafer inspection and materials science applications. These microscopes provide superb performance when inspecting semiconductors, flat panel displays, packages, electronics substrates, materials, medical devices, and a variety of other samples. ...more

The EVO series SEM has evolved to provide users in Materials Analysis and Life Science with microscopes designed to match their needs. Both microscopes series share some key features. Class leading x-ray geometry. Class leading secondary electron imaging in variable pressure. High brightness LaB6 source option. Clean pumping technology with fas ...more

Fast & Easy Scanning Electron Microscopes. Go from 20x to 30,000x in seconds. ...more

The Handi-Scope combines a digital movie camera, precision optics and LED lighting in a microscope that fits in the palm of your hand. Two magnification settings (40X and 140X) lets you zoom in on the fine details of insects, textiles, electronics or anything else too small to see. Place the HandiScope over the object, and comfortably view the ...more

High-resolution electron microscopes (SEM/TEM) and focused ion beam systems (FIB) are sensitive to environmental stray fields. Passive µ-metal shielding is ineffective and restricts the accessibility to control elements of the column. ...more

The scanning electron microscope is used to analyze the surface of specimens over a wide range of magnifications. ...more

The Model 1030 is ideal for making high resolution structural and floor vibration measurements for sensitive equipment such as electron microscopes, micro-lithography for semiconductor fabrication, micro-machining and more. It includes a removable 1/4-28 mounting stud.  ...more

The Analytical SEM for Studying Large, Heavy & Tall Samples. Large sample up to 300mm in diameter. Observable area up to 203mm in diameter. Observation and EDS analysis on a sample up to 110mm tall. Versatile port layout for various analytical applications. ...more

In spite of semi-in-lens SEM, in-lens SEM equivalent specification has been realized. Observation for standard 6inch or maximum 8inch (Option) wafer. Wider non-destructive observation. Image observation for various purposes is performed by the super ExB that is selectable information switch for signals from one detector. Ultra low acceleration volt ...more

The S-4300 offers excellent resolution capabilities of 1.5nm at 15kV and an impressive 5.0nm at just 1 kV. The S-4300 also features an integral image management processing & archiving system, which allows up to 40 thumbnail images to be displayed simultaneously. ...more

Model SU-70 is a new concept SEM incorporating field proven Hitachi’s semi-in-lens technology for ultra high resolution, and Schottky electron gun. It features not only ultra high resolution (1.0 nm/15kV, 1.6nm*/1 kV), but also observation of charge-up reduced image, compositional contrast image, ultra-low accelerating voltage image*, benefiting fr ...more

Compact & High-performance 20 % Reduction in Footprint Compared to the Current Model. VP Mode Standard. SE 3.0 nm Resolution at 30 kV, BSE 4.0 nm (6 Pa) Guaranteed. Accommodates Samples up to 152 mm (diameter) and 60 mm (height). Provides for Two EDX Symmetrical Ports. ...more

Response Dynamics provides a broad range of vibration and acoustical engineering consulting services to the semiconductor industry, the biotech industry and other high tech industries worldwide since 1984. We solve problems ranging from the nanometer level vibration issues on scanning electron microscopes, interferometers, and atomic force microsc ...more

Like no other SEM in the world... The world's highest resolution 0.4nm at 30kV. Hitachi's unique variable super ExB signal mode allows operator to optimize secondary and backscatter signal content of the image. New BF/DF Duo-STEM detector allows simultaneous display of BF and DF images. Variable detection angle in DF STEM mode(option). ...more

A yet more user-friendly SEM through newly developed electron optics and Automatic functions. Revolutionary automatic axis-alignment functions. (Auto Beam Setting, Auto Axial Alignment, etc.). Even better resolution of 10nm at 3kV. ...more

The S-4300SE/N brings the resolution capabilities of the high brightness field-emission electron gun to variable pressure scanning electron microscopy. The wide operating pressure range of 10 - 1000 Pa allows examination of an even wider range of wet, oily or nonconductive samples. ...more

This versatile microscope with a thermal FE source has been designed for applications in the semiconductor industry, materials and biological sciences where excellent beam stability, and high resolution are essential. ...more

Combination of high reputation Hitachi cold field emission electron source and 300 kV accelerating voltage realizes both ultrahigh resolution imaging and high sensitivity analysis. Double bi-prism holography, spatially resolved EELS and high precision parallel nanobeam electron beam diffraction open a new avenue for efficient and high precision mat ...more

Spellman's EBM High Voltage Triode Module designed for driving E-Beam Columns in Scanning Electron Microscopes, provides the required acceleration, ...more

Applications Identify Leaky Junctions Contact spiking Hot electron effects CMOS latch-up Oxide leakage Polysilicon filaments Silicon mechanical and ESD damage ...more

Chemical analysis is to determine the amounts of each element in the substance by instruments or sensors. Methods are classified into two major groups, Classical (chemical or wet), which are based on chemical rxns, for example gravimetric (isolate and weight), and Instrumental (complex equipment including sensors). Instrumental Equipment inclu ...more

FabFloor is a new concept for equipment pedestals and semiconductor machinery tool stands. Highly rigid honeycomb panels are used to support precision equipment such as lithography steppers, scanning electron microscopes and profilometry inspection machines. ...more

Physical Testing is to determine physical properties of materials. Such properties include density (weight per unit volume of material), specific gravity (ratio of weight of a given volume of a certain material to that of the same volume of water at stated temperature), water absorption (moisture content may result in changes in dimensions or ...more