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Refinery Gas Analysis
Gas compositions produced in refinery plants consist of hydrocarbons, permanent gases, H2S, etc. Analyzing these gases is essential to control the quality of chemical products and plant operation. Shimadzu's RGA systems, available in numerous configurations, are designed to analyze various compositions in a variety of processes. In research and development for petrochemical and its catalysis field, target compounds often contain high-boiling point compounds and isomers. The Shimadzu CERGA makes it possible to precisely analyze those samples.
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Quadrupole Mass Spectrometer for Residual Gas Analysis
RGA Series
Systems for the examination of components present in a vessel or evolved from a process. HALO RGA – for residual gas analysis. 3F Series RGA – triple filter mass spectrometers for analytical applications. 3F-PIC – pulse ion counting detection for fast event studies. Measures the concentration of gases and vapours in real time.
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Vacuum Process And Chamber Environment Monitors
Our process monitors are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), analytical equipment, and control software. Process mass spectrometers are used in varied applications, including; Semiconductor, Thin Film (CVD, Etch, PVD and degas), pharmaceutical lyophylization and bulk gas purity monitoring.
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Partial Pressure Monitor for RGA
PPM100
Stanford Research Systems, Inc.
The PPM100 is a stand-alone controller/monitor for SRS residual gas analyzers. It measures partial pressures from SRS RGAs and total pressure from up to four capacitance manometers. Graphical output is available on a touchscreen LCD display.
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Residual Gas Analyzers
Residual Gas Analyzers are an effective tool to analyze system gas loads resulting from real leaks, virtual leaks or chamber wall outgassing. RGAs have a number of advantages over traditional, dedicated gas leak detectors including the ability to differentiate between different gas species, comparable sensitivity levels, the ability to detect internal or "virtual" leaks and to detect and analyze outgassing problems.
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Residual Gas Analyzers, Mass Spectrometers
the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.
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Nexis GC-2030 BIDUFRGA
UFRGA Series
The Ultrafast RGA system utilizes the new Barrier Discharge Ionization Detector (BID) technology coupled with Nexis GC-2030 to create new system GC for ultrafast, high-sensitivity analysis. Since the electrode creating Helium plasma is totally isolated from the carrier gas, there is no chance to contaminate this electrode with a dirty sample. This enables long-term stability.
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Residual Gas Analyzer
Models XT100, XT200, XT300
The XT residual gas analyzer (RGA) from Extorr offers exceptional performance and value. These RGAs provide a more detailed vacuum gas analysis than is offered by any other single competitive device. Each system comes complete with a multi-gauged quadrupole probe, a control and communications unit (CCU), and a real-time Windows software package.
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250W - Single Output
RGA Series
*1/16th Brick Footprint*9-40 Vdc, 9-53 Vdc Inputs*3.3 up to 40 Vdc Outputs*Up to 20 A max Output Current*Non-Isolated Step-Down*-40 to 110 °C Case Temperature*Rugged 5-sided Aluminum Case
