High Stability Plane Mirror Interferometer

10706B - Keysight Technologies

The Keysight 10706B High Stability Plane Mirror Interferometer is a dual pass interferometer used for multiple axis applications such as X-Y stages where the measurement mirror may move perpendicular to the measurement axis. This thermally stable optic, an exact functional replacement for the 10706A Plane Mirror Interferometer, reduces thermal measurement drift to 1/12 the value typically achieved by conventional plane mirror interferometers. The unique contribution of the 10706B is its tolerance of angular misalignment of the plane mirror reflector. The 10706A can accept a range of measurement mirror angular alignment changes.