Probe Stations
system to contact DUTs to drive and receive signals.
See Also: Probe Systems, Flying Probes, Manual Probe Stations, Cryogenic Probe Systems
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Probe Stations
PSI's 600LS Series Probe Station is designed to exceed performance metrics of equipment priced significantly higher.
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Semi-Automated Probe Stations
SPS 2600, SPS 2800, and SPS 12000 Series
The SPS 2600, SPS 2800, and SPS 12000 Series systems are MicroXact’s semi-automated probe stations designed to be flexible and easy to use when performing high productivity device characterization, wafer level reliability testing and failure analysis. These semi-automatic probe station systems are designed to support manual and semi-automatic probing of up to 200mm wafers.
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Probe Cards
PICOPROBE® PROBE CARDS by GGB Industries, Inc., allows for more chip design flexibility because each probe card is custom configured to your circuit for testing wafers on either manual or automatic probe stations. Probe cards with complex layouts consisting of numerous DC contacts and multiple microwave probes with operating frequencies of 40, 50, 67, or 110 GHz can be custom fabricated quickly and inexpensively.
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Optoelectronics and Photonics
SemiProbe has developed probe stations for a wide variety of optoelectronic and photonic device applications, including light emitting diodes (LEDs), vertical cavity surface emitting lasers (VCSEL) and photo diodes. Testing and handling small, fragile, thin wafers with thousands of die on them poses unique challenges that require innovative solutions.
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Microscope Spectrophotometer
508 PV
The 508 PV™ Microscope Spectrophotometer is designed to add spectroscopy, color imaging, thin film thickness measurement and colorimetry capabilities to your optical microscope or probe station. It can also be used to upgrade an older microspectrometer with cutting edge optics, electronics and software.
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Probe Station
ETCP1000
Installation of “Hot and cool chuck” - Sellectable chuck size : 4inch, 6inch. - Temperature variation : -193°C ~ 300°C (80K ~ 573K) - Additional requirements : Vacuum chamber, LN2 tank(Bombei), microscope, CCD camera, manipulators. - EPS500 is standard model in ETCP1000 probe station.
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Cryogenic Probe Station
FWPX
Lake Shore’s FWPX probe station is designed for researchers who require large-size wafer probing. The FWPX accommodates wafers up to 102 mm (4 in) in diameter and can be modified to accept up to 152 mm (6 in) wafers. This general-purpose probe station is designed for researchers or engineers conducting material characterization tests over large samples. It is also an effective unit for measuring organic materials.
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Line Automation Equipment
5000 Series In-line Handler
The Circuit Check 5000 Series In-line Handler is an integrated inline solution that combines automation, fixturing and measurement hardware in addition to other in-line PCBA probe based test stations, while adding a standardized quick change fixture interface. The 5000 series in-line is a unified solution that is software and hardware agnostic, enabling adaptability to a variety of off-the-shelf lower cost ICT, flash and functional test software and hardware.
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Cryogenic Probe Station
CRX-4K
Designed for versatility and high performance, the CRX-4K is our premium cryogen-free closed-cycle refrigerant probe station. This system is the solution for those looking for the convenience of cryogen-free operation and the exceptional measurement performance of a Lake Shore product.
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Probing Solutions
ES62X-CMPS
The ES62X-CMPS compact manual probe station is a rugged wafer probing solution designed for high reliability, compact size and low investment cost. It enables manual wafer level measurements up to 300 mm wafers. The probing station can also be used for TLP, HMM, HBM, LV-Surge, RF, S-parameter and DC-measurements. Micro positioners with vacuum as well as magnetic base can be attached. The chuck has a vacuum interface for the wafer and is electrically isolated. Multiple 4 mm connectors can be used to connect a voltage potential to the wafer backside.
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Analytical Probe Station with Laser Cutting System
LCS- 4000 Series
The LCS-4000 Probe Station with Integrated Laser Cutting System gives the user maximum flexibility in semiconductor diagnostic cutting, failure analysis, trimming, marking and topside layer removal. All of these functions can be performed on a microscopic level, all on this one system which provides a high level of performance that is remarkably easy to use.
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MmW Probe Station
EB-6V
The EB-6V probe station is designed for all frequency extenders such as those from VDI, OML, R&S, Keysight, Anritsu. If you are using an Anritsu VNA VectorStar ME7838A4 model, or commonly Anritsu 3743A mmW Extenders and related sizes, the station of interest is the EB-6A.
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C-V Plotters
Materials Development Corporation
MDC will tailor your CSM/Win Semiconductor Measurement System for your exact requirements. Choose the best capacitance meter, output device, and probe station for your needs. All CSM/Win C-V plotters feature the latest Dell Computers. The computer and capacitance meters are rackmounted in one compact enclosure. When ordered with a hot chuck or probe station, MDC can deliver a turnkey system of unparalleled performance.
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Probe Card
T90™ Series
The 90 mm tile was designed for mounting on a standard 4.5″ probe card holder for multi-site wafer level reliability testing. The 1.6 mm (0.062″) thick rails allow the chassis to slip into planarity adjustable probe card holders for most analytical probe stations.
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Probe Station
DARK BOX
Size : 750 × 660 × 660 mm - Material : Steel - We can provide various dark box in size and shape at reasonable price as per customer requirements.And we also provide “integral sphere” with probe station as below.
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Controlled Environment Probe Station
CG-196
Everbeing controlled environment probe station allows vacuum and cryogenic probing down to 77K with liquid nitrogen or high temperature probing up to 1273K. Efficient in characterizing your devices at extreme temperatures, vacuum, specific gas, etc.
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Cryogenic Probe Station
TTPX
The TTPX probe station is an affordable, entry-level probe station capable of making a wide variety of non-destructive, standard electrical device measurements. The compact tabletop design is perfect for academic and laboratory research settings. The TTPX provides efficient cryogenic temperature operation and control with a continuous refrigeration system using either liquid helium or liquid nitrogen.
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Probe Station
EPS300
Reasonable price and compact design. - Sellectable chuck size : 4inch, 6inch, 8inch when ordering probe station. - Hot chuck can be installed. Temp range: RT ~ 300°C - Hot and cool chuck from 0 °C ~ 300 °C can be provided.
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Standard Probe Station Chucks & Accessories
In this test solutions section of our website we describe the expanding line of Abet PV IV probe stations for the growing variety of solar cell types and sizes being developed around the world. This page describes a line of vacuum chucks and accessories for top/bottom, top/top, and bottom/bottom solar cells from 3 x 3 mm to 300 x 300 mm. Probe stations for multiple device on a single substrate and multifunction probe stations are described further in the sections highlighted to the left of this page.
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Fully Manual Systems
SPS-1000, SPS-2000, and SPS-2200
The SPS-1000, SPS-2000, and SPS-2200 systems are MicroXact’s premier manual probe stations designed to be flexible and easy to use. The high level of performance and affordability of these manual probe systems put them in a class of their own.
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Recirculating Chillers
Recirculating chillers from Lake Shore offer high performance for improved cooling capacity for your Hall measurement system, VSM, probe station, or electromagnet application.
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Flying Probe Programming & Test Development
Testing House offers full Flying Probe Programming and Test Development using its very own Seica Pilot LX Flying Probe Test Stations.
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Electrical Probe Systems
INSTEC's Probe Systems offer an integrated solution for performing component-level electrical measurements over a wide temperature range.Compact Mini Probe Stages enable an existing inspection microscope or optical test setup to be converted easily into a precision temperature-controlled semiconductor testing and qualification station.Analytical probe stations are fully featured industry-standard platforms for all modern probing applications and testing.Benchtop Probe Stations provide the user with four independent electrical probes with X,Y,Z micropositioning for precise placement without opening the sample chamber.Highly configurable probe systems meet a range of requirements for atmospheric and temperature control, sample areas, and electrical measurements.
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Custom solutions
Novacam develops custom interferometric solutions to address particular inspection and imaging needs of specialized applications and OEM markets. Our modular interferometer components offer a superior and cost-effective platform for developing high-performance systems and assemblies. We will collaborate with your application experts to devise the optimal combination of inteferometric (OCT) hardware, non-contact fiber-based sensor probes, and system software.As needed, Novacam engineers: develop customized optical probes and inspection stations develop inline probe fixtures for production environments adapt Novacam standard interferometer component modules to suit your application help integrate Novacam systems or components with third-party tools write customized software
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Portable Wafer Probe Station
PS-5026B
High Power Pulse Instruments GmbH
The PS-5026B is a rugged portable wafer probing solution which has been designed for high reliability, compact size and minimum cost.
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Probe Station
EPS1000
Reasonable price and compact design. - Sellectable chuck size : 4inch, 6inch, 8inch when ordering probe station. - Hot chuck can be installed. Temp range: RT ~ 300°C - Hot and cool chuck from 0 °C ~ 300 °C can be provided. - Maximum pcs of manipulators can be installed on the base unit of probe
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CC-TLP Probe
CC-TLP-50-A1
High Power Pulse Instruments GmbH
*Capacitively coupled TLP probearm (CC-TLP) compatible with standard probing stations*18 GHz SMA connector*Tilt angle adjustment*Calibration gauge for needle height
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Mini Probe Station
C-2
The smallest probe station which still preserves the key functions and precision that are fundamental to all probing. This size is still capable of DC and RF measurements, making it the most versatile in its size.
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Powerful, Fully Integrated Workstation for Emission Microscopy
PEM-1000
The PEM-1000 emission microscope incorporates the latest technology in real time, high quantum efficiency, mega-pixel CCD detectors in a back-thinned cooled camera. A portable system, the PEM 1000 can interface with all analytical probe stations, ATE (automated test equipment) and bench top configurations for high speed functional testing.
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Electro Optical Terahertz Pulse Reflectometry
EOTPR 3000
The EOTPR 3000 system is configured with a manual probe station to meet today’s tough FA environment which requires to isolate fault location in minutes rather than hours or days, while maintaining the EOTPR’s world leading sub-5 μm fault isolation accuracy.





























