Ozone
Trioxygen
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Product
Ozone Generators & Systems
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MKS offers a wide range of ozone generators and modular delivery systems which produce ultra-pure, reliable ozone gas. In the clean semiconductor environment, Ozone reacts with a wide range of precursor gases resulting in the creation of Al2O3, ZrO2, HfO2, and La2O3 metal oxides to enable thin film deposition processes like Atomic Layer Deposition (ALD) and Etch (ALE). MKS’ generator uses Grade 6 gas, enabling the creation of higher film density improving product yield. Photovoltaic and Display manufacturing leverage semiconductor best practices and utilize ozone to create enhanced thin film barriers, improving product performance and reliability.
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Product
Ozone Analyzer
AQMS-300
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Concentration in ppb level by utilizing UV photometric absorption technology.
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Product
Photometric Ozone Calibrator
Model T703
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Teledyne Advanced Pollution Instrumentation
The Model T703 is a microprocessor controlled ozone calibrator for precision gas analyzers. The Model T703 can deliver concentrations from 50 ppb to 5 ppm at flows from 1 LPM to 5 LPM.The Model T703 has two major components; the ozone generating device and the photometer. The ozone generator produces ozone by passing zero air over a UV lamp. Flow rate and lamp intensity are adjusted to deliver a specified ozone concentration by volume. The temperate and pressure compensated photometer, identical to that of the Model T400 ozone analyzer, provides feedback control of the UV lamp intensity, assuring stable ozone output. A nearly unlimited number of calibration sequences may be programmed into the non-volatile memory of the T703, covering time periods up to a year.
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Product
Stand-alone Ozone Delivery System For Advanced Processes
SEMOZON® AX8585
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SEMOZON® AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high flow, high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry. Each SEMOZON AX8585 is a fully integrated, high output ozone gas delivery system intended for use in an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.
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Product
Ozone Concentration Tester
OCT-3 PRO
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Do you want to know if you can safely share a room with clients that has just been ozonated? Or maybe you want to compare the efficiency of ozonators? The OCT-3 PRO tester is the solution for you.
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Product
Waterproof Ozone Tester
ORPTestr 10
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Large Display Screen - dual display LCD for enhanced readability, provides comprehensive meter information
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Product
Ozone Aging Test Chamber
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Sanwood Environmental Chambers Co ., Ltd.
Sanwood , a 23 years of professional Ozone aging Chamber,Ozone aging Test Chamber, Ozone resistance test chamber, Ozone chamber,Ozone test chamber, manufacturersOzone Aging Test Chamber simulates and enhance the condition of ozone in the atmosphere to study the effects of ozone on rubber, and then identify and evaluate the method to resist ozone and aging for rubber, adopt effective anti-aging measures to enhance the life of rubber products.
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Product
Ozone Climatic Test Chamber
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The Ozone Test Chamber provide an effective solution to the testing of products for resistance against ozone degradation in a controlled environment. These test chambers function as static tensile test chambers as well as Rubber Test Chamber and are often used for studying static tensile deformation of various manufactured goods in the presence of ozone. The equipment works by exposing the test samples to uniform concentrations of ozone at constant temperatures and relative humidity in a sealed air environment. Under these conditions, the products undergo the process of corrosion which can be observed in the form of surface cracks and changes in other properties.
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Product
Multi-Channel Ozone Delivery System With In-rack Chiller
SEMOZON® AX8575
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The SEMOZON® AX8575 is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations.
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Product
Automatic Ozone Test Chamber
EKT-2001OZ
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (O3) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Process Ozone Instruments
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Teledyne Advanced Pollution Instrumentation
All of our instruments are designed meet the rigorous demands of ambient air quality, stack, or industrial process gas monitoring. Below is a list of a range of Teledyne API process ozone instruments.
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Product
Fully Integrated Modular Ozone Delivery System
SEMOZON® AX8580
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The SEMOZON® AX8580 Ozone Delivery System generates and delivers high flow, high concentration, ultra-clean ozone for advanced thin film applications. The SEMOZON AX8580 is specifically designed for use with an increasing number of semiconductor process applications such as ALD, CVD and TEOS/Ozone CVD.
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Product
Process Ozone Monitor
Model 465M
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Teledyne Advanced Pollution Instrumentation
The Model 465M is a microprocessor based medium range ozone monitor for measuring process ozone concentrations in water treatment, food processing, and research applications. The design has been specifically optimized for applications requiring the measurement of ozone at near-ambient pressure such as water treatment contactor off-gas measurement. The Model 465M has been designed to give accurate and stable readings over long time periods with little or no maintenance or calibration. The Model 465M is available in a NEMA 4X wall mount enclosure.
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Product
Dissolved Ozone Monitor
HZ-960
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High precision, wide-range dissolved ozone monitor. The repeatability: F.S. +/- 0.2%. Can select the 4 types of measurement range in-line detectors.
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Product
Broadband Xe Light Source
PowerArc
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75W Xe Ozone free light source for UV-Visible-NIR applicationsThe PowerArc™ is a complete, integrated light source that includes power supply, starter, high efficiency collection optics and lamp housing in one compact package.
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Product
Chemitec Sensors And Analyzers To Monitor Oxidants In Water
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Chemitec's S494 series of amperometric probes provide continuous, accurate monitoring of chlorine and other oxidants in clean water applications. A range of sensors assures accurate measurement of oxidation, with sensors optimized for Chlorine (total, organic or inorganic), Chlorine Dioxide, Ozone, Peracetic Acid, Hydrogen Peroxide, Bromine, or Chlorites.
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Product
Laboratory Ozone Test Chamber
CX-150
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Shenzhen Chuangxin Instruments Co., Ltd.
Laboratory Ozone Test chamber is widely used to control products quality in measuring quality control; Rubber & Plastics; automobile production; wire and cable; packing materials; instruments and meters; medical equipment; civilian nuclear energy; civil aviation; colleges and universities; research laboratories; inspection arbitration, and technical supervision departments and other rubber products.
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Product
Ozone Test Chamber
EKT-2001OZ-HCSSX
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Ozone Test Chamber
EKT-2001OZ-HCLSX
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Ozone Test Chambers
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Labodam Ozone Test Chambers are designed to detect the concentration of ozone while requiring low maintenance, having well-built corrosion resistant bodies, and while utilizing noiseless generators.
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Product
Single/Multi-Channel Industrial Safety Ozone Monitor
Model 465L
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Teledyne Advanced Pollution Instrumentation
The Model 465L UV Photometric Ozone Monitor is an extremely stable analyzer, ideal for critical low-level ppm safety and process applications. Its calibration is NIST traceable and the included pressure and temperature compensation ensure high accuracy under all conditions.
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Product
Dissolved Ozone Instruments
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Teledyne Advanced Pollution Instrumentation
For measuring dissolved ozone concentrations in water a microprocessor controlled instrument can be used for automatic and continuous measurement by means of an disinfectant sensor. All of our instruments are designed meet the rigorous demands of ambient air quality, stack, or industrial process gas monitoring.
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Product
Dissolved Ozone Analyzer
Model 470
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Teledyne Advanced Pollution Instrumentation
The Model 470 is a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in deionized water or sulfuric baths with concentrations up to 150 mg/L. The Model 470 is “clean-ready” for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM.
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Product
Chemiluminescence 03 Analyzer
Model T265
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Teledyne Advanced Pollution Instrumentation
The Model T265 is the only commercially available US EPA Federal Reference Method for Ambient Ozone Monitoring according to the latest US EPA regulatory rules for O3. The instrument uses Chemilumescence with Nitric Oxide (NO) as a reagent, making is safe, stable, and effective for all applications. The NO-CL method for Ozone has several advantages over the conventional UV absorption technology, including the avoidance of positive and commonly found interferrents such as VOCs, fine particulates, Mercury, turpines, ClO2, and others. If these pollutants are present in the atmosphere, it can cause UV absorption analyzers to give an artificially high Ozone measurement. The innovative T265 combines speed of response, sensitivity and stability of our proven nitrogen oxide analyzer, with a simple user interface, to provide reliable ozone measurements under the harshest conditions.
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Product
Ozone Test Chamber
EKT-2001OZ-HCSLT
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Ozone Test Chamber
EKT-2001OZ-HCSTX
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Portable Trace-Level O3 Calibrator
Model T753U
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Teledyne Advanced Pollution Instrumentation
The Model T753U is a portable, microprocessor based precision Calibrator for Ozone gas instruments and sensors. Using a sophisticated Ozone generation system, combined with a sensitive photometer and pneumatic design, the T753U produces stable and reliable concentrations of Ozone in a convenient and rugged package based on our popular T750U Portable Multigas Calibrator platform. The T753U is housed in a high-density, molded travel case which includes an integral handle and wheels for durability and ease of use in the field for virtually any application. An internal zero air option extends the T753U's capabilities to also provide a clean and dry source of zero air, eliminating the need for a separate source of zero air. The internal zero air source module contains a software driven electronic inlet valve manifold allowing the calibrator to automatically switch between internal and external zero air sources depending on the application needs.
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Product
Gas Measuring Instruments
N Series
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Teledyne Advanced Pollution Instrumentation
N Series Gas Measuring Units for SO2 (Sulfur Dioxide), NO, NO2, NOX (Nitrogen Oxide, Nitrogen Dioxide), CO (Carbon Monoxide), CO2 (Carbon Dioxide), O3 (Ozone), True, Direct NO2, NOX, NO, CH4 (Methane), THC (Total Hydrocarbons), and more
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Product
Process Ozone Monitor
Model 465H
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Teledyne Advanced Pollution Instrumentation
The Model 465H is a microprocessor based high concentration ozone monitor for measuring ozone in process gas streams in water treatment, food processing, and research applications. The 465H has been designed to give accurate and stable readings over long time periods with little or no maintenance or calibration. The Model 465H is available in a NEMA 4X wall mount enclosure.
