Alignment
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Product
Tabletop Front & Backside Mask Aligner
Model 200IR
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The OAI Model 200IR Mask Aligner is a tabletop system that requires minimal clean room space. It is a cost-effective alternative for R&D or limited scale, pilot production. Utilizing an innovative, air bearing / vacuum chuck leveling system, the substrate is leveled quickly and gently, for parallel photo mask alignment and uniform contact across the wafer during contact exposure. The Model 200IR Mask Aligner is capable of one micron resolution and alignment precision. It has an alignment module which features mask insert sets and quick-change wafer chucks that enable the use of a variety of substrates and masks without requiring tools for reconfiguration. The alignment module incorporates micrometers for X, Y, and z-axis.
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Product
Automated Front & Backside Mask Aligner System
Model 6000
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With over 4 decades of manufacturing in the semiconductor industry, OAI meets the growing challenge of a dynamic market with an elite class of production photolithography equipment. Built on the proven OAI modular platform, the Model 6000 has front and backside alignment that is fully automated with a submicron printing capability as well as submicron top to bottom front side alignment accuracy which delivers performance that is unmatched at any price. Choose either topside or optional backside alignment which uses OAI’s customized advanced recognition pattern software. These Mask Aligners have OAI’s Advanced Beam Optics with better than ±3% uniformity and a throughput of 200 wafers per hour in first mask mode, which results in higher yields. The Series 6000 can handle a wide variety of wafers from thick and bonded substrates (up to 7000 microns), warped wafers (up to 7 mm-10mm), thin substrates (down to 100 micron thick), and thick photo resist.
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Product
Tabletop Mask Aligner
Model 200
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The OAI Model 200 Mask Aligner is a cost-effective high performance mask Aligner that has been engineered with industry proven components that have made OAI a leader in the photolithography capital equipment industry. The Model 200 is a tableop mask Aligner that requires minimal cleanroom space. It offers an economic alternative for R&D, or limited scale, pilot production. Utilizing an innovative, air bearing / vacuum chuck leveling system, the substrate is leveled quickly and gently, for parallel photo mask alignment and uniform contact across the wafer during contact exposure. The system is capable of one micron resolution and alignment precision.
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Product
3U – 6U SOSA™ Aligned VPX Backplanes
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Using a modular concept based on open standards it is common practice in the civil sector to integrate subsystems components from different manufacturers into a single modular system. The SOSA™ Technical Standard aims at such an interoperability in embedded computing for military applications.
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Product
3U VPX Rugged Processor Card, VPX3-TL Series, SOSA Aligned
20040262
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The VPX3-TL 3U VPX processor blade is powered by Intel® Xeon® W-11865MRE Series Processor, formerly Tiger Lake-H and delivers a greater than generational improvement in performance for enhanced data and graphics and the AI acceleration capabilities required for next-generation mission-critical applications. The SOSA-aligned design of the VPX3-TL module offers embedded computing capabilities that are easily reconfigurable and upgradable, highly cost-effective, and quick to develop and deploy.
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Product
Virtex UltraScale+ HBM FPGA Processor - SOSA Aligned 3U VPX
Model 5586
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- Jade 5585 and 5586 FAQ- Co-processor for distributed FPGA processing tasks- High-Bandwidth Memory (HBM) delivers 20x more memory bandwidth than traditional DDR4 solutions- Board interfaces: 1 GigE, 10 GigE, 40 GigE, dual 100 GigE and PCIe- High-bandwidth memory, FPGA logic and DSP density make this board a single-slot 3U VPX proessing powerhouse- Features Xilinx Virtex UltraScale+ HBM FPGAs- 10 GigE Interface and 40 GigE Interface- Optional VITA 67.3C optical interface for backplane gigabit serial communication- Dual 100 GigE UDP interface- Compatible with several VITA standards including: VITA 46, VITA 48.11, VITA 67.3C and VITA 65 (OpenVPX™ System Specification)- Ruggedized and conduction-cooled- Navigation Design Suite for software and custom IP development
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Product
3U 12-slot VPX Backplane Aligned To SOSA 1.0
1OVX312AFQ-xxxx
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3U 12-slot backplane with profiles aligned SOSA. It is designed to meet the U.S. Army’s C5ISR Modular Open Suite of Standards (CMOSS), and supports high-speed signals on all data paths and VITA 67.3 and VITA 66.5 connectors.
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Product
725-Watt (28VDC input) DC/DC Converter, SOSA™ Aligned, 3U VPX
VPX55HS
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NAI’s VPX55HS-31 is NAI's latest +28 VDC Input, VPX DC/DC Converter. The VPX55HS was developed in alignment of the SOSA™ Technical Standard and is capable of handling up to 725 Watts of output power. It plugs directly into a standard 3U VPX chassis with a VITA 62 1.0” power supply slot. This off-the-shelf solution for VITA 46.0 and VITA 65 systems is compatible with VPX specifications; supports all VITA standard I/O, signals, and features; and conforms to the VITA 62 mechanical and electrical requirements for modular power supplies.
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Product
3U OpenVPX SOSA™-aligned PWM Servo Motor Drive
68PW1
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The 68PW1 is a 3U OpenVPX SOSA™-aligned (basis, Snapshot 2) single-axis PWM servo motor drive that can be configured with closed loop feedback measurement options including Hall, Resolver/Synchro or Encoder. The PWM drive provides programmable PWM output drive (up to 65 V @ 10 A continuous) from a single +28 VDC input source. Ideally suited for rugged Mil-Aero applications, the 68PW1 delivers off-the-shelf solutions that accelerate deployment of SWaP-optimized systems in air, land and sea applications.
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Product
3U OpenVPX SOSA™-Aligned MFIO-Intensive Processing Board
68G6
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The 68G6 is a SOSA™-Aligned 3U OpenVPX board that can be configured with up to three NAI smart I/O and communication function modules. In addition to the standard expansion plane (EP) PCIe and control plane (CP) Ethernet control interfaces, the 68G6 facilitates convenient external access to supported NAI PCIe function modules through its 1 x1 PCIe interface, enabling seamless expansion of host SBC functions for enhanced project solutions, while also offering external access to supported NAI FMx modules via a SATA II interface. The 68G6 is on NAI’s certifiable product development roadmap supporting DO-178C and DO-254 design assurance guidelines for safety-critical applications. Ideally suited for rugged Mil-Aero applications, the 68G6 delivers off-the-shelf solutions that accelerate deployment of SWaP-optimized systems in air, land and sea applications.
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Product
Type 39 CompacFrame Development Platform, 6 And 8 Slot 3U OpenVPX Aligned To SOSA
39S0xBWX94Y3VCC0
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Elma’s SOSA aligned CompacFrame is the next generation portable test platform designed to accelerate development and test of plug-in cards (PICs) aligned to the Open Group® SOSA™ Technical Standard. Accommodates up to 8-slot OpenVPX backplane.
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Product
8 Channel A/D & D/A Zynq UltraScale+ RFSoC Gen 3 Processor - SOSA Aligned 3U VPX
Model 5553
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- Supports Xilinx® Zynq® UltraScale+™ RFSoC FPGAs- 16 GB of DDR4 SDRAM- On-board GPS receiver- 10 GigE Interface- 40 GigE Interface- Optional VITA 67.3C optical interface for backplane gigabit serial communication- Dual 100 GigE UDP interface- Compatible with several VITA standards including: VITA 49, VITA 46, VITA 48, VITA 67.3C and VITA 65 (OpenVPX™ System Specification)- Ruggedized and conduction-cooled versions available- Model 8256 3U VPX SOSA Aligned Development Chassis- Model 6003 unique QuartzXM eXpress module enables migration to other form factors- Video: Model 8256 3U VPX SOSA Aligned Development Chassis- Pentek's Quartz Family of Xilinx Zynq UltraScale+ RFSoC FPGA Products Video- Live Signal Acquisition Video: Quartz Model 5950 and Model 6001 RFSoC boards- Pipeline Newsletter: Strategies for Deploying Xilinx's Zync UltraScale+ RFSoC- Synchronize up to eight modules with Model 5903 High-Speed System Synchronization and Distribution Amplifier - 3U VPX- Please refer to the product datasheet for Installed FPGA IP Module details
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Product
8 Channel A/D & D/A Zynq UltraScale+ RFSoC Processor - SOSA Aligned 3U VPX
Model 5550
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- Now available in RFSoC Gen 3 with the Model 5553- Supports Xilinx® Zynq® UltraScale+™ RFSoC FPGAs- 16 GB of DDR4 SDRAM- On-board GPS receiver- 10 GigE Interface- 40 GigE Interface- Optional VITA 67.3C optical interface for backplane gigabit serial communication- Dual 100 GigE UDP interface- Compatible with several VITA standards including: VITA 49, VITA 46, VITA 48, VITA 67.3C and VITA 65 (OpenVPX™ System Specification)- Ruggedized and conduction-cooled versions available- Model 8256 3U VPX SOSA Aligned Development Chassis- Model 6001 unique QuartzXM eXpress module enables migration to other form factors- Video: Model 8256 3U VPX SOSA Aligned Development ChassisPentek's Quartz Family of Xilinx Zynq UltraScale+ RFSoC FPGA Products Video- Live Signal Acquisition Video: Quartz Model 5950 and Model 6001 RFSoC boards- Pipeline Newsletter: Strategies for Deploying Xilinx's Zync UltraScale+ RFSoC- Synchronize up to eight modules with Model 5903 High-Speed System Synchronization and Distribution Amplifier - 3U VPX- Please refer to the product datasheet for Installed FPGA IP Module details
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Product
725-Watt (270VDC input) DC/DC Converter, SOSA™ Aligned, 3U VPX
VPX57HS
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NAI’s VPX57HS-31 is NAI's latest +270 VDC Input, VPX DC/DC Converter. The VPX57HS was developed in alignment of the SOSA™ Technical Standard and is capable of handling up to 725 Watts of output power. It plugs directly into a standard 3U VPX chassis with a VITA 62 1.0” power supply slot. This off-the-shelf solution for VITA 46.0 and VITA 65 systems is compatible with VPX specifications; supports all VITA standard I/O, signals, and features; and conforms to the VITA 62 mechanical and electrical requirements for modular power supplies.
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Product
SOSA Aligned LVDS with Optical I/O Kintex UltraScale FPGA - XMC
Model 71813
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- Jade Xilinx Kintex UltraScale FPGA Products and Navigator Design Suite Software Video- Jade Xilinx Kintex UltraScale FPGA Family Brochure- Supports Xilinx Kintex Ultrascale FPGAs- Supports the emerging SOSA™ Technical Standard- PCI Express (Gen. 1, 2 & 3) interface up to x8VITA 42.0 XMC compatible with switched fabric interfaces- Optional front panel optical interface- Ruggedized and conduction-cooled versions available- Please refer to the product datasheet for Installed FPGA IP Module details
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Product
High-Speed System Sync and Distribution Amplifier - SOSA Aligned 3U VPX
Model 5503
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- Supports Xilinx® Zynq® UltraScale+™ RFSoC FPGAs- Synchronizes up to 32 channels across four Quartz boards- Synchronizes sampling and data acquisition for multichannel systems- Provides single sample accurate synchronization between multiple channels and multiple boards- Synchronizes gating and triggering functions- Optional VITA 67.3D optical interface for backplane gigabit serial communication
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Product
Rugged Deployable, Rackmountable Chassis For 3U Cards Aligned To SOSA Or CPCI Serial
20037765
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This unit is a rack-mountable, rugged deployable chassis for use in harsh environments. The chassis has been designed to provide modularity and flexibility to support the full design life cycle of a system from initial concept and lab development through to qualification and full platform deployment.
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Product
3U VPX SOSA Aligned Development Chassis
Model 8256
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- Video: AOC 2021 Mercury's Model 8256 SOSA Aligned Dev. Platform and RFM3202 Microwave Transceiver- Video: Model 8256 3U VPX SOSA Aligned Development Platform, multi-vendor operation demonstration- Video: Model 8256 3U VPX SOSA Aligned Development Chassis- Developed in alignment with the SOSA™ Technical Standard- Ideal development platform for Pentek's- Model 5550 8-Channel A/D & D/A Zynq UltraScale+ RFSoC Processor - SOSA Aligned 3U VPX- Model 5553 8-Channel A/D & D/A Zynq UltraScale+ RFSoC Processor - SOSA Aligned 3U VPX- 8-slots provide space for a range of acquisition and processing boards- Optional rear panel RF and optical connections- Compatible with the Quartz product family
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Product
3U OpenVPX™ SOSA™-Aligned Single Board Computer Intel® Xeon® W Processor (Tiger Lake)
68INT6H
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The 68INT6H is a SOSA™-aligned 3U OpenVPX Intel® Xeon® W Processor (Tiger Lake) w/ 8 Cores & 24 M Smart Cache running up to 2.6 GHz Single Board Computer that can be configured with up to two smart I/O and communications function modules (w/ NAI-XMC configuration option). Ideally suited for rugged Mil-Aero applications, the 68INT6H delivers off-the-shelf solutions that accelerate deployment of SWaP-optimized systems in air, land and sea applications.
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Product
DUV Mask Aligner
Model 200E
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OAI’S Model 200E DUV Mask Aligner performs all the functions of the tabletop Model 200 Mask Aligner but utilizes a 185nm Excimer Lamp as the UV light source. It is used for Biotechnology Processing.
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Product
FlexVNX+ Test And Development Platform Aligned To SOSA And VITA 90 Standards
39S08VPX98Y2VAN
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Elma’s all-new FlexVNX+ Test and Development chassis is the next generation portable test platform designed to accelerate development and test of VNX+ plug-in cards (PICs) aligned to The Open Group® SOSA™ Technical Standard and VITA 90.
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Product
Rugged Deployable CMFF Chassis Aligned To SOSA™ With SAVE Tray
ATRSAV07BRN1HVQE4
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CMOSS Modular Form Factor (CMFF) field-deployable chassis, with a tray compliant with the Standard A-Kit Envelope (SAVE). Includes a 7 slot 3U VPX backplane, chassis manager, and VITA 62 plug-in power supply. it is aligned with the SOSA™ Technical Standard and designed for C5ISR, EW and EO/IR applications. Meets MIL-STDs for shock, vibration, and other environmental standards.
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Product
7-Slot 3U OpenVPX Backplane Aligned To SOSA | 6 VITA 65 Slots + 1 VITA 62 PSU Slot
1SVX306AXX-XX31
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These six VITA 65 slots plus one VITA 62 slot (6+1) backplanes are designed in alignment with The Open Group® Sensor Open Systems Architecture™ Technical Reference Standard, or SOSA®.
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Product
Custom Solutions for Mask Aligners
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OAI offers custom designed solutions built to your unique specification.
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Product
SOSA Aligned Family Of Chassis Managers, VITA 46.11
79-V46-CHMC-x-CHMC-CMx-S1
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Designed to align with SOSA™, Elma’s VPX Chassis Manager assures the proper operation of the chassis and boards in defense embedded computing platforms. It monitors the health of the chassis, reports anomalies and takes actions when needed.
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Product
3U 12-Slot Development Platform Aligned To SOSA 1.0 And CMOSS
39E12WUX98Y2VCM0-SOSA1
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3U OpenVPX development platform aligned with SOSA 1.0. It supports both SOSA and CMOSS profiles. It includes: 2 I/O intensive SBC, 7 primary payload, 1 radial clock, 2 switch and 2 power. Includes VITA 67.3 RF and optical I/O modules.
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Product
Automated Mask Aligner with Integrated Mask Changer
Model 6000A-MC
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The Model 6000A-MC is a precision system combining OAI’s Model 6000, Automated Production Mask Aligner, with an integrated mask changer. The mask changer can handle from 10 to 150 masks. Ideal for both semiconductor and bio-tech applications. It also is designed with a bar code reader to assure each mask is coordinated to the right process. Please contact OAI for further product information.
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Product
3U OpenVPX™ SOSA™-Aligned SBC with Intel® Core™ i7-1186GRE Processor (Tiger Lake)
68INT6
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The 68INT6 is a SOSA™-aligned 3U OpenVPX Intel® Core™ i7-1186GRE Processor / integrated PCH-LP (Tiger Lake) w/ 4 Cores & 12M Smart Cache running up to 2.8 GHz Single Board Computer that can be configured with up to two Smart I/O and communications function modules (w/ NAI-XMC configuration option). Ideally suited for rugged Mil-Aero applications, the 68INT6 delivers off-the-shelf solutions that accelerate deployment of SWaP-optimized systems in air, land and sea applications.
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Product
3U 4-Slot OpenVPX Backplane Aligned To SOSA With 2 VITA 67.3 Aperture Slots
1SVX304AxP-xxxx
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Designed in alignment with the SOSA, Elma's 3U 4-Slot backplanes offer 4 Plug in Card (PIC) slots to support MOSA, CMOSS and HOST initiatives. It support high-speed signals on all data paths and VITA 67.3 connectors and VITA 66.5 optical connectors.
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Product
Type 39 CompacFrame Development Platform, 2 And 4 Slot 3U OpenVPX Aligned To SOSA
39S0xBWX9ZY2VCC0
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Elma’s CompacFrame is the next generation portable test platform designed to accelerate development and test of plug-in cards (PICs) aligned to the Open Group® SOSA™ Technical Standard. Accommodates up to 4-slot OpenVPX backplane.





























