SLM
detect, measure, and monitor power or the intensity of a signal.
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Paragon® 8.0 Slm NF3 Flow Intelligent Remote Plasma Source
For cleaning CVD and ALD/ALE process chambers, the Paragon remote plasma source is designed for high gas dissociation rates (> 98%) of NF3 with gas flows up to 8 slm and pressures up to 10 Torr. This leading-edge performance translates into increased process throughput and repeatable process results. The Paragon design incorporates a proprietary plasma block design with a Plasma Electrolytic Oxidation coating for low particle, long block life that delivers lower cost of ownership.
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Digital "A" Flow Controller for Low Flow
HFM-D-300A / HFC-D-302A
All Metal, Fast Response, Tight Accuracy!Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements.HFM-D-300A / HFC-D-302A mass flow instruments have flow ranges from 0-5 sccm to 0-25 slm; use all metal seals, provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
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Fluorescence Spectroscopy
HORIBA’s Fluorescence division incorporates technology from SPEX, IBH, Jobin-Yvon, PTI and SLM - the dominant names in Fluorescence Spectroscopy. We offer the widest range of Steady State Fluorescence spectrometers, Fluorescence Lifetime spectrometers, Steady State and Lifetime Multi instruments and Microscope-based Microscopy solutions.
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Digital "A" Flow Controller for High Flow
HFM-D-306A / HFC-D-308A
Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements.HFM-D-306A/HFC-D-308A mass flow instruments have flow ranges from 0-2500 slm to 0-10000 slm; provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available. Available with a variety of elastomer seals for maximum flexibility.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
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Sound Level Meter
AWA5688
Hangzhou Aihua Instruments Co., Ltd.
* A handhold noise measuring instrument*. Multifunction and user- friendly sound level meter(sound level meter, integrating SLM, 1/1 OCT, 1/3 OCT analyzer, FFT analyzer, Noise dosimeter)* 240×320 color screen* Measurement range up to 133dB* Synchronously do integrating measure, statistical, real-time 1/1 OCT, 1/3 OCT, FFT analysis and noise dosimeter measure* Comply with IEC 61672 Class 2 and IEC61260 Class 2 and IEC 61252
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Mass Flow Controller for Medium Flow
HFM-205 / HFC-207
The HFM-205/HFC-207, Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers accurately measure and control mass flow in a variety of applications. Featuring reliability and stability, the 200 Series is chosen for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.The HFM-205 / HFC-207 meters and controllers have flow ranges from 0-1000 slm to flows of 0-2500 slm; provide analog outputs, are constructed of stainless steel and can be configured with normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a full complement of fitting and elastomer options, the HFM-205/ HFC-207 covers a wide range of high flow applications.
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Digital "A" Flow Controller for Medium Flow
HFM-D-305A / HFC-D-307A
Fast Response, Tight Accuracy!Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements.HFM-D-305A/HFC-D-307A mass flow instruments have flow ranges from 0-1000 slm to 0-2500 slm; provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available. Available with a variety of elastomer seals for maximum flexibility.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
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Digital Mass Flow Controller
SEC-N100 Series
The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100 Series also has various types of communications available i.e. digital/analog, DeviceNet™, CC-Link®, PROFIBUS™, and EtherCAT®. The SEC-N100 Series offers high accuracy (+/- 1.0% S.P. *1) and high-speed response. This mass flow controller also has multi-gas/multi-range function emphasizing its' cost reduction capabilities in your process.
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Mass Flow Controller for Medium Flow
HFM-201 / HFC-203
The HFM-201/HFC-203, Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers accurately measure and control mass flow in a variety of applications. Featuring reliability and stability, the 200 Series is chosen for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.The HFM-201 / HFC-203 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and can be configured with normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Many corrosive gases and pressures up to 1000 psig are easily measured. Cleaning for oxygen service is available.
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Fast Response Flow Controller for Medium Flow
HFM-305 / HFC-307
The HFM-305/HFC-307 is Teledyne Hastings' fast response series of mass flow meters and controllers. Featuring reliability and stability, the 300 Series is chosen for its fast response under a wide range of conditions.The HFM-305 / HFC-307 meters and controllers have flow ranges from 0-1000 slm to flows of 0-2500 slm; provide analog outputs, are constructed of stainless steel and can be configured to have either normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a choice of elastomers and high pressure options, the HFM-305 / HFC-307 services a wide variety of applications. Cleaning for oxygen service is available.
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Mobile sound Level Meter
SoundMeter
SoundMeter turns your iOS device into a handheld sound level meter (SLM) with support for exponential-time-weighted sound level (Lp) and equivalent sound level (Leq) measurements with various time and frequency weightings. The built-in signal generator tool can be used for generating calibration test tones, noise, chirps, or other periodic signals. SoundMeter also offers additional tools via in-app purchase, including a Noise Dosimeter and a whole or 1/3-octave real-time analyzer.
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Cable Expert
AT/CX/CM Series
The VeEX® AT/CX/CM series are next generation test solutions designed for analog and digital cable TV networks supporting VoIP, WiFi, and Internet service. Analog and Digital SLM, ingress noise sweep, deep interleave support, and QAM constellation analysis are among many standard features. Enhanced optional features include QAM16/64/128 Upstream Generation (USG), Reverse Path QAM Analysis, and DOCSIS 2.0/DOCSIS 3.0 Cable Modem emulation. A high capacity LiIon battery pack provides extended autonomy for a full day use with only a single charge.
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R*evolution® Remote Plasma Source
The innovative R*evolution® Remote Plasma Source combines field-proven, low-field toroidal plasma technology with an actively cooled plasma chamber made of high purity quartz, significantly reducing oxygen, hydrogen and nitrogen atomic gas loss through wall recombination. Self-contained and compact, R*evolution delivers up to 10 slm of oxygen radicals from a 6kW power supply with true power accuracy of <1% resulting in a high density, extremely clean radical source for photoresist strip and an optimal clean rate greater than 12 microns/min-1. R*evolution can be used for other surface preparation applications.
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Fast Response Flow Controller for Low Flow
HFM-300 / HFC-302
The all metal HFM-300/HFC-302 is Teledyne Hastings' metal sealed, fast response series of mass flow meters and controllers. Featuring reliability and stability, the 300 Series is chosen by OEM's for its fast response under a wide range of conditions.The HFM-300 / HFC-302 meters and controllers have flow ranges from 0-5 sccm to flows of 0-25 slm; provide analog outputs, are constructed of stainless steel and have normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Corrosive gases and pressures up to 1000 psig are easily measured. Cleaning for oxygen service is available.
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Spatial Light Modulators
Spatial Light Modulators (SLM) are used as adaptive optical elements that modulates light spatially in amplitude or phase. We offer devices that are based on either reflective (LCOS) or translucent (LCD) liquid crystal microdisplays.
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Digital "A" Flow Controller for Medium Flow
HFM-D-301A / HFC-D-303A
Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements.HFM-D-301A/HFC-D-303A mass flow instruments have flow ranges from 0-25 slm to 0-1000 slm; provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available. Available with a variety of elastomer seals for maximum flexibility.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
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High Flow Mass Flow Controllers
High flow thermal mass flow controllers and meters offer both elastomer and metal seals for flow rates up to 300 slm. Versions are available for standard and harsh environments where protection from water and dust is required.
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Mass Flow Controller
SEC-E Series
This general purpose mass flow controller has a reliable thermal sensor and solenoid valve, allowing you to achieve high-level control of gas flow. A versatile component, the mass flow controller sec-e series can be used in a wide range of industries.Gas flow through the mass flow controller can be controlled over a range of flows: from 10 SCCM to 200 SLM.
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Digital "A" Flow Controller for Low Flow
HFM-D-300A / HFC-D-302A
HFM-D-300A / HFC-D-302A mass flow instruments have flow ranges from 0-5 sccm to 0-25 slm; use all metal seals, provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
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product
Mass Flow Controller for Medium Flow
HFM-201 / HFC-203
The HFM-201/HFC-203, Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers accurately measure and control mass flow in a variety of applications. Featuring reliability and stability, the 200 Series is chosen for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.The HFM-201 / HFC-203 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and can be configured with normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Many corrosive gases and pressures up to 1000 psig are easily measured. Cleaning for oxygen service is available.
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Fast Response Flow Controller for Low Flow
HFM-300 / HFC-302
The all metal HFM-300/HFC-302 is Teledyne Hastings' metal sealed, fast response series of mass flow meters and controllers. Featuring reliability and stability, the 300 Series is chosen by OEM's for its fast response under a wide range of conditions. .The HFM-300 / HFC-302 meters and controllers have flow ranges from 0-5 sccm to flows of 0-25 slm; provide analog outputs, are constructed of stainless steel and have normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Corrosive gases and pressures up to 1000 psig are easily measured. Cleaning for oxygen service is available.
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Diode Pumped Actively Q-switched Lasers
NL120 Series
NL120 series electro-optically Q-switched nanosecond Nd:YAG lasers provide up to 10 J per pulse with excellent stability. The innovative, diode‑pumped, self‑seeded master oscillator design results in Single Longitudinal Mode (SLM) output without the use of expensive narrow linewidth seed diodes and cavity‑locking electronics.
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Test Solutions
AT/CX/CM Series
The VeEX AT/CX/CM series are next generation test solutions designed for analog and digital cable TV networks supporting VoIP, WiFi, and Internet service. Analog and Digital SLM, ingress noise sweep, deep interleave support, and QAM constellation analysis are among many standard features. Enhanced optional features include QAM16/64/128 Upstream Generation (USG), Reverse Path QAM Analysis, and DOCSIS 2.0/DOCSIS 3.0 Cable Modem emulation. A high capacity LiIon battery pack provides extended autonomy for a full day use with only a single charge.
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product
Fast Response Flow Controller for Medium Flow
HFM-301 / HFC-303
The HFM-301 / HFC-303 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and have normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a choice of elastomers and high pressure options, the HFM-301 / HFC-303 services a wide variety of applications. Cleaning for oxygen service is available.
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Compact Baking System
LSC series
HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit.
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Fast Response Flow Controller for Medium Flow
HFM-305 / HFC-307
The HFM-305/HFC-307 is Teledyne Hastings' fast response series of mass flow meters and controllers. Featuring reliability and stability, the 300 Series is chosen for its fast response under a wide range of conditions. .The HFM-305 / HFC-307 meters and controllers have flow ranges from 0-1000 slm to flows of 0-2500 slm; provide analog outputs, are constructed of stainless steel and can be configured to have either normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a choice of elastomers and high pressure options, the HFM-305 / HFC-307 services a wide variety of applications. Cleaning for oxygen service is available.
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product
Digital "A" Flow Controller for Medium Flow
HFM-D-301A / HFC-D-303A
Mass flow techniques provide reliable, repeatable and accurate gas flow rate measurements.HFM-D-301A/HFC-D-303A mass flow instruments have flow ranges from 0-25 slm to 0-1000 slm; provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available. Available with a variety of elastomer seals for maximum flexibility.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
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Color Screen Sound Level Meter
AWA6228+
Hangzhou Aihua Instruments Co., Ltd.
* A handhold noise measuring instrument* Multifunction and user- friendly sound level meter(sound level meter, integrating SLM, 1/1 OCT, 1/3 OCT analyzer, FFT analyzer, Noise dosimeter)* 240×320 color screen* Measurement range up to 142dB* Synchronously do integrating measure, statistical, real-time 1/1 OCT, 1/3 OCT, FFT analysis and noise dosimeter measure* Comply with IEC 61672 Class 1 and IEC61260 Class 1 and IEC 61252
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product
Mass Flow Controller for Medium Flow
HFM-205 / HFC-207
The HFM-205/HFC-207, Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers accurately measure and control mass flow in a variety of applications. Featuring reliability and stability, the 200 Series is chosen for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.The HFM-205 / HFC-207 meters and controllers have flow ranges from 0-1000 slm to flows of 0-2500 slm; provide analog outputs, are constructed of stainless steel and can be configured with normally open or normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a full complement of fitting and elastomer options, the HFM-205/ HFC-207 covers a wide range of high flow applications.
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product
Digital "A" Flow Controller for High Flow
HFM-D-306A / HFC-D-308A
Mass flow techniques provide reliable, repeatable and accurate gas flow rate measurements.HFM-D-306A/HFC-D-308A mass flow instruments have flow ranges from 0-2500 slm to 0-10000 slm; provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available. Available with a variety of elastomer seals for maximum flexibility.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
