Sheet Resistance
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Sheet Resistance Measurement
The Filmetrics® R54-series and R50-series sheet resistance measurement instruments have been developed based on over 45 years of KLA sheet resistance measurement innovation. The R50 measures metal layer thickness, sheet resistance and sheet conductance. The R54-series adds a light-tight enclosure, along with 300mm support, to provide metal thickness measurement solutions for semiconductor and compound semiconductor manufacturing.
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Sheet Resistance, leakage, and CV-IV measurements
Electrical Char
Full line of front end electrical characterization tools: Sheet Resistance, leakage, and CV-IV measurements.
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Non-contact Inline Sheet Resistance Measurement Module For Conductive Layer On Substrate
NC-700
*Inline measurement module for moving substrates such as PET film, glass or paper*Continuous measurement(~24h) in Roll to Roll with OFF-SET FREE capability system*Various applications from the research and development to the production line
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Non-Contact (Pulse-Voltage Excitation Method) Ultra-Low Sheet Resistance Measurement System
PVE-80
*No damage measurement by non-contact Pulse-Voltage excitation method*Easy to measure & carry around, Removable stage plate*Easy operation and data processing by PC with Software*Measurement result can shown by 3 types of measurement unit (Sheet resistance[Ohm/Sq], Electric conductivity[S/cm], Electrical conduction[S])*Pulse-Voltage excitation method : Pat. No.5386394 Joint development with Chiba Univ.
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Hand Held Probe Type Eddy Current Sheet Resistance/resistivity Measurement Instrument
EC-80P (Portable)
*Auto-measurement start by probe head contacting to sample*3 measurement modes for wafer resistivity, bulk resistivity and sheet resistance*Easy set up to measurement condition by JOG dial*5 types of model for each measuring range*Resistivity probe can be changed by sample’s resistivity range
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Fully Automatic Non-contact Sheet Resistance Measurement System For Flatpanel Display
NC-60F/RS-1300N
*Global standard for non-contact measurement of ITO film, Metal thin films on flat panel*Automatic X-Y and Z (eddy current probe head) axis moving mechanism*Compatible with Loading robot for fully automatic measurementOption :*Integlate to combined system (film thickness meter, etc)*Add 4 point probe measurement unit : RT-3000
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Wide Measurement Range Model Of Semi-automatic 4 Point Probe Sheet Resistance/resistivity Measurement
RT-3000/RG-2000 (RG-3000)
*User programable measurement pattern & programmable measuring pattern*Tester self-test function, wide measuring range*Thickness, edge, temperature correction for silicon wafer*Film thickness conversion function from sheet resistance*2 types measuring tester (S version: Standard type, H version: High range resistivity measurement type)
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Non-contact Sheet Resistance Multi-points Measurement System With Wide Range
NC-80MAP
*Possible to measure wide range of sheet resistance by installing Max. 4 probes*Min. 7 mm position from edge can be measured*User programable measurement pattern & programmable measuring pattern
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Semi-Automatic Probe Sheet Resistance/Resistivity Measurement
CRESBOX
• Multi-points measurement and Mapping display- 2-D map / 3-D map graphic display- Multipoint pattern measurement is programmed (maximum 1225 points) and random pattern is programmable by operator.• Film thickness conversion function from sheet resistance• Measurement data base link with Excel via CSV format file• Software language can be switched in English /Japanese by operator
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Global Standard Model For 4 Point Probe Sheet Resistance Automatic Measurement System
RT-3000/RG-1000F
*Fully automatic system for large sizes of flat panel with glass loading robot*Tester self-test function, Measurement position correction function, wide measurement range*Min. 0.1 mm meas. resolution and user programmable test pattern*Host (CIM) communication and 2-D/3-D Mapping software
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Non-contact Ultra-High Range Sheet Resistance Measurement System
CRN-100
*Ultra-High range sheet resistance measurement for 10E+9 ~ 10E+15 ohm/sq without contacting*Mapping program software;*1. Arranged in a multipoint pattern measurement is programmed*2. 2-D & 3-D mapping software*Easy operation by Windows 7 system software*Measurement data base link with Excel via CSV format file*Unaffected by contact resistance
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Hand Held Sheet Resistance Measurement Instrument[Replaceable Probe Set (Non-destructive Probe & Contact Probe) ]
DUORES
Easy to measure sheet resistance & carry aroundReplaceable hand-held probes for Non-destructive & Contact type
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4-Probe Resistivity and Resistance Tester
HS-MPRT-5
t used for measuring resistivity of silicon rods and wafers, and sheet resistance of diffused layers, epitaxial layers, LTO conductive films and conductive rubbers, etc.
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Non-contact Sheet Resistance /resistivity Measurement Instrument
EC-80
*Easy operation and compact design*Auto-measurement start by inserting a wafer under the probe*Easy set up to measurement condition by JOG dial*5 types of model for each measuring range
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20J3 SHEET RESISTANCE METER
Non-contact measurement of Ohms/sq, Ohms-cm, resistivity, thickness, and moreMeasures nearly all thin conductive materials or coatingsChoose a sensor in one of four ranges, from .005 Ohms/sq to 100,000 Ohms/sqadd other sensors laterFor benchtop or inline applicationsSimple one-button operationSmall footprint with detached sensor probeOptions include vacuum-ready probe, PC-based productivity software, Ethernet connectivity, stage, and more
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OhmegaPly®
For many years Teledyne Labtech has manufactured RF & Microwave PCB with integrated OhmegaPly® resistors. OhmegaPly® is a thin film resistor-conductor material. Using standard subtractive printed circuit technology, integral resistors are formed on circuit layers. These resistors can be buried within a Multilayer circuit board or used on the board surface. The resistors can also be used mounted on Metalbacked PCB.OhmegaPly® is available in 25 ohm per square, 50 ohm per square and 100 ohm per square sheet resistivity.
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4 Point Probe Sheet Resistance/Resistivity Measurement with Temperature Controled System
TCR-600
*Controlled Thermo-chuck (room temperature～600℃/less than 20 minutes)*600C compatible probe head with 1mm linear*Controlled with vacuum sensor, digital thermo-meter, vacuum gauge and gas flow meter*Temperature measuring accuracy：±（0.5% + 1℃）
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Multi-Test Resistivity Measurement System
Sheet resistance mapping of thin films with a collinear 4-point probe, Temperature co-efficient of resistance (TCR) of thin films with collinear 4-point probe, Precision temperature co-efficient of resistance (TCR) with 2-point Kelvin probes and precision surface temperature probe, resistor testing with 2-point Kelvin probes,Precision resistor testing with a Kelvin probe card, temperature co-efficient of resistance resistor test (TCR), and Standard TCR test of multiple resistors with Kelvin probes or a probe card.
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Contactless Wafer Gauge for Resistivity, Thickness
MX 60x
The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.
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Non-contact Sheet Resistance/resistivity Measurement Instrument With PC
NC-10 (NC-20)
*Easy operation and data processing by PC*No damage measurement by non-contact eddy current method*Replaceable probes by meas. range (*Second or more probe is for the option)*1 point measurement of center position*5 types of model for each measuring range*Temperature correction for silicon wafer function
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ITO Sheet Resistance Standards (ITOSRS)
Indium Tin Oxide Sheet Resistance Standards (ITOSRS) from VLSI Standards are NIST-traceable products, intended for calibration of both contact and non-contact sheet resistance measurement tools used in the LCD, flat panel and touch-screen markets.
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microRSP
M300
The semi-automatic microRSP-M300 by CAPRES A/S is a unique R&D tool for sheet resistance measurements of conductive surfaces in micro scale. Like the automatic microRSP by CAPRES A/S the semi-automatic microRSP makes use of the micro 4 point probe characterised by having a probe pitch of 1000 times smaller pin spacing/pitch than that of conventional probes.
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Non-contact Inline Sheet Resistance Measurement Module For Flat Panel Display
NC-600
*Non-stop and non-contact sheet resistance measuring of thin film on glass runs through on conveyer*1 to 10 number of probe by sizes of glass is attachable*Glass collision prevention function*Continuous test data report to the host computer
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Non-contact Inline Resistivity Measurement Module
NC-110 (NC-110PV)
*Possible to measure sheet resistance without contact by Max. 3 types of probes*Suitable for production line and tranceportation system*Connect to host PC by LAN to send measurement command and data
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Fully Automatic 4 Point Probe Sheet Resistance System For Semiconductor Process Evaluate
WS-3000
*Automatic probe head selection(exchanger) among 4 kinds of probe head*[No need to exchange a probe head by each different sample measurement]*Edge 1mm measurement is available by dual meas. mode*High cost performance from high speed measurement*FOUP compatible, GEM / SECS compatible
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Manual Four Point Probe Sheet Resistance/resistivity Measurement
RT70V series
• Combinational measurement system by Measurement tester(RT-70V) & Stage.• Thickness input with easy JOG dial operation (RT-70V Tester)• Tester self-test function/Auto change-over measurement range function• Thickness & Temperature correction function for Silicon sample
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microRSP
M200
The window of acceptable sheet resistance is shrinking with each technology node resulting in increasingly more rigorous standards for scale and accuracy of metrology tools. The shortcomings of traditional types of 4 point probes are becoming more and more evident. By developing the microRSP-M200, a unique tool for measuring the sheet resistance of conducting films, hereunder ultra shallow junctions (USJ’s), CAPRES A/S has responded to the growing need for reliable sheet resistance measurements on micro scale.
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SENSOR FOR THICK & CURVED MATERIALS
S3
The smallest, simplest, most affordable high-precision non-contact sheet resistance sensor availableNon-contact measurement of Ohms/sq, Ohms-cm, resistivity, thickness, and moreChoose a sensor in one of four ranges, from .005 Ohms/sq to 100,000 Ohms/sqadd other sensors laterReads any conductive coatingon even the thickest nonconductive substratesOptions include PC-based productivity software, stage, and morePerformance limited by "lift off" phenomenonelevation of sensor above conductive layer must be carefully controlled
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Single Sheet Testing
Incoming material inspection can be very useful where strict quality standards are maintained. It saves a lot of processing cost since lossy material is inspected at the entry level before it goes to production level. Epstein Stack testing is one of the oldest and widely used method for electrical sheet testing.
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Resister
Our ARFC type Film Flat Chip Resistor & ARFCN type Thin Film Chip Resistor Network are high precision Metal Film resistors produced with high purity. Alumina Substrate and Ni-Cr-Si Resistor Film based on high precision Etching Technology. The electrode Terminals are made with Spattering Film and Nickel-Solder Plating, and solderability is very good in all Flow, Reflow and Dipping type soldering for Hybrid IC, SMT, PCB etc. Our ARFC Metal Film Resistor & ARFCN type Thin Film Chip Resistor are being produced under the thorough quality control, and are being used widely in high precision and high reliability electronics circuit such as Measuring Instrument, Medical Instruments, Communication and other Industrial Instruments.
