ResMap or DualMap EFEM

Creative Design Engineering, Inc. (CDE)

*Type: EFEM*Wafer load: FOUP*Wafer size: 300mm*Mini Environment: yes*Probe Change: 1, 2 or 4 probes*Aligner: yes*Size: depends on configuration*Range: 1mΩ/☐ to 10MΩ/☐*Accuracy: 0.5%*Repeatability: 0.02% *Static Repeatability: 0.1% dynamic