X-ray Fluorescence (XRF) Measuring Instrument
FISCHERSCOPE XDV-ยต - Helmut Fischer AG (Fischer Technology, Inc.)
Measuring instrument optimised for micro-analysisDepending on the X-ray optics, structures with a size of100 m or less can be analysedVery high intensities and thus good precisionEven for thin coatings, measurement uncertainty < 1 nm possibleSuitable only for plane or nearly plane samplesLarge and spacious measurement chamber with a cutout(C-slot)Automated series testing with fast, programmable XY-stage