Mask
screens a surface or a signal to a certain shape.
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Product
Automated Mask Aligner with Integrated Mask Changer
Model 6000A-MC
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The Model 6000A-MC is a precision system combining OAI’s Model 6000, Automated Production Mask Aligner, with an integrated mask changer. The mask changer can handle from 10 to 150 masks. Ideal for both semiconductor and bio-tech applications. It also is designed with a bar code reader to assure each mask is coordinated to the right process. Please contact OAI for further product information.
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Product
Mask Alignment Systems
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EVG’s inventions, such as the world’s first bottom-side alignment system in 1985, have pioneered and set the industry standards in both top and double-sided lithography, aligned wafer bonding and nanoimprint lithography. EVG contributes in these areas through continuous development of mask aligner product generations to augment this core lithography technology.
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Product
DUV Mask Aligner
Model 200E
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OAI’S Model 200E DUV Mask Aligner performs all the functions of the tabletop Model 200 Mask Aligner but utilizes a 185nm Excimer Lamp as the UV light source. It is used for Biotechnology Processing.
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Product
Mask ventilation resistance and pressure differential tester
WKS-3102
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Mask ventilation resistance and pressure differential tester is used to measure the inhalation and exhalation resistance of mask under specified conditions. Applicable to mask manufacturers, labor protection equipment inspection agencies to carry out related testing and inspection of mask products, mask breath resistance tester, breathing valve air tightness tester, breath resistance machine for measuring respirator and mask protection products in Inspiratory resistance and expiratory resistance under specified conditions.
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Product
Front & Backside, Semi-Automatic Mask Aligner
Model 800E
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The OAI Model 800E front and backside, semi-automatic mask aligner system offers advanced features and specifications found most often in costly automated production mask aligners. With the development of this mask aligner, OAI meets the growing challenge of the dynamic semiconductor and MEMS market with a new class of mask aligners that are engineered for R&D and low volume production.
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Product
Mask Foreign Matter Inspection Device
PR-PD2HR
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Efficient foreign matter inspection and measurement with high yield.
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Product
MASK MVM-SEM® E3600 Series
E3640
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Ongoing semiconductor process shrinks are driving new demand for stable, highly precise measurement of pattern dimensions for photomask and wafer production. The E3640 satisfies these requirements with industry-leading precision measurement capabilities and upgraded functionality that enhances mask R&D and production efficiency.
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Product
Mask Treatment Process
Model 100MT
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OAI offers a unique process which extends the life of your mask, says good bye to tedious washing and drying of mask and thus enables your mask aligner to have increased productivity at the lowest cost of ownership. The Model 100 MT is a 2 step process.
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Product
Tabletop Front & Backside Mask Aligner
Model 200IR
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The OAI Model 200IR Mask Aligner is a tabletop system that requires minimal clean room space. It is a cost-effective alternative for R&D or limited scale, pilot production. Utilizing an innovative, air bearing / vacuum chuck leveling system, the substrate is leveled quickly and gently, for parallel photo mask alignment and uniform contact across the wafer during contact exposure. The Model 200IR Mask Aligner is capable of one micron resolution and alignment precision. It has an alignment module which features mask insert sets and quick-change wafer chucks that enable the use of a variety of substrates and masks without requiring tools for reconfiguration. The alignment module incorporates micrometers for X, Y, and z-axis.
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Product
NanoLattice Pitch Standard for Mask Handling Tools (NLSM)
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The NanoLattice™ (NLSM) 100 nm pitch standard utilizes gratings with near perfect periodicity to calibrate magnification and scan linearity of CD-SEM and Atomic Force Microscopes (AFM). Make the grade, with the only pitch standard of its kind available below the 130 nm node.
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Product
MASK MVM-SEM® E3600 Series
E3630
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Together with the miniaturization of semiconductors, high-accurate and stable measurement and evaluation is needed for circuit patterns such as mask patterns and holes. Advantest's E3600 series are used by a wide variety of companies, from semiconductor manufacturers to photomask makers to device and materials producers.
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Product
Automated Front & Backside Mask Aligner System
Model 6000
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With over 4 decades of manufacturing in the semiconductor industry, OAI meets the growing challenge of a dynamic market with an elite class of production photolithography equipment. Built on the proven OAI modular platform, the Model 6000 has front and backside alignment that is fully automated with a submicron printing capability as well as submicron top to bottom front side alignment accuracy which delivers performance that is unmatched at any price. Choose either topside or optional backside alignment which uses OAI’s customized advanced recognition pattern software. These Mask Aligners have OAI’s Advanced Beam Optics with better than ±3% uniformity and a throughput of 200 wafers per hour in first mask mode, which results in higher yields. The Series 6000 can handle a wide variety of wafers from thick and bonded substrates (up to 7000 microns), warped wafers (up to 7 mm-10mm), thin substrates (down to 100 micron thick), and thick photo resist.
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Product
Mask Flatness Measurement System
Tropel® UltraFlatTM 200 Mask System
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The Tropel® UltraFlatTM 200 Mask System was designed specifically for the photomask industry. It delivers the lowest measurement uncertainty for ever-tightening mask flatness specifications. Shrinking device features require not only flatter wafers, but flatter masks.
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Product
Large Substrate Mask Aligner
Model 6020
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The Model 6020 is a large substrate Production Mask Aligner or Auto-flood Exposure System for RDL First Level Advanced Packaging (PLP) and markets requiring exposure of large glass panels. It is engineered with OAI’s precision, reliability, and quality that is found in all of OAI’s products. The features include wedge effect leveling, superb process repeatability, ≤ 2.0µm printing resolution, and remote diagnostics. Using robotic handling, the system can stand alone or be fully integrated with photo resist processing.
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Product
Reticle/Mask Particle Remover
RP-1
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The RP-1 automatically removes particles from the reticle/mask by air (or N2) and vacuum suction. Routinely removing the particles before the lithography process extends the replacement cycle of the pellicle and cleaning cycle of the mask, thereby contributing to a reduction in running costs.
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Product
Respirator Fit Testers
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Respirators and masks play a crucial role in protecting workers from various airborne hazards, including environmental and chemical dangers, as well as airborne biohazards, in the workplace.
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Product
Mixed Signal Oscilloscope: 100 MHz, 2 Analog Plus 8 Digital Channels
MSOX2012A
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100 MHz2 analog plus 8 digital channels Easily view your signals on the 8.5-inch WVGA display Capture more data with up to 1 Mpts memory See more signal detail with 50,000 wfms/s update rate Expand your measurement capabilities with full upgradability: Add 20 MHz function generator, 3-digit voltmeter, serial trigger and analysis, segmented memory & mask testing at any time Easily set up teaching labs with our free Educator's Resource Kit
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Product
Lithography
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EVG’s key competencies in lithographic technology lie in the high-throughput contact and proximity exposure capabilities of its mask aligners and its newly developed, revolutionary and highly versatile maskless exposure lithography systems. These capabilities are complemented by its resist coating and resist development systems with advanced in-house process competences and hands-on development skills.
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Product
PXIe 200 MHz Oscilloscope
M9241A
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200 MHz bandwidth oscilloscope2 analog channels5 GSa/s sample rate1,000,000 wfms/s update rate Isolate signals in seconds with exclusive zone triggering Additional options: 20 MHz arbitrary waveform generator, 3-digit voltmeter, serial trigger and analysis and mask testing
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Product
Medical Face Masks Flammability Tester
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Sataton Instruments Technology CO., Ltd
Medical face masks flammability tester is to determine the fire resistance performance of medical face masks and full face masks. The tester can provide a specific flame and make the dummy head with facepiece move to the flame under a specific speed. The operator can observe the effects of the flame on the masks and facepiece. The tester is suitable for medical face mask, respiratory protective equipment and full face masks.
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Product
PXIe Modular Oscilloscopes
M924XA
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200 MHz, 500 MHz and 1 GHz bandwidths2 analog channels and 5 GSa/s sample rate See more signal detail with 1,000,000 wfms/s update rate Quickly isolate signals with zone triggering Also available: 20 MHz arbitrary waveform generator, 3-digit voltmeter, serial trigger/analysis and mask testing
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Product
500 MHz 2 Channels Oscilloscope
DSOX3052A
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500 MHz2 analog channels Easily view your signals on the 8.5-inch WVGA display Capture more data with up to 4 Mpts memory See more signal detail with 1,000,000 wfms/s update rate Expand your measurement capabilities with full upgradability: Add bandwidth, memory, digital channels, 20 MHz arbitrary waveform generator, 3-digit voltmeter, serial trigger and analysis, segmented memory & mask testing at any time
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Product
Mixed Signal Oscilloscope - 1 GHz, 4 Analog Plus 16 Digital Channels
MSOX4104A
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1 GHz4 analog plus 16 digital channels Easily view signals on the large 12.1-inch capacitive touch screen Isolate signals in seconds with exclusive Zone touch triggering Capture more data with 4 Mpts memory and standard segmented memory See more signal detail with 1,000,000 wfms/s update rate Expand your measurement capabilities with full upgradability: Add bandwidth, dual-ch 20 MHz arbitrary Wave Gen, 3-digit DVM, serial trigger and analysis & mask testing at any time
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Product
Mixed Signal Oscilloscope - 200 MHz, 2 Analog Plus 16 Digital Channels
MSOX4022A
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200 MHz2 analog plus 16 digital channels Easily view signals on the large 12.1-inch capacitive touch screen Isolate signals in seconds with exclusive Zone touch triggering Capture more data with 4 Mpts memory and standard segmented memory See more signal detail with 1,000,000 wfms/s update rate Expand your measurement capabilities with full upgradability: Add bandwidth, dual-ch 20 MHz arbitrary WaveGen, 3-digit DVM, serial trigger and analysis & mask testing at any time
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Product
Aerospace and Defense Software (3000A/T/G X-Series)
D3000AERB
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MIL-STD 1553 and ARINC 429 triggering and analysis for the InfiniiVision 3000A, 3000T, 3000G X-Series oscilloscopes, along with mask testing, advanced math, video analysis, and more.
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Product
Mixed Signal Oscilloscope - 500 MHz, 2 Analog Plus 16 Digital Channels
MSOX4052A
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500 MHz2 analog plus 16 digital channels Easily view signals on the large 12.1-inch capacitive touch screen Isolate signals in seconds with exclusive Zone touch triggering Capture more data with 4 Mpts memory and standard segmented memory See more signal detail with 1,000,000 wfms/s update rate Expand your measurement capabilities with full upgradability: Add bandwidth, dual-ch 20 MHz arbitrary Wave Gen, 3-digit DVM, serial trigger and analysis & mask testing at any time
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Product
Medical Mask Gas Exchange Pressure Difference Tester
DRK371
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Shandong Drick Instruments Co., Ltd.
It is used to measure the gas exchange pressure difference of medical surgical masks and other products.
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Product
Thyristors Application Specific Devices
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A.S.D. (Application Specific Discretes) technology is a vertical integrated power technology using a full planar process. By applying the masking process on both sides of the chip, higher current density is achievable than is possible with epitaxial base or horizontal structures.
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Product
Mixed Signal Oscilloscope: 200 MHz, 2 Analog Plus 8 Digital Channels
MSOX2022A
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200 MHz2 analog plus 8 digital channels Easily view your signals on the 8.5-inch WVGA display Capture more data with up to 1 Mpts memory See more signal detail with 50,000 wfms/s update rate Expand your measurement capabilities with full upgradability: Add 20 MHz function generator, 3-digit voltmeter, serial trigger and analysis, segmented memory & mask testing at any time Easily set up teaching labs with our free Educator's Resource Kit
