Plasma Etcher / Asher

PA-3000-A ETCHER - TEK-VAC INDUSTRIES Inc. (TEK-VAC INDUSTRIES Inc.)

Process chamber with plasma view window and full access hinged door. RF hot process shelves with opposing ground electrodes.
Throttle valve. Capacitance manometer. Internal pumping system with option for Fomblin filled chemical series mechanical pump.
Flow control electronics and cabinet. Up to four mass flow control assemblies can be incorporated into our system.
RF matching network and 600 watt maximum power supply.
Fully enclosed cabinet.
Custom internal fixturing to accommodate specific substrate shapes and sizes. Plasma gas selection for optimal performance.